Microwave plasma processing apparatus and microwave plasma processing method
US-2017358835-A1 · Dec 14, 2017 · US
US9419322B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9419322-B2 |
| Application number | US-201514641938-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 9, 2015 |
| Priority date | Mar 15, 2013 |
| Publication date | Aug 16, 2016 |
| Grant date | Aug 16, 2016 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A multi-port waveguide is provided having a rectangular waveguide that includes a Y-shape structure with first top arm having a first rectangular waveguide port, a second top arm with second rectangular waveguide port, and a base arm with a third rectangular waveguide port for supporting a TE 10 mode and a TE 20 mode, where the end of the third rectangular waveguide port includes rounded edges that are parallel to a z-axis of the waveguide, a circular waveguide having a circular waveguide port for supporting a left hand and a right hand circular polarization TE 11 mode and is coupled to a base arm broad wall, and a matching feature disposed on the base arm broad wall opposite of the circular waveguide for terminating the third rectangular waveguide port, where the first rectangular waveguide port, the second rectangular waveguide port and the circular waveguide port are capable of supporting 4-modes of operation.
Opening claim text (preview).
What is claimed: 1. A multi-port waveguide, comprising: a. a rectangular waveguide, wherein said rectangular waveguide comprises a Y-shape structure along an, x-y plane, having a first top arm, a second top arm, and a base arm, wherein said first top arm comprises a first rectangular waveguide port, wherein said second top arm comprises a second rectangular waveguide port, wherein an end of said base arm comprises a third rectangular waveguide port that is capable of supporting a TE 10 mode and a TE 20 mode, wherein said third rectangular waveguide port comprises rounded edges that are parallel to a z-axis relative to said x-y plane of said rectangular waveguide; b. a circular waveguide, wherein said circular waveguide comprises a circular waveguide port that is capable of supporting a left hand circular polarization TE 11 mode and a right hand circular polarization TE 11 mode, wherein said circular waveguide is coupled to a broad wall of said base arm of said rectangular waveguide; and c. a matching feature, wherein said matching features is disposed on said broad wall of said base arm that is opposite of said circular waveguide, wherein said matching feature is capable of terminating said third rectangular waveguide port, wherein said first rectangular waveguide port, said second rectangular waveguide port and said circular waveguide port are capable of supporting 4-TE modes. 2. The multi port waveguide of claim 1 , wherein said matching feature comprises a stub feature, wherein said stub feature projects outward from said broad wall of said base arm. 3. The multi port waveguide of claim 1 , wherein said matching feature comprises a capacitive dome, wherein said capacitive dome projects inward from said broad wall of said base arm. 4. The multi port waveguide of claim 1 , wherein said matching feature comprises a pin feature, wherein said pin feature projects outward from said broad wall of said base arm. 5. The multi port waveguide of claim 1 , wherein said circular waveguide is disposed at a pre-defined distance from a junction of said first top arm and said second top arm along said base arm, wherein said pre-defined distance is according to matching and phase properties of said left hand circular polarization TE 11 mode and said right hand circular polarization TE 11 mode, wherein a phase difference between said TE 11 mode along said first top arm and said TE 11 mode said second top arm is 90-degrees.
Magic-T junctions · CPC title
Transitions between hollow waveguides of different shape, e.g. between a rectangular and a circular waveguide · CPC title
for mode selection, e.g. mode suppression or mode promotion; for mode conversion · CPC title
with a circular, elliptic, or parabolic cross-section · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.