Integrated laser and method of fabrication thereof

Patent metadata

Field	Value
Publication number	US-9419412-B2
Application number	US-201414540143-A
Country	US
Kind code	B2
Filing date	Nov 13, 2014
Priority date	Nov 13, 2013
Publication date	Aug 16, 2016
Grant date	Aug 16, 2016

Abstract

There is provided an integrated laser. The integrated laser includes a semiconductor waveguide having a first section, a second section and a third section. The integrated laser further includes an active region formed on the third section of the semiconductor waveguide, the active region configured for generating light, and a coupler formed on the second section of the semiconductor waveguide, the coupler configured for coupling said light between the semiconductor waveguide and the active region. In particular, the first section comprises a multi-branch splitter having a ring structure formed between two branches of the multi-branch splitter for emission wavelength control of the integrated laser. Preferably, the multi-branch splitter is a Y-branch splitter and the ring structure is formed in a space between two branches of the Y-branch splitter. There is also provided a method of fabrication thereof, an integrated tunable laser and an integrated tunable laser system.

First claim

What is claimed is:

1. An integrated laser, comprising:
a semiconductor waveguide having a first section, a second section and a third section;
an active region formed on the third section of the semiconductor waveguide, the active region configured for generating light; and
a coupler formed on the second section of the semiconductor waveguide, the coupler configured for coupling said light between the semiconductor waveguide and the active region,
wherein the first section comprises a multi-branch splitter having a ring structure formed between two branches of the multi-branch splitter for emission wavelength control of the integrated laser.

2. The integrated laser according to claim 1 , wherein the multi-branch splitter is a Y-branch splitter and the ring structure is formed in a space between two branches of the Y-branch splitter.

3. The integrated laser according to claim 1 , wherein the active region comprises III-V material layers formed on the third section of the semiconductor waveguide.

4. The integrated laser according to claim 3 , wherein the III-V material layers include a single quantum well (SQW) or multiple quantum wells (MQW).

5. The integrated laser according to claim 1 , wherein the coupler is an adiabatic coupler.

6. The integrated laser according to claim 5 , wherein the adiabatic coupler has a tapered shape, tapering from an end adjacent the third section to an opposing narrower end adjacent the first section, and the adiabatic coupler comprises III-V material layers formed on the second section of the semiconductor waveguide.

7. The integrated laser according to claim 1 , wherein the first section of the semiconductor waveguide functions as a narrow-band back mirror for filtering the emission wavelength, and the third section of the semiconductor waveguide has a cleaved facet that functions as a broad-band front mirror.

8. The integrated laser according to claim 1 , wherein the first section of the semiconductor waveguide further comprises a tuning mechanism for modifying a property of the ring structure in order to tune the emission wavelength of the integrated laser.

9. The integrated laser according to claim 8 , wherein the tuning mechanism comprises one or more electrodes coupled to the ring structure for modifying the property of the ring structure through heating or carrier injection for causing a change in the refractive index of the ring structure so as to tune the resonant wavelength of the ring structure.

10. An integrated tunable laser system, the system comprising:
a plurality of integrated lasers, each integrated laser comprising:
a semiconductor waveguide having a first section, a second section and a third section;
an active region formed on the third section of the semiconductor waveguide, the active region configured for generating light; and
a coupler formed on the second section of the semiconductor waveguide, the coupler configured for coupling said light between the semiconductor waveguide and the active region,
wherein the first section comprises a multi-branch splitter having a ring structure formed between two branches of the multi-branch splitter for emission wavelength control of the integrated laser, and
a wavelength de-multiplexing (WDM) element interfaced with a waveguide for combining laser light emitted by each of the plurality of integrated lasers,
wherein the ring structures of the plurality of integrated lasers have different radii, each ring structure having a radius configured for tuning the emission wavelength of the respective integrated laser within a predetermined range of emission wavelengths.

11. The integrated tunable laser system according to claim 10 , wherein each integrated laser is coupled in series with a respective ring modulator for converting an output of the integrated laser into an optical data.

12. The integrated tunable laser system according to claim 11 , wherein each ring modulator is configured to have a predetermined number of resonant dips over an emission tuning range, and the system is configured for accommodating m×n optical channels, where m is the predetermined number of resonant dips of said each ring modulator and n is the number of integrated lasers in the system.

13. A method of fabricating an integrated laser, comprising:
forming a semiconductor waveguide having a first section, a second section and a third section;
forming an active region on the third section of the semiconductor waveguide, the active region configured for generating light; and
forming a coupler on the second section of the semiconductor waveguide, the coupler configured for coupling said light between the semiconductor waveguide and the active region,
wherein the first section comprises a multi-branch splitter having a ring structure formed between two branches of the multi-branch splitter for emission wavelength control of the integrated laser.

14. The method according to claim 13 , wherein the multi-branch splitter is a Y-branch splitter and the ring structure is formed in a space between two branches of the Y-branch splitter.

15. The method according to claim 13 , wherein forming the active region comprises forming III-V material layers on the third section of the semiconductor waveguide.

16. The method according to claim 15 , wherein the III-V material layers include a single quantum well (SQW) or multiple quantum wells (MQW).

17. The method according to claim 13 , wherein the coupler is an adiabatic coupler.

18. The method according to claim 17 , wherein forming the coupler comprises forming the adiabatic coupler having a tapered shape, tapering from an end adjacent the third section to an opposing narrower end adjacent the first section, and forming the adiabatic coupler comprising III-V material layers on the second section.

19. The method according to claim 13 , wherein the first section of the semiconductor waveguide functions as a narrow-band back mirror for filtering the emission wavelength, and the third section of the semiconductor waveguide has a cleaved facet that functions as a broad-band front mirror.

20. The method according to claim 13 , further comprises forming a tuning mechanism at the first section of the semiconductor waveguide for modifying a property of the ring structure in order to tune the emission wavelength of the integrated laser.

21. The integrated laser according to claim 1 , wherein the ring structure is configured to reflect said light received in the first section to the second section of the semiconductor waveguide.

Assignees

• Agency Science Tech & Res

Inventors

• Krishnamurthy Vivek
• Wang Qian
• Pu Jing

Classifications

• H01S5/06255 Primary

  Controlling the frequency of the radiation · CPC title

• H01S5/06256

  with DBR-structure · CPC title

• H01S5/4087

  emitting more than one wavelength · CPC title

• H01S5/1032

  Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region · CPC title

• H01S5/1007

  Branched waveguides · CPC title