Apparatus and method for coating organic film

Patent metadata

Field	Value
Publication number	US-9425400-B2
Application number	US-201314241723-A
Country	US
Kind code	B2
Filing date	Dec 16, 2013
Priority date	Jun 9, 2013
Publication date	Aug 23, 2016
Grant date	Aug 23, 2016

Abstract

An apparatus and method for coating an organic film are disclosed. The apparatus comprises an evaporation device, an electron emission device and a spray device; wherein the evaporation device comprises an evaporation container, the evaporation container is a linear evaporation container, in which a uniform organic gas is generated; the electron emission device is horizontally arranged over the evaporation container such that the organic gas evaporated in the evaporation container is uniformly charged and becomes charged organic gas; the spray device is provided with an electric field, under which the charged organic gas is moved toward a substrate so as to deposit the organic film on the substrate.

First claim

What is claimed is:

1. A method for coating an organic film, wherein the method comprises:
heating and evaporating an organic material to generate uniform organic gas;
uniformly charging the uniform organic gas for obtaining charged organic gas;
accelerating and moving the charged organic gas toward the substrate under an effect of an electric filed to form the organic film on the substrate,
wherein accelerating and moving the charged organic gas toward the substrate under an effect of an electric filed to form the organic film on the substrate comprises:
generating the electric field by a potential difference between an electrode plate arranged in top of a spray chamber and base of the spray chamber, when a bias voltage being applied by an external power supply;
after the charged organic gas reaches the spray chamber, downwardly accelerating and moving the charged organic gas under an effect of a downward electric field force;
after the charged organic gas reaches the spray head arranged at bottom of the spray chamber, spraying the charged organic gas out of the spray head; and
depositing the sprayed organic gas which is passed through a mask to form the organic film on the substrate.

2. The method according to claim 1 , wherein heating and evaporating an organic material to generate uniform organic gas comprises:
uniformly heating the organic material to generate the organic gas;
linearly evaporating the organic gas and emitting the uniform organic gas.

3. The method according to claim 1 , wherein uniformly charging the uniform organic gas for obtaining charged organic gas comprises:
uniformly emitting electrons and attaching the electrons to the uniform organic gas, such that the uniform organic gas is uniformly charged and the charged organic gas is obtained.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Shen Wulin
• Jiang Chunsheng
• Dai Qing
• Chen Haijing
• Yuan Guangcai
• Fang Jingang

Classifications

• B05B5/0533

  Electrodes specially adapted therefor; Arrangements of electrodes · CPC title

• C23C14/30

  by electron bombardment · CPC title

• B05B5/03

  characterised by the use of gas {, e.g. electrostatically assisted pneumatic spraying (B05B5/04, B05B5/043, B05B5/047 take precedence)} · CPC title

• C23C14/32

  by explosion; by evaporation and subsequent ionisation of the vapours {, e.g. ion-plating}(C23C14/34 - C23C14/48 take precedence) · CPC title

• C23C14/243

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title