Method and apparatus for applying a sheet to a substrate

Patent metadata

Field	Value
Publication number	US-9440254-B2
Application number	US-51725107-A
Country	US
Kind code	B2
Filing date	Dec 3, 2007
Priority date	Dec 4, 2006
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

The invention provides a method and apparatus for laminating a sheet to a substrate in a stress free and distortion-less manner. The method comprises providing the sheet and substrate such that an attractive force between them exists that is capable of bringing the sheet and surface together at least when their distance is shorter than a critical distance. The method creates these conditions by locally making an initial contact between the sheet and substrate such that at a contact front, being the boundary between areas where the substrate and sheet are in contact and those where they are not in contact, these conditions exist. In a further step the sheet and substrate are allowed to gradually make contact such that the contact front advances along either of the substrate or sheet surface therewith increasing the contacting area between the substrate and the sheet. The method is advantages when used during imprint lithography or embossing processes or other processes where feature patterns need to be transferred from the substrate to the surface or vice versa.

First claim

The invention claimed is:

1. A method for establishing contact between a first surface of a substrate and a second surface of a sheet, the method comprising:
providing the substrate and the sheet;
providing an attractive force between the substrate and the sheet, wherein the attractive force is a surface force operating between the first surface and the second surface, and the attractive force actively brings at least part of the first surface and the second surface towards each other when a first distance between the at least part of the first surface and the second surface is smaller than a threshold distance;
establishing initial contact between the first surface and a first area of the second surface while preventing the establishment of a further contact between the first surface and a second area of the second surface, whereby the first area and the second area are separated by a contact front; and
establishing a further contact by allowing the contact front to advance along the first surface in the direction of the second area such that the advancement of the contact front is caused by the attractive force.

2. The method according to claim 1 , wherein before establishing further contact, at least one of the substrate and the flexible sheet comprises a fluid such that a part of at least one of the first surface and the second surface is being provided by the fluid.

3. The method according to claim 2 , wherein the fluid forms a contact angle of at most 90 degrees with at least one of the first surface and the second surface.

4. The method according to claim 1 , wherein the initial contact is established such that at least two independent contact fronts are formed defining at least two independent second areas and that during the establishment of further contact the at least two contact fronts advance in the direction of the corresponding second area.

5. The method according to claim 1 , further comprising:
preventing the second area from making contact with the substrate surface comprises restraining at least a part of the second area from making contact with the first surface, therewith preventing the contact front to advance after establishing initial contact, and;
releasing a portion of the restrained part of the second area to allow the contact front to advance.

6. The method according to claim 5 , wherein the contact front advances with the advancement rate over at least a part of the released part of the second area, and the second area is released with a release rate, the release rate being smaller than the advancement rate.

7. The method according to claim 6 , wherein the advancement rate is measured and the result is used to set the release rate.

8. The method according to claim 5 , wherein during establishment of further contact, the advancement rate is measured at least once and the measured advancement rate value is used to adjust the release rate.

9. The method according to claim 1 , wherein the sheet comprises a template pattern for transferring to the substrate.

10. The method according to claim 9 , wherein the template pattern is transferred to the substrate using a photolithographic process.

11. The method according to claim 9 , wherein the template pattern comprises a relief surface and the template pattern is transferred to the substrate using an embossing process.

12. The method according to claim 9 , wherein after transferring of the template pattern to the substrate, the template pattern is detached from the substrate.

13. An apparatus for establishing a contact between a first surface of a substrate and a second surface of a sheet, the apparatus comprising:
a first holder for holding the substrate;
a second holder for holding at least a first part of the first area of the flexible sheet;
means between the first surface and the second surface for producing an attractive force between the substrate and the sheet, the attractive force actively bringing at least part of the first surface and the second surface towards each other when a first distance between the at least part of the first surface and the second surface is smaller than a threshold distance; and
contacting means for establishing an initial contact between the first surface and the first area of the second surface while preventing the establishment of a further contact between the first surface and the second area of the second surface, whereby the first area and the second area are separated by a contact front, wherein a further contact is established by allowing the contact front to advance along the first surface in the direction of the second area such that the advancement of the contact front is caused by the attractive force.

14. The apparatus according to claim 13 , further comprising controlling means for controlling the advancement rate.

15. The apparatus according to claim 14 , wherein the controlling means comprise restraining and releasing means for restraining and releasing at least a part of the second area of the second surface.

16. The apparatus according to claim 15 , wherein the controlling means further comprise measuring means for measuring the advancement rate.

17. The apparatus according to claim 16 wherein the controlling means further comprise a regulating unit, the regulating unit being capable of adjusting the release rate according to a measured advancement rate.

18. The apparatus according to claim 15 , wherein the restraining and releasing means include a plurality of spaced apart devices, each device being capable of restraining and releasing a portion of the second area of the sheet, the largest distance between two neighboring spaced apart devices being at most 5 mm.

19. An apparatus for establishing a contact between a first surface of a substrate and a second surface of a sheet, the apparatus comprising:
a first holder for holding the substrate;
a second holder for holding at least a first part of the first area of the flexible sheet;
a fluid between the first surface and the second surface for providing an attractive force between the substrate and the sheet, the attractive force actively bringing at least part of the first surface and the second surface towards each other when a first distance between the at least part of the first surface and the second surface is smaller than a threshold distance; and
an actuator for establishing an initial contact between the first surface and the first area of the second surface while preventing the establishment of a further contact between the first surface and the second area of the second surface, whereby the first area and the second area are separated by a contact front, wherein a further contact is established by allowing the contact front to advance along the first surface in the direction of the second area such that the advancement of the contact front is caused by the attractive force.

20. The apparatus according to claim 19 , wherein the actuator is further configured to control the advancement rate.

21. The apparatus according to claim 20 , wherein the actuator is further configured to restrain and release at least a part of the second area of the second surface.

22. The apparatus according to claim 21 , further comprising a sensor to measure the advancement rate.

23. The apparatus according to claim 22 , further comprising a processor configured to adjust the release rate according to a measured advancement rate.

24. The apparatus according to claim 21 , wh

Assignees

• Verschuuren Marcus Antonius
• Megens Mischa
• Koninklijke Philips Nv

Inventors

• Verschuuren Marcus Antonius
• Megens Mischa

Classifications

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B05D1/28 Primary

  performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers · CPC title

• B05C1/027

  only at particular parts of the articles (at particular parts of work of indefinite length B05C1/16) · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title