Localized deposition of polymer film on nanocantilever chemical vapor sensors by surface-initiated atom transfer radical polymerization

Patent metadata

Field	Value
Publication number	US-9423387-B2
Application number	US-201213419510-A
Country	US
Kind code	B2
Filing date	Mar 14, 2012
Priority date	Mar 15, 2011
Publication date	Aug 23, 2016
Grant date	Aug 23, 2016

Abstract

Cantilever chemical vapor sensors that can be tailored to respond preferentially in frequency by controlling the location of deposition of an adsorbing layer. Cantilever chemical vapor sensor having a base, one or more legs and a tip are fabricated using a gold layer to promote deposition of a sorbing layer of a polymeric material in a desired location, and using a chromium layer to inhibit deposition of the sorbing layer in other locations. Sorbing layers having different glass temperatures Tg and their effects are described. The methods of making such cantilever chemical vapor sensors are described.

First claim

What is claimed is:

1. A cantilever chemical vapor sensor, comprising:
a cantilever structure having a base, having at least one leg extending from said base and having a tip at a distal end of said at least one leg, said cantilever structure attached to a substrate at said base thereof and configured to oscillate at a natural resonant frequency F 0 ;
a sorbent film attached to a location of said cantilever structure selected from the group of locations consisting of said base, said at least one leg and said tip, and absent from another of said locations of said cantilever structure selected from the group of locations consisting of said base, said at least one leg and said tip, said sorbent film configured to collect by sorption molecules from a vapor in contact with said cantilever structure, said molecules collected configured to cause a change ΔF in said natural resonant frequency F 0 ; and
a signal output port configured to provide a signal representative of said oscillation frequency of said cantilever structure,
the cantilever chemical vapor sensor further comprising a promoter film and a passivation layer, said promoter film applied to at least two of said locations of said cantilever structure selected from the group of locations consisting of said base, said at least one leg and said tip, and said passivation layer applied over said promoter layer at at least one of said locations of said cantilever structure selected from the group of locations consisting of said base, said at least one leg and said tip.

2. The cantilever chemical vapor sensor of claim 1 , wherein said promoter film is a layer of gold.

3. The cantilever chemical vapor sensor of claim 2 , wherein a polymerization initiator is present on said layer of gold.

4. The cantilever chemical vapor sensor of claim 1 , wherein said sorbent film is a polymer having a glass temperature Tg.

5. A method of fabricating a cantilever chemical vapor sensor according to claim 1 , comprising the steps of:
defining on a surface of a substrate a plurality of regions to be fabricated into the cantilever structure, which cantilever structure when completed comprises the base, the at least one leg extending from said base, and the tip at a distal end of said at least one leg, and the signal output port configured to provide a signal representative of the oscillation frequency of said cantilever structure;
applying and patterning the promoter layer at two or more of said regions defined as said base, said at least one leg, and said tip;
overcoating said promoter layer with the passivating layer at at least one of said regions defined as said base, said at least one leg and said tip, while leaving a portion of said promoter layer uncoated;
etching said substrate so as to fabricate said cantilever structure comprising said base, said at least one leg extending from said base, and said tip at a distal end of said at least one leg, said base of said cantilever structure remaining attached to said substrate and said signal output port;
depositing the sorbing layer over said uncoated promoter layer while inhibiting said sorbing layer from depositing on said passivating layer;
said cantilever structure configured to oscillate at a natural resonant frequency F 0 in the absence of a sorbate on said sorbing layer and to oscillate at a frequency F 0 +ΔF in the presence of a sorbate on said sorbing layer.

6. The method of fabricating a cantilever chemical vapor sensor of claim 5 , wherein said promoter layer comprises gold.

7. The method of fabricating a cantilever chemical vapor sensor of claim 6 , further comprising the step of overcoating said gold with a polymerization initiator prior to the step of depositing a sorbing layer over said uncoated promoter layer.

8. The method of fabricating a cantilever chemical vapor sensor of claim 5 , wherein said passivating layer comprises chromium.

9. The method of fabricating a cantilever chemical vapor sensor of claim 8 , further comprising the steps of oxidizing said chromium and growing a self assembled monolayer of an additional passivating layer on said oxidized chromium prior to the step of depositing a sorbing layer over said uncoated promoter layer.

10. The method of fabricating a cantilever chemical vapor sensor of claim 5 , wherein said step of applying and patterning a promoter layer comprises the steps of: depositing a gold layer; and patterning said gold layer.

11. The method of fabricating a cantilever chemical vapor sensor of claim 10 , further comprising the step of: applying a polymerization initiator to said patterned gold layer to provide a self assembled monolayer of a substance that promotes deposition of said adsorbing layer at that location.

12. The method of fabricating a cantilever chemical vapor sensor of claim 5 , wherein said step of overcoating said promoter layer with the passivating layer comprises the steps of: depositing a chromium layer on a region where deposition of said sorbing layer is to be inhibited; and patterning said chromium layer.

13. The method of fabricating a cantilever chemical vapor sensor of claim 12 , further comprising the steps of: oxidizing said chromium layer to provide an oxidized chromium surface; and depositing a self assembled monolayer of a substance that further passivates said oxidized chromium surface to prevent attachment of polymer initiator to that surface.

14. A cantilever chemical vapor sensor, comprising:
a cantilever structure having a base, having at least one leg extending from said base and having a tip at a distal end of said at least one leg, said cantilever structure attached to a substrate at said base thereof and configured to oscillate at a natural resonant frequency F 0 ;
a sorbent film attached to a location of said cantilever structure selected from the group of locations consisting of said base, said at least one leg and said tip, and absent from another of said locations of said cantilever structure selected from the group of locations consisting of said base, said at least one leg and said tip, said sorbent film configured to collect by sorption molecules from a vapor in contact with said cantilever structure, said molecules collected configured to cause a change ΔF in said natural resonant frequency F 0 ; and
a signal output port configured to provide a signal representative of said oscillation frequency of said cantilever structure;
the cantilever chemical vapor sensor further comprising a passivation layer which comprises oxidized chromium having a self assembled monolayer deposited on said oxidized chromium.

Assignees

• Mccaig Heather
• Myers Edward B
• Roukes Michael L
• Lewis Nathan S
• Chi Derrick
• California Inst Of Techn

Inventors

• Mccaig Heather
• Myers Edward B
• Roukes Michael L
• Lewis Nathan S
• Chi Derrick

Classifications

• G01N9/002

  using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis (G01N9/34 takes precedence) · CPC title

• G01N5/02

  by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content {(absorption bulbs B01D53/00)} · CPC title

• G01N33/0027 Primary

  concerning the detector · CPC title