Barrier layer on a piezoelectric-device pad
US-2024314500-A1 · Sep 19, 2024 · US
US9425118B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9425118-B2 |
| Application number | US-201214370858-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 29, 2012 |
| Priority date | Jan 11, 2012 |
| Publication date | Aug 23, 2016 |
| Grant date | Aug 23, 2016 |
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The invention relates to an electronic component ( 1 ) having a corrosion-protected bonding connection and a method for producing said component. For this purpose the electronic component ( 1 ) has at least one semiconductor chip ( 3 ) on a substrate ( 4 ). Moreover, a bonding connection at risk of corrosion is provided on the semiconductor chip ( 3 ). For encapsulation of the at least one semiconductor chip ( 3 ) and the at least one bonding connection at risk of corrosion, said semiconductor chip and bonding connection are surrounded by a hermetically sealing housing ( 5 ). The hermetically sealed bonding connection is a bonding wire connection ( 2 ) which is fully enclosed in the housing ( 5 ), in which the substrate ( 4 ) is at least partially enclosed. The substrate ( 4 ) has at least one surface-mounted hydrolysis-sensitive component ( 6 ) in the housing ( 5 ).
Opening claim text (preview).
The invention claimed is: 1. An electronic component having a corrosion-protected bonding connection, comprising: at least one semiconductor chip ( 3 ) on a substrate ( 4 ); at least one bonding connection at risk of corrosion on the semiconductor chip ( 3 ); and a package ( 5 ) hermetically enclosing the at least one semiconductor chip ( 3 ) and the at least one bonding connection at risk of corrosion, the bonding connection being a bonding wire connection ( 2 ), and the bonding wire connection ( 2 ) being completely hermetically enclosed in the package ( 5 ) and the substrate ( 4 ) being at least partially hermetically enclosed in the package ( 5 ), and at least one surface-mountable hydrolysis-sensitive component ( 6 ) being arranged on the substrate ( 4 ); wherein the hydrolysis-sensitive component ( 6 ) comprises a hydrolysis-sensitive core material ( 11 ), the core material ( 11 ) being able to getter water molecules of an atmosphere of an interior space ( 12 ) of the package ( 5 ); the core material ( 11 ) of the hydrolysis-sensitive component ( 6 ) having a semipermeable coating at least on an upper side ( 7 ) and a peripheral surface ( 9 ) of the hydrolysis-sensitive component ( 6 ), and the semipermeable coating supporting the form of the hydrolysis-sensitive component ( 6 ) during saponification and loss of form and is permeable to water molecules. 2. The electronic component as claimed in claim 1 , the hydrolysis-sensitive component ( 6 ) having the upper side ( 7 ), an underside ( 8 ) and the peripheral surface ( 9 ) arranged between the upper side ( 7 ) and the underside ( 8 ), and the underside ( 8 ) of the hydrolysis-sensitive component ( 6 ) having a surface-mountable molecular layer ( 10 ). 3. The electronic component as claimed in claim 1 , the hydrolysis-sensitive component ( 6 ) comprising a hydrolysis-sensitive plastic. 4. The electronic component as claimed in claim 3 , the plastic comprising a hydrolysis-sensitive polymer, which in its hydrolysis extracts water molecules from the interior space ( 12 ) of the package ( 5 ). 5. The electronic component as claimed in claim 3 , the hydrolysis-sensitive plastic being exposed to intensive saponification by hydrolysis when a glass transition temperature of the plastic is exceeded. 6. The electronic component as claimed in claim 3 , the plastic being a hydrolysis-sensitive polyester. 7. The electronic component as claimed in claim 3 , the plastic being a hydrolysis-sensitive polybutylene terephthalate. 8. A method for producing an electronic component ( 1 ) as claimed in claim 1 , which comprises the following method steps: producing at least one semiconductor chip ( 3 ); applying the at least one semiconductor chip ( 3 ) to a substrate ( 4 ); establishing at least one bonding wire connection ( 2 ) between the at least one semiconductor chip ( 3 ) and the substrate ( 4 ); surface-mounting at least one component ( 6 ) with a hydrolysis-sensitive material on the substrate ( 4 ); hermetically encapsulating the at least one semiconductor chip ( 3 ), the at least one bonding wire connection ( 2 ), the at least one component ( 6 ) with the hydrolysis-sensitive material and at least partially the substrate ( 4 ) in a package ( 5 ); and heat-treating the electronic component ( 1 ) at a temperature above a glass transition temperature of the hydrolysis-sensitive material, with gettering of water molecules of an atmosphere of an interior space ( 12 ) of the package ( 5 ); wherein the hydrolysis-sensitive component ( 6 ) comprises a hydrolysis-sensitive core material ( 11 ), the core material ( 11 ) of the hydrolysis-sensitive component ( 6 ) having a semipermeable coating at least on the upper side ( 7 ) and the peripheral surface ( 9 ) of the hydrolysis-sensitive component ( 6 ), and the semipermeable coating supporting the form of the hydrolysis-sensitive component ( 6 ) during saponification and loss of form and is permeable to water molecules.
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