Compensating a sensor having thermal gradients

Patent metadata

Field	Value
Publication number	US-9429491-B2
Application number	US-201414162108-A
Country	US
Kind code	B2
Filing date	Jan 23, 2014
Priority date	Jan 23, 2014
Publication date	Aug 30, 2016
Grant date	Aug 30, 2016

Abstract

Example embodiments of the disclosed technology methods, devices, and systems for compensating a sensor having thermal gradients. In one embodiment, a system is provided that includes a sensor, including a first half-bridge transducer configured to output a first pressure signal associated with a first received pressure; a first set of span resistors coupled to the first half-bridge transducer, and configured generate a first compensated pressure signal; a second half-bridge transducer, configured to output a second pressure signal associated with a second received pressure; and a second set of span resistors coupled to the second half-bridge transducer and configured to generate a second compensated pressure signal. The system includes an output port that is configured to output a signal associated with a difference between the first compensated pressure signal and the second compensated pressure signal.

First claim

What is claimed is:

1. A system, comprising:
a sensor, including:
a first half-bridge transducer comprising a first voltage divider network having a first upper portion and a first lower portion, wherein the first half-bridge transducer is configured to:
receive a first pressure;
measure the first pressure; and
output a first pressure signal associated with the first pressure;

a first set of span resistors coupled to the first half-bridge transducer to provide a compensated first half-bridge transducer, wherein the first set of span resistors is configured to:
compensate the first pressure signal for a thermal sensitivity shift associated with the first half-bridge transducer to generate a first compensated pressure signal;

a second half-bridge transducer comprising a second voltage divider network having a second upper portion and a second lower portion, wherein the second half-bridge transducer is configured to:
receive a second pressure;
measure the second pressure; and
output a second pressure signal associated with the second pressure;

a second set of span resistors coupled to the second half-bridge transducer to provide a compensated second half-bridge transducer, wherein the second set of span resistors is configured to:
compensate the second pressure signal for a thermal sensitivity shift associated with the second half-bridge transducer to generate a second compensated pressure signal;

a first shunt resistor coupled to the first upper portion of the first voltage divider network of the first half-bridge transducer;
a second shunt resistor coupled in parallel to the second lower portion of the second voltage divider network of the second half-bridge transducer; and
an output port disposed between the compensated first half-bridge transducer and the compensated second half-bridge transducer wherein an output signal associated with the output port comprises a difference between the first compensated pressure signal and the second compensated pressure signal.

2. The system of claim 1 , wherein the first shunt resistor is configured to:
compensate the first pressure signal for a thermal zero shift associated with the first half-bridge transducer.

3. The system of claim 1 , wherein the first half-bridge transducer includes a first piezoresistive element and a second piezoresistive element and the first shunt resistor is coupled in parallel with at least one of the first piezoresistive element and the second piezoresistive element.

4. The system of claim 1 , wherein the second shunt resistor is configured to:
compensate the second pressure signal for a thermal zero shift associated with the second half-bridge transducer.

5. The system of claim 1 , wherein the second half-bridge transducer includes a third piezoresistive element and a fourth piezoresistive element and the second shunt resistor is coupled in parallel with at least one of the third piezoresistive element or the fourth piezoresistive element.

6. The system of claim 1 , wherein the sensor further includes:
a third shunt resistor coupled between the first half-bridge transducer and the second half-bridge transducer, wherein the third shunt resistor is configured to:
compensate the output signal.

7. The system of claim 6 , wherein the third shunt resistor is further configured to: compensate a dynamic range of the output signal.

8. The system of claim 1 , wherein the first half-bridge transducer operates at a first temperature, the second half-bridge transducer operates at a second temperature and the first temperature is different from the second temperature.

9. A method, comprising:
in a sensor comprising:
a first half bridge transducer characterized by a first voltage divider network having a first upper portion and a first lower portion, with a first shunt resistor coupled to the first upper portion, the first half bridge transducer further coupled to a first set of span resistors; and
a second half bridge transducer characterized by a second voltage divider network having a second upper portion and a second lower portion, with a second shunt resistor coupled to the second lower portion, the second half-bridge transducer further coupled to a second set of span resistors, receiving, at the first half-bridge transducer, a first pressure;

measuring, by the first half-bridge transducer, the first pressure;
outputting, by the first half-bridge transducer, a first pressure signal associated with the first pressure;
compensating, by the first set of span resistors, the first pressure signal for a thermal sensitivity shift associated with the first half-bridge transducer to generate a first compensated pressure signal;

receiving, at the second half-bridge transducer, a second pressure;
measuring, by the second half-bridge transducer, the second pressure;
outputting, by the second half-bridge transducer, a second pressure signal associated with the second pressure;
compensating, by the second set of span resistors, the second pressure signal for a thermal sensitivity shift associated with the second half-bridge transducer to generate a second compensated pressure signal; and
outputting, by the sensor, an output signal associated with a difference between the first compensated pressure signal and the second compensated pressure signal.

10. The method of claim 9 , further comprising:
compensating, by the first shunt resistor of the sensor, the first compensated pressure signal for a thermal zero shift and an absolute value of zero associated with the first half-bridge transducer.

11. The method of claim 9 , wherein the first half-bridge transducer includes a first piezoresistive element and a second piezoresistive element and the first shunt resistor is coupled in parallel with at least one of the first piezoresistive element or the second piezoresistive element.

12. The method of claim 11 , wherein the second half-bridge transducer includes a third piezoresistive element and a fourth piezoresistive element and the second shunt resistor is coupled in parallel with at least one of the third piezoresistive element and the fourth piezoresistive element.

13. The method of claim 9 , further comprising:
compensating, by the second shunt resistor of the sensor, the second compensated pressure signal for a thermal zero shift and an absolute value of the zero associated with the second half-bridge transducer.

14. The method of claim 9 , further comprising:
compensating, by a third shunt resistor of the sensor coupled between the first half-bridge transducer and the second half-bridge transducer, the output signal.

15. The method of claim 14 , further comprising:
compensating, by the third shunt resistor, a dynamic range of the output signal.

16. The method of claim 9 , further comprising:
compensating, a thermal zero shift of the output signal of the sensor.

Assignees

• Kulite Semiconductor Products Inc

Inventors

• Bemis Andrew
• Nunn Timothy
• Vandeweert Joseph

Classifications

• G01L9/065 Primary

  with temperature compensating means (non electric temperature compensating means G01L19/04) · CPC title