Heat treatment apparatus emitting flash of light

Patent metadata

Field	Value
Publication number	US-9437456-B2
Application number	US-201414176262-A
Country	US
Kind code	B2
Filing date	Feb 10, 2014
Priority date	Feb 9, 2007
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

Flash lamps connected to short-pulse circuits and flash lamps connected to long-pulse circuits are alternately arranged in a line. The duration of light emission from the flash lamps connected to the long-pulse circuits is longer than the duration of light emission from the flash lamps connected to the short-pulse circuits. A superimposing of a flash of light with a high peak intensity from the flash lamps that emit light for a short time and a flash of light with a gentle peak from the flash lamps that emit light for a long time can increase the temperature of even a deep portion of a substrate to an activation temperature or more without heating a shallow portion near the substrate surface more than necessary. This achieves the activation of deep junctions without causing substrate warpage or cracking.

First claim

What is claimed is:

1. A heat treatment method irradiating a substrate with flashes of light from flash lamps to heat the substrate, comprising:
(a) a first irradiation step of irradiating said substrate with a flash of light of a first pulse, said first irradiation step being started at a first time;
(b) a second irradiation step of irradiating said substrate with a flash of light of a second pulse having a length different from said first pulse, said second irradiation step being started at a second time later than said first time; and
(c) Performing said second irradiation step such that at least a part of the irradiation of a flash of light of said second irradiation step is superimposed on the irradiation of a flash of light of said first irradiation step.

2. The heat treatment method according to claim 1 ,
wherein
said second pulse is longer than said first pulse.

Assignees

• Yokouchi Kenichi
• Screen Holdings Co Ltd

Inventors

• Yokouchi Kenichi

Classifications

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P14/2923

  being conductive materials, e.g. metallic silicides · CPC title