Semiconductor device

Patent metadata

Field	Value
Publication number	US-9425147-B2
Application number	US-201113634212-A
Country	US
Kind code	B2
Filing date	Apr 1, 2011
Priority date	Apr 1, 2010
Publication date	Aug 23, 2016
Grant date	Aug 23, 2016

Abstract

A semiconductor device includes an interlayer insulating film; a wiring formed on the interlayer insulating film so as to protrude there from and made of a material having copper as a main component, the wiring having a thickness direction and having a cross sectional shape of an inverted trapezoid that becomes wider in width with distance away from the interlayer insulating film; and a passivation film formed so as to cover the wiring. The passivation film is made of a laminated film in which a first nitride film, an intermediate film, and a second nitride film are laminated in that order from the wiring side. The intermediate film is made of an insulating material differing from those of the first and second nitride films, and has a tapered portion having a cross sectional shape of a trapezoid that becomes narrower in width with distance away from the interlayer insulating film.

First claim

What is claimed is:

1. A semiconductor device, comprising:
an interlayer insulating film;
a wiring formed on the interlayer insulating film so as to protrude there from and made of a material having copper as a main component, the wiring having a thickness direction and having a cross sectional shape of an inverted trapezoid that becomes wider in width with distance away from the interlayer insulating film along the thickness direction of the wiring; and
a passivation film formed so as to cover the wiring,
wherein the passivation film is made of a laminated film in which a first nitride film, an intermediate film, and a second nitride film are laminated in that order from the wiring side, the intermediate film is made of an insulating material differing from those of the first and second nitride films, and the intermediate film has a tapered portion having a cross sectional shape of a trapezoid that becomes narrower in width with distance away from the interlayer insulating film along the thickness direction of the wiring.

2. The semiconductor device according to claim 1 , wherein the intermediate film is a buffer film made of a material of lower stress than that of the first nitride film.

3. The semiconductor device according to claim 1 , further comprising a barrier film formed on the interlayer insulating film and preventing the copper in the wiring from diffusing to the interlayer insulating film,
wherein the wiring is formed on the barrier film and has an overhang portion extending outward from an edge portion of the barrier film.

4. The semiconductor device according claim 1 , wherein the first nitride film has a film thickness that is less than that of the second nitride film.

5. The semiconductor device according to claim 2 , further comprising a barrier film formed on the interlayer insulating film and preventing the copper in the wiring from diffusing to the interlayer insulating film,
wherein the wiring is formed on the barrier film and has an overhang portion extending outward from an edge portion of the barrier film.

6. The semiconductor device according claim 2 , wherein the first nitride film has a film thickness that is less than that of the second nitride film.

7. The semiconductor device according claim 3 , wherein the first nitride film has a film thickness that is less than that of the second nitride film.

8. The semiconductor device according claim 5 , wherein the first nitride film has a film thickness that is less than that of the second nitride film.

Assignees

• Nakao Yuichi
• Ohta Tadao
• Rohm Co Ltd

Inventors

• Nakao Yuichi
• Ohta Tadao

Classifications

• H10W72/5522

  comprising gold [Au] · CPC title

• H10W72/01955

  by using masks · CPC title

• H10W72/952

  comprising metals or metalloids, e.g. PbSn, Ag or Cu · CPC title

• H10W72/934

  Cross-sectional shape, i.e. in side view · CPC title

• H10W72/923

  Bond pads having multiple stacked layers · CPC title