Branched siloxanes and methods for synthesis

Patent metadata

Field	Value
Publication number	US-9434750-B2
Application number	US-201514681416-A
Country	US
Kind code	B2
Filing date	Apr 8, 2015
Priority date	Feb 19, 2010
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.

First claim

The invention claimed is:

1. A method for synthesizing branched siloxanes, comprising, reacting i) a siloxane which has a silicon-hydrogen bond represented by the formula (a),

wherein n represents a whole number between 1 and 20, with ii) an asymmetric linear siloxane of formula (b),

wherein X represents any halogen and m represents a whole number between 2 to 10, said reacting performed under conditions such that a branched siloxane and byproducts are produced.

2. The method of claim 1 , wherein said siloxane comprising a silicon-hydrogen bond represented by the formula (a) is 3H,5H-octamethyltetrasiloxane.

3. The method of claim 1 , wherein m is either 2 or 3.

4. The method of claim 2 , wherein said 3H,5H-octamethyltetrasiloxane, prior to reacting with said asymmetric linear siloxane, is exposed to a catalyst in the presence of water.

5. The method of claim 4 , wherein said catalyst is removed prior to reacting said 3H,5H-octamethyltetrasiloxane with said asymmetric linear siloxane.

6. The method of claim 4 , wherein said catalyst is a palladium catalyst.

7. The method of claim 1 , wherein the halogen of said asymmetric linear siloxane is chlorine.

8. The method of claim 1 , further comprising the step of purifying the branched siloxane by distillation, so as to remove said byproducts of the synthesis reaction and provide a purified branched siloxane.

9. The method of claim 8 , further comprising the step of fiinctionalizing said purified branched siloxane.

10. The method of claim 9 , wherein said functionalizing comprises attaching photocrosslinkable moieties, said moieties selected from the group consisting of acrylates, methacrylates, vinyls and epoxides.

11. The method of claim 9 , wherein said functionalizing comprises hydrosylilation.

Assignees

• Univ Texas

Inventors

• Willson C Grant
• Ogawa Tsuyoshi
• Jacobsson Michael B

Classifications

• H10P95/064

  the removal being chemical etching · CPC title

• C09D163/00

  Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins · CPC title

• C07F7/0889

  Reactions not involving the Si atom of the Si-O-Si sequence · CPC title

• C07F7/0874 Primary

  Reactions involving a bond of the Si-O-Si linkage · CPC title

• C07F7/0812

  comprising a heterocyclic ring · CPC title