Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object

Patent metadata

Field	Value
Publication number	US-9431995-B2
Application number	US-201514813528-A
Country	US
Kind code	B2
Filing date	Jul 30, 2015
Priority date	Jul 31, 2014
Publication date	Aug 30, 2016
Grant date	Aug 30, 2016

Abstract

A resonator element includes a quartz crystal substrate having a main surface along a plane including an X-axis and a Z′-axis, and a thickness in a Y′-axis direction. The quartz crystal substrate includes a vibrating portion including a side along the X-axis, a side along the Z′-axis, and a peripheral portion having a thickness smaller than that of the vibrating portion, which is provided along an outer edge of the vibrating portion. The vibrating portion includes a first portion and a second portion having a thickness smaller than that of the first portion, which is provided on at least an outer edge on a +X side of the X-axis and an outer edge on a −X side thereof, among outer edges of the first portion. When Z is a length of the quartz crystal substrate along the Z′-axis, and t is a thickness of the first portion, 11<Z/t≦53.

First claim

What is claimed is:

1. A resonator element comprising:
a quartz crystal substrate having:
an X-axis as an axis of rotation, the X-axis being of an orthogonal coordinate system constituted by the X-axis as an electrical axis, a Y-axis as a mechanical axis, and a Z-axis as an optical axis which are crystal axes of a quartz crystal,
a Z′ axis obtained by inclining the Z-axis so that a +Z side rotates in a −Y direction of the Y-axis,
a Y′ axis obtained by inclining the Y-axis so that a +Y side rotates in a +Z direction of the Z-axis,
a main surface along a plane including the X-axis and the Z′-axis, and
a thickness in a direction along the Y′-axis,

wherein the quartz crystal substrate includes:
a vibrating portion including a side along the X-axis and a side along the Z′-axis, and
a peripheral portion provided along an outer edge of the vibrating portion, the peripheral portion having a thickness that is smaller than that of the vibrating portion,

wherein the vibrating portion includes:
a first portion,
a second portion provided on at least an outer edge on a +X side of the X-axis and an outer edge on a −X side of the X-axis, among outer edges of the first portion, the second portion having a thickness that is smaller than that of the first portion, and
a convex portion protruding in a +Y′ direction of the Y′-axis further than the peripheral portion,

wherein Z is a length of the quartz crystal substrate along the Z′-axis, t is a thickness of the first portion, and 11<Z/t≦53,
wherein the convex portion includes one lateral side including a surface which intersects the Z′-axis and is inclined with respect to a plane including the X-axis and the Z′-axis, the other lateral side including a surface which intersects the Z′-axis and is perpendicular to the plane including the X-axis and the Z′-axis, and a planar portion which is interposed between the one lateral side and the other lateral side, and
wherein when seen in a plan view, Sz is a length of the one lateral side along the Z′-axis, Mz is a length of the planar portion along the Z′-axis, and 0≦Sz/Mz≦0.05.

2. The resonator element according to claim 1 , wherein 13≦Z/t≦34.

3. The resonator element according to claim 2 ,
wherein 0.45 mm<Mz≦0.8 mm.

4. The resonator element according to claim 1 ,
wherein 0.45 mm<Mz≦0.8 mm.

5. The resonator element according to claim 4 , wherein 0.49 mm<Mz<0.8 mm.

6. The resonator element according to claim 1 , wherein a first main surface and a second main surface of the quartz crystal substrate which have a front-back relationship with each other include excitation electrodes which are provided so as to overlap each other when seen in a plan view, and
wherein when seen in the plan view, the vibrating portion is provided inside outer edges of the excitation electrodes.

7. A resonator comprising:
a resonator element according to claim 1 ; and
a package in which the resonator element is stored.

8. A resonator device comprising:
a resonator element according to claim 1 ; and
an electronic element.

9. A resonator device according to claim 8 , wherein the electronic element is a thermo-sensitive element.

10. An oscillator comprising the resonator element according to claim 1 ; and
an oscillation circuit which is electrically connected to the resonator element.

11. An electronic device comprising the resonator element according to claim 1 .

12. A mobile object comprising the resonator element according to claim 1 .

13. A resonator element comprising:
a quartz crystal substrate having:
an X-axis as an axis of rotation, the X-axis being of an orthogonal coordinate system constituted by the X-axis as an electrical axis, a Y-axis as a mechanical axis, and a Z-axis as an optical axis which are crystal axes of a quartz crystal,
a Z′ axis obtained by inclining the Z-axis so that a +Z side rotates in a −Y direction of the Y-axis,
a Y′ axis obtained by inclining the Y-axis so that a +Y side rotates in a +Z direction of the Z-axis,
a main surface along a plane including the X-axis and the Z′-axis, and
a thickness in a direction along the Y′-axis,

wherein the quartz crystal substrate includes:
a vibrating portion including a side along the X-axis and a side along the Z′-axis, and
a peripheral portion provided along an outer edge of the vibrating portion, the peripheral portion having a thickness that is smaller than that of the vibrating portion,

wherein the vibrating portion includes:
a first portion,
a second portion provided on at least an outer edge on a +X side of the X-axis and an outer edge on a −X side of the X-axis, among outer edges of the first portion, the second portion having a thickness that is smaller than that of the first portion, and
a convex portion protruding in a +Y′ direction of the Y′-axis further than the peripheral portion,

wherein Z is a length of the quartz crystal substrate along the Z′-axis, t is a thickness of the first portion, and 11<Z/t≦53,
wherein the convex portion includes one lateral side including a surface which intersects the Z′-axis and is inclined with respect to a plane including the X-axis and the Z′-axis, the other lateral side including a surface which intersects the Z′-axis and is perpendicular to the plane including the X-axis and the Z′-axis, and a planar portion which is interposed between the one lateral side and the other lateral side, and
wherein Mz is a length of the flat portion along the Z′-axis, and 40 μm≦(Z−Mz)/2≦400 μm.

14. The resonator element according to claim 13 , wherein 13≦Z/t≦34.

15. The resonator element according to claim 13 , wherein 0.45 mm<Mz≦0.8 mm.

16. The resonator element according to claim 15 , wherein 0.49 mm<Mz<0.8 mm.

Assignees

• Seiko Epson Corp

Inventors

• Yamashita Go

Classifications

• H03H9/19 Primary

  consisting of quartz · CPC title

• H03H9/1014

  the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device · CPC title

• H03H9/08

  Holders with means for regulating temperature · CPC title

• H03H9/0552

  the device and the other elements being mounted on opposite sides of a common substrate · CPC title

• H03H9/02157

  Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness · CPC title