Corrosion sensors

Patent metadata

Field	Value
Publication number	US-9423366-B2
Application number	US-201414146116-A
Country	US
Kind code	B2
Filing date	Jan 2, 2014
Priority date	Aug 11, 2010
Publication date	Aug 23, 2016
Grant date	Aug 23, 2016

Abstract

Corrosion sensor apparatus for detection of contamination affecting metal based components and devices. For example, an apparatus includes: a set of corrosion sensor elements, wherein a width of a first corrosion sensor element is different than a width of a second corrosion sensor element, wherein each corrosion sensor element is susceptible to corrosion caused by an operating environment of the corrosion sensor elements; and a set of reference elements wherein a width of a first reference sensor element is substantially equal to the width of the first corrosion sensor element and a width of a second reference sensor element is substantially equal to the width of the second corrosion sensor element, wherein each reference sensor element is not substantially susceptible to corrosion caused by the operating environment of the corrosion sensor elements.

First claim

What is claimed is:

1. An apparatus, comprising:
a first corrosion sensor;
a second corrosion sensor; and
at least a third corrosion sensor;
wherein the first, second and third corrosion sensors are configured in a bridge arrangement such that when none of the first, second and third corrosion sensors experiences corrosion, the bridge arrangement is in a balanced condition, and when at least one of the first, second and third corrosion sensors experiences corrosion, the bridge arrangement is in an unbalanced condition; and wherein each of the first, second and third corrosion sensors comprise thin film sensor elements having progressively increasing widths, the progressively increasing widths of the thin film sensor elements providing corrosion monitoring over progressively increasing time periods.

2. The apparatus of claim 1 , wherein each of the first, second and third corrosion sensors comprises a first pair of thin film sensor elements that are exposed to corrosion and a second pair of thin film sensor elements that are not exposed to corrosion such that the amount of unbalance is directly related to corrosion of a width of the exposed sensor elements and a corrosion rate associated with the exposed sensor elements.

Assignees

• Globalfoundries Inc

Inventors

• Hamann Hendrik F
• Klein Levente I
• Schappert Michael A
• Singh Prabjit

Classifications

• G01N17/04 Primary

  Corrosion probes · CPC title

• G01N27/00 Primary

  Investigating or analysing materials by the use of electric, electrochemical, or magnetic means (G01N3/00 – G01N25/00 take precedence; measurement or testing of electric or magnetic variables or of electric or magnetic properties of materials G01R) · CPC title