Deposition apparatus
US-2024052477-A1 · Feb 15, 2024 · US
US9428826B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9428826-B2 |
| Application number | US-201113635710-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 18, 2011 |
| Priority date | Mar 18, 2010 |
| Publication date | Aug 30, 2016 |
| Grant date | Aug 30, 2016 |
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The invention relates to a coating that comprises at least one compound of oxygen and/or nitrogen with at least two metal materials, said compound being present at least partly in spinel structure. The invention also relates to a method for coating and to a coated substrate.
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What is claimed is: 1. A coating including at least one layer which contains two components, wherein a first component comprises oxygen and/or nitrogen with at least two metallic elements and includes NiAl 2 O 4 present at least partly in a spinel structure, and a second component comprises an x-ray amorphous phase, wherein the at least one layer exhibits droplets characteristic of a layer formed by spark evaporation. 2. The coating according to claim 1 , characterized in that an intrinsic compressive stress of the components comprising the coating is between 0.2 GPa and 5 GPa. 3. The coating according to claim 1 , characterized in that an x-ray diffraction spectrum exhibits at least two reflexes selected from the group consisting of 311, 400, and 511 reflexes. 4. The coating according to claim 1 , characterized in that the second component present in x-ray amorphous phase includes at least one of aluminum oxide and nickel oxide. 5. The coating according to claim 4 , wherein the aluminum oxide is present in at least one of corundum structure, theta phase, gamma phase, and kappa phase. 6. The coating according to claim 5 , wherein the aluminum oxide comprises crystallites with sizes around 5 nm or smaller. 7. The coating according to claim 1 , characterized in that the coating is formed from a plurality of superimposed layers, wherein the superimposed layers have identical metallic chemical elements but different metallic ratios. 8. The coating according to claim 7 , characterized in that the superimposed layers have identical chemical elements. 9. A method for coating substrates by means of arc evaporation, characterized in that an alloy target containing aluminum as one component is used for production of a coating according to claim 8 . 10. The method for coating substrates by means of arc evaporation according to claim 9 , characterized in that an Al/Ni ratio can be varied by means of oxygen flow during the formation of the coating. 11. The method for coating substrates by means of arc evaporation according to claim 10 , wherein the oxygen flow is between 300 sccm and 800 sccm. 12. The coating according to claim 1 , characterized in that a cubic support layer is included. 13. The coating according to claim 12 , wherein the cubic support layer is selected from group consisting of Al—Ti—N, Ti—C—N, Ti—N, Cr—N, and their mixtures. 14. A coated substrate, wherein in the coating is formed according to claim 13 , and the coated substrate is a cutting insert. 15. The coating according to claim 1 , wherein the droplets comprise a metallic material. 16. The coating according to claim 15 , wherein a portion of the metallic material comprises less than 50 at. % nickel. 17. The coating according to claim 1 , wherein the droplets comprise conglomerates of incompletely oxidized or incompletely nitrified metallic components or intermetallic components. 18. A coated substrate, wherein the coating is formed according to claim 1 , and a surface of the substrate onto which the coating comes to be applied is a steel. 19. The coated substrate according to claim 18 , characterized in that the steel contains Cr. 20. The coated substrate according to claim 18 , characterized in that the steel is a high speed steel.
of iron group metals · CPC title
Electric arc evaporation · CPC title
operating with cathodic sputtering (H01J37/36 takes precedence {; methods of cathodic sputtering C23C14/34}) · CPC title
of aluminium, magnesium or beryllium · CPC title
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