Cryopump and method for regenerating the cryopump

Patent metadata

Field	Value
Publication number	US-9440165-B2
Application number	US-201313782420-A
Country	US
Kind code	B2
Filing date	Mar 1, 2013
Priority date	Mar 1, 2012
Publication date	Sep 13, 2016
Grant date	Sep 13, 2016

Abstract

A method for regenerating a cryopump includes stopping a pressure sensor for the cryopump, starting to heat a cryogenic surface for adsorbing gas molecules, starting the rough evacuation of the cryopump while the pressure sensor is stopped, and terminating the rough evacuation while the pressure sensor is stopped. This method may include activating the pressure sensor after the rough evacuation has been terminated.

First claim

What is claimed is:

1. A cryopump comprising:
a cryopanel having an adsorption region for adsorbing gas molecules;
a cryopump housing arranged to enclose the cryopanel;
a rough valve configured to connect the cryopump housing to a roughing pump;
a pressure sensor configured to measure an internal pressure in the cryopump housing;
a control unit configured to control a stopped period of the pressure sensor and regeneration of the cryopanel;
wherein the stopped period comp…

Assignees

• Sumitomo Heavy Industries

Inventors

• Takahashi Kakeru

Classifications

• F04B37/08 Primary

  Mechanical Engineering · mapped topic

• F04B37/085

  Mechanical Engineering · mapped topic

• F04B37/06

  Mechanical Engineering · mapped topic

• B01D8/00 Primary

  Operations & Transport · mapped topic

• F04B49/02 Primary

  Mechanical Engineering · mapped topic