Integral preload mechanism for piezoelectric actuator

Patent metadata

Field	Value
Publication number	US-9425711-B2
Application number	US-201414253087-A
Country	US
Kind code	B2
Filing date	Apr 15, 2014
Priority date	Apr 15, 2014
Publication date	Aug 23, 2016
Grant date	Aug 23, 2016

Abstract

A piezoelectric actuator that may include a monolithic frame having an integral bias band that provides a resilient restoring force between a first contact surface and a second contact surface of the actuator that may be used to rotate an adjustment shaft. In some cases, a preload mechanism may also be included with the frame. Such piezoelectric actuators may be used for adjustable optical mounting devices such as optical mounting devices.

First claim

What is claimed is:

1. A piezoelectric actuator, comprising:
A. an actuator frame, comprising:
(i) a monolithic configuration with all elements of the actuator frame being formed from a single piece of continuous uninterrupted material,
(ii) a first support element including a first contact surface,
(iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and substantially opposed relation relative to the first contact surface,
(iv) a bias band which is disposed between the first support element and the second support element and which is configured to provide a resilient restoring force that resists perpendicular displacement of the first contact surface away from the second contact surface, and
(v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame; and

B. a piezoelectric element which is disposed within the piezoelectric element cavity, which has a first end secured to the first mount surface, which has a second end secured to the second mount surface, which is configured to expand and contract in response to an electrical driver signal transmitted to the piezoelectric element and which is configured such that an expansion or contraction of the piezoelectric element results in respective substantially parallel reciprocating displacement between the first contact surface and the second contact surface.

2. The piezoelectric actuator of claim 1 wherein the actuator frame further comprises a hinge section of reduced material cross section disposed and coupled between the first support element and second support element, the hinge section being configured to allow relative reciprocating parallel displacement between the first contact surface and the second contact surface by elastic deformation of the actuator frame material in the hinge section.

3. The piezoelectric actuator of claim 1 further comprising a bias adjust mechanism which is configured to adjust the restoring force provided by the bias band of the actuator frame.

4. The piezoelectric actuator of claim 3 wherein the bias adjust mechanism comprises an adjustable set screw disposed in contact with the bias band.

5. The piezoelectric actuator of claim 1 wherein the first mount surface is disposed on a first mount post that extends transversely inward from the first support element and the second mount surface is disposed on a second mount post that extends transversely inward from the second support element.

6. The piezoelectric actuator of claim 1 wherein the frame comprises a resilient metal.

7. The piezoelectric actuator of claim 1 wherein the resilient metal comprises stainless steel.

8. The piezoelectric actuator of claim 1 wherein a nominal transverse distance between the first contact surface and the second contact surface is about 2 mm to about 20 mm.

9. The piezoelectric actuator of claim 1 wherein a nominal transverse distance between the first contact surface and the second contact surface is about 5 mm to about 10 mm.

10. The piezoelectric actuator of claim 1 wherein the bias band extends distally from a distal portion of the first support element, extends around both a space disposed between the first contact surface and the second contact surface and around a distal end of the second support element, and includes a transverse extension which is engaged with a mating transverse groove disposed on an outer surface of the second support element, the transverse groove being disposed on an outer surface of a distal portion of the second support element substantially opposite the second contact surface.

11. The piezoelectric actuator of claim 1 wherein the bias band extends distally from a distal portion of the first support element around a space disposed between the first contact surface and the second contact surface to a distal portion of the second support element and wherein the bias band comprises a zig-zag portion disposed distally of the distal portion of the second support element, the zig-zag portion including at least one band hinge section disposed at an apex of the zig-zag portion.

12. The piezoelectric actuator of claim 11 wherein the zig-zag portion comprises at least two band hinge sections disposed at respective apices of the zig-zag portion.

13. The piezoelectric actuator of claim 11 wherein the second mount surface is disposed on an adjustable piezoelectric mount support which is threadably engaged within a threaded channel of the actuator frame.

14. The piezoelectric actuator of claim 11 wherein the bias band comprises a slotted bias band having a slot that extends along a direction from a front surface to a back surface of the actuator frame so as to substantially bifurcate the bias band along this direction.

15. The piezoelectric actuator of claim 1 wherein the bias band comprises a first bias band portion that extends distally from a distal portion of the first support element towards the second support element, a second bias band portion that extends distally from a distal portion of the second support member towards the first support element so as to longitudinally overlap the first bias band portion and a longitudinally oriented rib that extends from the first bias band portion to the second bias band portion in an overlapped section where the first bias band portion overlaps the second bias band portion.

16. The piezoelectric actuator of claim 15 wherein the bias band incorporates a plurality of transverse band hinge sections which are disposed between the first bias band portion and the second bias band portion, with the transverse hinge sections being configured to reduce the bending moment of the bias band.

17. The piezoelectric actuator of claim 15 wherein the second mount surface is disposed on an adjustable piezoelectric mount support which is threadably engaged within a threaded channel of the actuator frame.

18. A piezoelectric actuator, comprising:
A. an actuator frame, comprising:
(i) a monolithic configuration with all elements of the actuator frame being formed from a single piece of continuous uninterrupted material,
(ii) a first support element including a first contact surface,
(iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and substantially opposed relation relative to the first contact surface,
(iv) a bias band which is configured to provide a resilient restoring force that resists perpendicular displacement of the first contact surface away from the second contact surface, the bias band extending distally from a distal portion of the first support element, extending around a space disposed between the first contact surface and the second contact surface, extending around a distal portion of the second support element along an outer surface of the second support element which is disposed substantially opposite the second contact surface, and terminating at the second support element at a band hinge section on a back side of the second support element, and
(v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame; and

B. a piezoelectric element which is disposed within the piezoelectric element cavity, which has a first end secured to the first mount surface, which has a second end secured to the second mount surface, which is configured to expand and contract in response to an electrical driver signal transmitted to the pi

Assignees

• Newport Corp

Inventors

• Li Hongqi

Classifications

• Y10T29/42

  Piezoelectric device making · CPC title

• H02N2/10

  producing rotary motion, e.g. rotary motors · CPC title

• G02B7/005

  Motorised alignment · CPC title

• H02N2/101

  using intermittent driving, e.g. step motors · CPC title

• B23K26/38

  by boring or cutting · CPC title