Piezoelectric membrane, piezoelectric device, and inkjet head

Patent metadata

Field	Value
Publication number	US-9427967-B2
Application number	US-201514810078-A
Country	US
Kind code	B2
Filing date	Jul 27, 2015
Priority date	Jul 28, 2014
Publication date	Aug 30, 2016
Grant date	Aug 30, 2016

Abstract

An inkjet head includes a substrate that defines a cavity in which ink is stored, a vibrating membrane that is supported by the substrate and that defines the cavity, and a piezoelectric device that is disposed on the vibrating membrane and that changes a volume of the cavity by displacing the vibrating membrane. The piezoelectric device includes a lower electrode, a piezoelectric membrane that is disposed on the lower electrode, and an upper electrode that is disposed on the piezoelectric membrane and that faces the lower electrode with the piezoelectric membrane interposed between the upper electrode and the lower electrode. The piezoelectric membrane includes a columnar structure layer and an amorphous structure layer of a piezoelectric material. The amorphous structure layer is stacked contiguously with the columnar structure layer.

First claim

What is claimed is:

1. A piezoelectric membrane comprising:
a columnar structure layer which is a layer deposited according to a sputtering method; and
an amorphous structure layer of a piezoelectric material which is a layer formed by depositing a piezoelectric material according to a sol-gel method, the amorphous structure layer being stacked contiguously with the columnar structure layer.

2. The piezoelectric membrane according to claim 1 , wherein the columnar structure layer has a <100>orientation or a <111>orientation.

3. The piezoelectric membrane according to claim 1 , wherein the columnar structure layer is a layer formed by depositing a piezoelectric material in a polarized state.

4. The piezoelectric membrane according to claim 1 , wherein the columnar structure layer and the amorphous structure layer are layers each of which is made of a same kind of piezoelectric material.

5. A piezoelectric device comprising:
a lower electrode;
a piezoelectric membrane that is disposed on the lower electrode and that includes a columnar structure layer and an amorphous structure layer of a piezoelectric material, the columnar structure layer being a layer deposited on the lower electrode according to a sputtering method, the amorphous structure layer being a layer formed by depositing a piezoelectric material according to a sol-gel method as stacked contiguously with the columnar structure layer; and
an upper electrode that is disposed on the piezoelectric membrane and that faces the lower electrode with the piezoelectric membrane interposed between the upper electrode and the lower electrode.

6. An inkjet head comprising:
a substrate that defines a cavity in which ink is stored;
a vibrating membrane that is supported by the substrate and that defines the cavity; and
a piezoelectric device that is disposed on the vibrating membrane and that changes a volume of the cavity by displacing the vibrating membrane;
the piezoelectric device comprising:
a lower electrode;
a piezoelectric membrane that is disposed on the lower electrode and that includes a columnar structure layer and an amorphous structure layer of a piezoelectric material, the columnar structure layer being a layer deposited on the lower electrode according to a sputtering method, the amorphous structure layer being a layer formed by depositing a piezoelectric material according to a sol-gel method as stacked contiguously with the columnar structure layer; and
an upper electrode that is disposed on the piezoelectric membrane and that faces the lower electrode with the piezoelectric membrane interposed between the upper electrode and the lower electrodes.

7. The piezoelectric device according to claim 5 , wherein the upper electrode is in contact with the amorphous structure layer of the piezoelectric membrane.

8. The inkjet head according to claim 6 , wherein the upper electrode is in contact with the amorphous structure layer of the piezoelectric membrane.

Assignees

• Rohm Co Ltd

Inventors

• Nagahata Takaya

Classifications

• H01L41/33

  Electricity · mapped topic

• H01L41/0472

  Electricity · mapped topic

• H01L41/318

  Electricity · mapped topic

• H01L41/0475

  Electricity · mapped topic

• B41J2/1646

  thin film formation by sputtering · CPC title