Method for producing a microscreen

Patent metadata

Field	Value
Publication number	US-9442379-B2
Application number	US-201414770244-A
Country	US
Kind code	B2
Filing date	Feb 17, 2014
Priority date	Feb 25, 2013
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

A microscreen, substantially formed of a photoresist material, is produced by applying a photoresist layer to a support using a liquid photoresist, partially covering the photoresist layer with a mask that defines the structure of the microscreen, exposing the photoresist to radiation, developing the photoresist, and removing the photoresist from the support.

First claim

The invention claimed is:

1. A process for producing a microsieve substantially formed by a photoresist material, comprising:
applying a liquid photoresist to a first surface of a carrier to form a photoresist layer, the carrier being a detachment layer activatable by radiation and having a second surface opposite to the first surface;
partly covering the photoresist layer with a mask determining a structure of the microsieve;
exposing the photoresist by action of radiation;
developing the photoresist; and
activating the carrier by irradiating the second surface of the carrier, to detach the photoresist from the carrier.

2. A process for producing a microsieve substantially formed by a photoresist material, comprising:
applying a liquid photoresist to a carrier to form a photoresist layer;
partly covering the photoresist layer with a mask determining a structure of the microsieve;
exposing the photoresist by action of radiation;
developing the photoresist;
applying a protective can to the carrier, the protective can covering an edge portion of the carrier while exposing a central portion of the carrier; and
with the protective can applied to the carrier, detaching the central portion of the carrier from the photoresist by etching to obtain dissolution of the central portion, the edge portion of the carrier remaining on the photoresist as an edge of the microsieve upon completion of the etching.

Assignees

• Siemens Ag

Inventors

• Kornely Susanne
• Schieber Markus
• Sickert Daniel

Classifications

• B01D61/14

  Ultrafiltration; Microfiltration · CPC title

• B01D39/1692 Primary

  Other shaped material, e.g. perforated or porous sheets · CPC title

• G03F7/32

  Liquid compositions therefor, e.g. developers · CPC title

• B01D69/02

  characterised by their properties · CPC title

• B01D67/0034

  by micromachining techniques, e.g. using masking and etching steps, photolithography · CPC title