Photo-sensor with a transparent substrate and an in-plane electrode pair

Patent metadata

Field	Value
Publication number	US-9423295-B2
Application number	US-201414261269-A
Country	US
Kind code	B2
Filing date	Apr 24, 2014
Priority date	Apr 24, 2013
Publication date	Aug 23, 2016
Grant date	Aug 23, 2016

Abstract

According to one aspect of the invention, there is provided a photo-sensor comprising: an optically transparent substrate; an electrode pair; and a photoactive film with electrical polarization located between the optically transparent substrate and the electrode pair, wherein the optically transparent substrate is configured to transmit incident radiation received by the optically transparent substrate to the photoactive film and wherein the electrode pair is configured to receive charge carriers generated by the photoactive film in response to the transmitted incident radiation.

First claim

What is claimed is:

1. A photo-sensor comprising:
an optically transparent substrate;
an in-plane electrode pair; and
a photoactive film with electrical polarization located between the optically transparent substrate and the in-plane electrode pair, wherein the optically transparent substrate is configured to transmit incident radiation received by the optically transparent substrate to the photoactive film and wherein the in-plane electrode pair is configured to receive charge carriers generated by the photoactive film in response to the transmitted incident radiation.

2. The photo-sensor of claim 1 , wherein the photoactive film comprises a ferroelectric.

3. The photo-sensor of claim 2 , wherein the ferroelectric comprises any one or more of: La-doped lead zirconate titanate (PLZT), lithium niobate (LiNbO 3 ), barium titanate (BaTiO 3 ) and bismuth ferrite (BiFeO 3 ).

4. The photo-sensor of claim 2 , wherein the electrical polarization of the ferroelectric photoactive film is orientated on a plane that is generally parallel to a plane along which the optically transparent substrate lies.

5. The photo-sensor of claim 1 , further comprising an insulative buffer layer disposed between the optically transparent substrate and the photoactive film.

6. The photo-sensor of claim 5 , wherein the insulative buffer layer comprises any one or more of: yttria-stabilized zirconia (YSZ), strontium titanate (SrTiO 3 ), and magnesium oxide (MgO).

7. The photo-sensor of claim 1 , wherein the in-plane electrode pair is planar and parallel to a plane along which the photoactive film lies.

8. The photo-sensor of claim 1 , wherein the in-plane electrode pair comprises two interdigitated electrodes.

9. The photo-sensor of claim 1 , wherein the in-plane electrode pair comprises metal or electrically conductive non-metal.

10. The photo-sensor of claim 9 , wherein the metal comprises any one or more of:
gold (Au), silver (Ag), chromium (Cr), aluminum (Al) and platinum (Pt).

11. The photo-sensor of claim 9 , wherein the electrically conductive non-metal comprises any one or more of: metal oxides and ceramics.

12. The photo-sensor of claim 11 , wherein the electrically conductive non-metal comprises any one or more of: (La 0.7 Sr 0.3 )MnO 3 (LSMO) and Nb-doped SrTiO 3 (Nb:STO).

13. The photo-sensor of claim 1 , wherein at least a surface of the in-plane electrode pair that faces the photoactive film is reflective.

14. The photo-sensor of claim 1 , wherein the optically transparent substrate comprises fused silica, amorphous glass, crystalline glass and polymer.

15. The photo-sensor of claim 1 , wherein the optically transparent substrate is fabricated from a single crystal that is lattice-matched to the photoactive film.

16. The photo-sensor of claim 15 , wherein the single crystal comprises any one or more of: magnesium oxide (MgO) and strontium titanate (SrTiO 3 ).

17. A photo-sensor package comprising:
an optically transparent substrate;
an in-plane electrode pair; and
a photoactive film with electrical polarization disposed between the optically transparent substrate and the in-plane electrode pair, wherein the optically transparent substrate is configured to transmit incident radiation received by the optically transparent substrate to the photoactive film and wherein the in-plane electrode pair is configured to receive charge carriers generated by the photoactive film in response to the transmitted incident radiation.

18. The photo-sensor package of claim 17 , further comprising package substrate disposed to face the in-plane electrode pair, so that each of the optically transparent substrate and the package substrate provide an external surface of the photo-sensor package.

19. The photo-sensor package of claim 18 , wherein the package substrate comprises at least one contact pad to which at least one electrode of the in-plane electrode pair is coupled.

20. The photo-sensor package of claim 17 further comprising sealant disposed along a perimeter of the optically transparent substrate, the in-plane electrode pair and the photoactive film.

Assignees

• Agency Science Tech & Res

Inventors

• Lai Szu Cheng
• Yao Kui
• Chen Yi Fan
• Lim Yee Fun

Classifications

• G01J1/429

  applied to measurement of ultraviolet light (using counting tubes G01T) · CPC title

• G01J1/42 Primary

  using electric radiation detectors (optical or mechanical part G01J1/04; by comparison with a reference light or electric value G01J1/10) · CPC title

• H01L49/00

  Electricity · mapped topic

• H10N99/00

  Subject matter not provided for in other groups of this subclass · CPC title