Monolithic active pixel radiation detector with shielding techniques

Patent metadata

Field	Value
Publication number	US-9437771-B2
Application number	US-201313893514-A
Country	US
Kind code	B2
Filing date	May 14, 2013
Priority date	May 14, 2013
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

A monolithic active pixel radiation detector including a method of fabricating thereof. The disclosed radiation detector can include a substrate comprising a silicon layer upon which electronics are configured. A plurality of channels can be formed on the silicon layer, wherein the plurality of channels are connected to sources of signals located in a bulk part of the substrate, and wherein the signals flow through electrically conducting vias established in an isolation oxide on the substrate. One or more nested wells can be configured from the substrate, wherein the nested wells assist in collecting charge carriers released in interaction with radiation and wherein the nested wells further separate the electronics from the sensing portion of the detector substrate. The detector can also be configured according to a thick SOA method of fabrication.

First claim

What is claimed is:

1. A monolithic active pixel radiation detector, comprising:
a substrate comprising a silicon layer upon which electronic circuits are configured;
a plurality of channels formed on said silicon layer, wherein said plurality of channels is connected to sources of charge signals, wherein a source of said charge signals among said sources of charge signals is biased entirely or partially in depletion in a high-resistivity bulk layer of said substrate, wherein said charge signals are collected by implanted electrodes and flow through electrically conducting vias established in an isolation oxide on said substrate;
at least one first nested well, implanted deep and configured from said substrate, wherein said at least one first nested well comprises a signal collection electrode assists in a collection of charge carriers released in interaction with radiation and wherein at least one second nested well, implanted shallower and entirely confined in said at least one first nested well, so as to separate said electronic circuits from a sensing portion of said substrate, wherein said at least one second nest well comprises a shallow well; and
a buried oxide configured from said substrate wherein said shallow well is located beneath said buried oxide and is entirely electrically isolated through confinement inside said at least one first nested well and comprises an AC-ground plane that is tied to a fixed potential.

2. The detector of claim 1 wherein said at least one first nested well comprises a first well that assists in said collection of charge carriers, and wherein said at least one second nested well further comprises a second well nested by implantation within said first well to inhibit capacitive coupling between said electronic circuits and said sensing portion and wherein said at least one second nested well encompasses said electronic circuits such that no part of said electronic circuits, except wiring, lies out of said at least one second nested well nor directly over any part of said high-resistivity bulk layer of said substrate.

3. The detector of claim 2 wherein said first well comprises a deep buried P(N)-type well implanted in a handle portion of an SOI process wafer comprising said substrate.

4. The detector of claim 2 further comprising a multi-layer isolation of walls achieved through multiple implantations at different energies or at different energies and different doses, leading to entire electrical isolation through confinement inside said deep well wherein said deep well comprises a deep buried P(N)-type well that implanted deeply minimizes parasitic said deep well to said shallow well (BNP/BNW) junction capacitance.

5. The detector of claim 1 wherein said shallow well comprises a shallow buried N(P)-type well.

6. The detector of claim 1 wherein said at least one first nested well comprises a first well that includes a deep buried P(N)-type well implanted in a handle portion of an SOI process wafer comprising said substrate to assist in said collection of charge carriers, and wherein said at least one second nested well further comprises a second well comprising a shallow well comprising a buried N(P)-type well nested by implantation within said first well to inhibit capacitive coupling between said electronic circuits and said sensing portion.

7. The detector of claim 1 further comprising a multi-layer isolation of walls achieved through multiple implantations at different energies or at different energies and different doses, wherein said multi-layer isolation is electrically connected to said deep well and wherein said deep well comprises a deep buried P(N)-type well that minimizes parasitic said deep well to said shallow well (BNP/BNW) junction capacitance.

8. A method of configuring a monolithic active pixel radiation detector, said method comprising:
providing a substrate comprising a silicon layer upon which electronic circuits are configured;
forming a plurality of channels on said silicon layer;
connecting said plurality of channels to sources of charge signals, wherein a source of said charge signals is biased entirely or partially in depletion in a high-resistivity bulk layer of said substrate, wherein said charge signals are collected by implanted electrodes and flow through electrically conducting vias established in an isolation oxide on said substrate; and
configuring at least one first nested well, implanted deeper, from said substrate, wherein said at least one first nested well comprises a signal collection electrode assisting in a collection of charge carriers released in interaction with radiation and wherein at least one second nested well, implanted shallower and entirely confined in said at least one first nested well, further separates said electronic circuits from a sensing portion of said substrate.

9. The method of claim 8 further comprising configuring said at least one first nested well to comprise a first well that assists in said collection of charge carriers, and wherein at least one second nested well comprises a second well nested by implantation within said first well to inhibit capacitive coupling between said electronic circuits and said sensing portion and said at least one second nested well encompasses said electronic circuits such that no part of said electronic circuits, except wiring, lays out of said at least one second nested well nor directly over said any part of said high-resistivity bulk layer of said substrate.

10. The method of claim 8 further comprising:
configuring said at least one first nested well to comprise a first well that includes a deep buried P(N)-type well implanted in a handle portion of an SOI process wafer comprising said substrate to assist in said collection of charge carriers;
configuring said at least one second nested well to comprise a second well comprising a shallow buried N(P)-type well nested by implantation within said first well to inhibit capacitive coupling between said electronic circuits and said sensing portion; and
configuring a multi-layer isolation of walls achieved through multiple implantations at different energies or at different energies and different doses, leading to entire an electrical isolation through confinement inside said deep well.

Assignees

• Deptuch Grzegorz W
• Fermi Res Alliance Llc

Inventors

• Deptuch Grzegorz W

Classifications

• H04N25/75

  Circuitry for providing, modifying or processing image signals from the pixel array · CPC title

• H10F71/00

  Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00) · CPC title

• H10F39/8057

  Optical shielding · CPC title

• H10F39/8037

  the integrated elements comprising a transistor · CPC title

• H10F39/811

  Interconnections · CPC title