Xray diffraction angle verification in an ion implanter
US-2024222070-A1 · Jul 4, 2024 · US
US9437398B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9437398-B2 |
| Application number | US-201214438679-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 25, 2012 |
| Priority date | Oct 25, 2012 |
| Publication date | Sep 6, 2016 |
| Grant date | Sep 6, 2016 |
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An ion source includes a nebulizer and a target, with the nebulizer being arranged and adapted to emit, in use, a stream of analyte droplets which are caused to impact upon the target and to ionize analyte to form a plurality of analyte ions. The target comprises a pin or rod which is mounted off-set from a rotating shaft. The target is rotated or translated in use and follows an eccentric path such that the relative position between the nebulizer and target varies as the target is rotated or translated.
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The invention claimed is: 1. An ion source comprising: one or more nebulisers and one or more targets; wherein said one or more nebulisers are arranged and adapted to emit, in use, a stream predominantly of droplets which are caused to impact upon said one or more targets and to ionise said droplets to form a plurality of ions; and wherein said ion source further comprises a first device arranged and adapted to rotate or translate said one or more targets substantially continuously so as to enable a stable ion signal intensity. 2. An ion source as claimed in claim 1 , wherein said one or more targets comprise a pin or rod. 3. An ion source as claimed in claim 1 , wherein said one or more targets have a first central longitudinal axis and said first device is arranged and adapted to rotate said one or more targets about a second axis which is displaced or offset from said first axis. 4. An ion source as claimed in claim 1 , wherein said first device is arranged and adapted to cause said one or more targets to rotate, in use, about or on a substantially eccentric or non-circular path. 5. An ion source as claimed in claim 1 , wherein: said droplets comprise analyte droplets and said plurality of ions comprise analyte ions; or said droplets comprise reagent droplets and said plurality of ions comprise reagent ions. 6. An ion source as claimed in claim 1 , wherein said one or more nebulisers are arranged and adapted such that the majority of the mass or matter emitted by said one or more nebulisers is in the form of droplets not vapour. 7. An ion source as claimed in claim 1 , wherein said one or more targets are arranged <20 mm, <19 mm, <18 mm, <17 mm, <16 mm, <15 mm, <14 mm, <13 mm, <12 mm, <11 mm, <10 mm, <9 mm, <8 mm, <7 mm, <6 mm, <5 mm, <4 mm, <3 mm or <2 mm from the exit of said one or more nebulisers. 8. An ion source as claimed in claim 1 , wherein: in a mode of operation said one or more targets are maintained at a positive potential and wherein said droplets impacting upon said one or more targets form a plurality of positively charged ions; or in a mode of operation said one or more targets are maintained at a negative potential and wherein said droplets impacting upon said one or more targets form a plurality of negatively charged ions. 9. An ion source as claimed in claim 1 , wherein said one or more targets are arranged or otherwise positioned so as to deflect said stream of droplets or said plurality of ions towards an ion inlet device of a mass spectrometer. 10. An ion source as claimed in claim 1 , wherein said one or more targets are positioned upstream of an ion inlet device of a mass spectrometer so that ions are deflected towards the direction of said ion inlet device. 11. An ion source as claimed in claim 1 , wherein said one or more targets comprise a stainless steel target, a metal, gold, a non-metallic substance, a semiconductor, a metal or other substance with a carbide coating, an insulator or a ceramic. 12. An ion source as claimed in claim 1 , wherein said one or more targets comprise a plurality of target elements so that droplets from said one or more nebulisers cascade upon a plurality of target elements or wherein said target is arranged to have multiple impact points so that droplets are ionised by multiple glancing deflections. 13. An ion source as claimed in claim 1 , wherein said one or more targets are shaped or have an aerodynamic profile so that gas flowing past said one or more targets is directed or deflected towards, parallel to, orthogonal to or away from an ion inlet device of a mass spectrometer. 14. An ion source as claimed in claim 13 , wherein at least some or a majority of said plurality of ions are arranged so as to become entrained, in use, in said gas flowing past said one or more targets. 15. A method of ionising a sample comprising: causing a stream predominantly of droplets to impact upon one or more targets to ionise said droplets to form a plurality of analyte ions; and rotating or translating said one or more targets substantially continuously so as to enable a stable ion signal intensity. 16. A desolvation device comprising: one or more nebulisers and one or more targets; wherein one or more nebulisers are arranged and adapted to emit, in use, a stream predominantly of droplets which are caused to impact upon said one or more targets and to cause said droplets to form desolvated gas phase molecules or secondary droplets; and wherein said desolvation device further comprises a first device arranged and adapted to rotate or translate said one or more targets substantially continuously so as to enable a stable signal intensity. 17. A method of desolvation comprising: causing a stream predominantly of droplets to impact upon one or more targets and to cause said droplets to form desolvated gas phase molecules or secondary droplets; and rotating or translating said one or more targets substantially continuously so as to enable a stable signal intensity. 18. A desolvation device as claimed in claim 16 , wherein said one or more targets have a first central longitudinal axis and said first device is arranged and adapted to rotate said one or more targets about a second axis which is displaced or offset from said first central longitudinal axis. 19. A method of desolvation as claimed in claim 17 , wherein said one or more targets have a first central longitudinal axis and wherein rotating or translating said one or more targets comprises rotating said one or more targets about a second axis which is displaced or offset from said first central longitudinal axis. 20. A method of desolvation as claimed in claim 17 , wherein rotating or translating said one or more targets comprises rotating said one or more targets about or on a substantially eccentric or non-circular path.
with means for vaporising using mechanical energy, e.g. by ultrasonic vibrations · CPC title
for ion implantation · CPC title
with means for introducing as a spray, a jet or an aerosol (electrospray ion sources H01J49/165) · CPC title
using surface ionisation, e.g. field-, thermionic- or photo-emission · CPC title
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