Textured ar with protective thin film
US-2016332908-A1 · Nov 17, 2016 · US
US9434640B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9434640-B2 |
| Application number | US-201213693411-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 4, 2012 |
| Priority date | Dec 4, 2012 |
| Publication date | Sep 6, 2016 |
| Grant date | Sep 6, 2016 |
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A method of making a heat treated (HT) or heat treatable coated article. A method of making a coated article includes a step of heat treating a glass substrate coated with at least layer of or including carbon (e.g., diamond-like carbon (DLC)) and an overlying protective film thereon. In certain example embodiments, the protective film may be of or include both (a) an oxygen blocking or barrier layer, and (b) a release layer of or including zinc oxide. Treating the zinc oxide inclusive release layer with plasma including oxygen (e.g., via ion beam treatment) improves thermal stability and/or quality of the product. Following and/or during heat treatment (e.g., thermal tempering, or the like) the protective film may be entirely or partially removed.
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The invention claimed is: 1. A method of making a coated article, the method comprising: depositing a release layer comprising zinc oxide on a glass substrate, wherein at least a layer comprising carbon is located between the glass substrate and the release layer comprising zinc oxide; plasma treating the layer comprising zinc oxide including ZnO—Zn cermet with at least oxygen ions to provide an ion beam treated layer comprising zinc oxide and to transform at least part of the ZnO—Zn cermet to a more stable ZnOx; depositing an oxygen barrier layer on the glass substrate over the plasma treated layer comprising zinc oxide; and wherein a protective film comprising the plasma treated layer comprising zinc oxide and the oxygen barrier layer are for protecting the layer comprising carbon during subsequent heat treatment in order to prevent significant burnoff of the layer comprising carbon. 2. The method of claim 1 , wherein said ion beam treating comprises directing an ion beam including oxygen ions toward the release layer, wherein the ion beam is substantially free of carbon ions. 3. The method of claim 1 , wherein said ion beam treating comprises directing an ion beam consisting essentially of oxygen ions toward the release layer. 4. The method of claim 1 , wherein the release layer consists essentially of zinc oxide, which may optionally be doped with aluminum and/or nitrogen. 5. The method of claim 1 , wherein said ion beam treating of the release layer causes a concentration of OH-groups at an outer surface of the release layer to drop by at least 5%. 6. The method of claim 1 , wherein said ion beam treating of the release layer causes a concentration of OH-groups at an outer surface of the release layer to drop by at least 10%. 7. The method of claim 1 , wherein the oxygen barrier layer comprises aluminum nitride. 8. The method of claim 1 , wherein the oxygen barrier layer consists essentially of aluminum nitride. 9. The method of claim 1 , wherein the oxygen barrier layer directly contacts the release layer that has been ion beam treated. 10. The method of claim 1 , wherein the layer comprising carbon comprises diamond-like carbon (DLC). 11. The method of claim 1 , further comprising heat treating the glass substrate with at least following layers thereon: the layer comprising carbon, the ion beam treated release layer, and the oxygen barrier layer; and wherein said heat treating comprises heating the glass substrate to temperature(s) sufficient for thermal tempering, heat strengthening, and/or heat bending of the glass substrate. 12. The method of claim 11 , wherein the heat treating comprises heating the glass substrate at temperature(s) of at least 550 degrees C. 13. The method of claim 11 , further comprising exposing the protective film to a release liquid and removing at least part of the protective film during and/or after the heat treating. 14. The method of claim 1 , further comprising adhering first and second overlapping polymer based layers to an upper surface of the oxygen barrier layer. 15. The method of claim 1 , further comprising sputter-depositing a layer comprising silicon nitride on the glass substrate, wherein the layer comprising silicon nitride is located between the glass substrate and the layer comprising carbon. 16. The method of claim 1 , wherein at least prior to heat treatment the release layer that has been ion beam treated is located between and directly contacting the layer comprising carbon and the oxygen barrier layer. 17. The method of claim 1 , wherein the layer comprising carbon comprises amorphous DLC and has more sp a carbon-carbon bonds than sp 2 carbon-carbon bonds. 18. The method of claim 1 , wherein the layer comprising carbon comprises hydrogenated DLC. 19. The method of claim 1 , wherein the coated article is substantially transparent at least following heat treating and removal of the protective film. 20. The method of claim 1 , wherein after removing the oxygen barrier layer and the release layer, the layer comprising carbon is exposed so as to be an outermost layer of the coated article. 21. The method of claim 1 , wherein the oxygen barrier layer is an outermost layer of the coating after the coated article has been made and is exposed to ambient atmosphere.
by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling (C03B27/008, C03B27/016 take precedence) · CPC title
comprising carbon, a carbide or oxycarbide · CPC title
Oxidation · CPC title
with other inorganic material (C03C17/34, C03C17/44 take precedence) · CPC title
Partly or completely removing a coating · CPC title
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