Method for manufacturing ordered nanowire array of NiO doped with Pt in situ

Patent metadata

Field	Value
Publication number	US-9418843-B2
Application number	US-201314760890-A
Country	US
Kind code	B2
Filing date	Jan 17, 2013
Priority date	Jan 17, 2013
Publication date	Aug 16, 2016
Grant date	Aug 16, 2016

Abstract

The present disclosure provides a method for manufacturing ordered nanowires array of NiO doped with Pt in situ, comprising: growing a Ni layer on a high-temperature resistant and insulated substrate; applying a photoresist on the Ni layer, pattering a pattern region of the ordered nanowires array by applying electron beam etching on the photoresist, growing Ni on the pattern region of the ordered nanowires array, peeling off the photoresist by acetone and etching the surface of the Ni layer by ion beam etching so as to etch off the Ni layer grown on the surface of the substrate and to leave the Ni on the pattern region of the ordered nanowires array to form the ordered Ni nanowires array; dipping the ordered Ni nanowires array into a solution of H 2 PtCl 6 so as to displace Pt on the Ni nanowires array by a displacement reaction; and oxidizing the Ni nanowires array attached with Pt in an oxidation oven to obtain the ordered nanowires array of NiO doped with Pt. The present invention is simple and practical and the sensitivity and reliability of the doped sensor on the gas of CO and H 2 are greatly improved.

First claim

We claim:

1. A method for manufacturing ordered nanowires array of NiO doped with Pt in situ, the method comprising:
growing a Ni layer on a high-temperature resistant and insulated substrate;
applying a photoresist on the Ni layer, pattering a pattern region of the ordered nanowires array by applying electron beam etching on the photoresist, growing Ni on the pattern region of the ordered nanowires array, peeling off the photoresist by acetone and etching the surface of the Ni layer by ion beam etching so as to etch off the Ni layer grown on the surface of the substrate and to leave the Ni on the pattern region of the ordered nanowires array to form the ordered Ni nanowires array;
dipping the ordered Ni nanowires array into a solution of H 2 PtCl 6 so as to displace Pt on the Ni nanowires array by a displacement reaction; and
oxidizing the Ni nanowires array attached with Pt in an oxidation oven to obtain the ordered nanowires array of NiO doped with Pt.

2. The method according to claim 1 , wherein in the step of growing a Ni layer on a high-temperature resistant and insulated substrate, an electron beam evaporation or a magnetron sputtering is utilized, in which the conditions for the electron beam evaporation are as follows: a vacuum of 10-4˜10-6 Torr, a temperature of 1100-1600° C., an evaporation rate of 0.1-3 nm/s; and the conditions for the magnetron sputtering are as follows: a voltage of 400˜800V, a magnetic field strength of 70˜300 G, an air pressure of 1-10 mTorr, a current density of 5˜60 mA/cm, a power density of 1˜40 W/cm, and a maximum sputtering rate of 100 nm˜1000 nm.

3. The method according to claim 1 , wherein in the step of growing a Ni layer on a high-temperature resistant and insulated substrate, the high-temperature resistant and insulated substrate is SiO 2 , Si, Al 2 O 3 or ceramics.

4. The method according to claim 1 , wherein in the step of growing a Ni layer on a high-temperature resistant and insulated substrate, the thickness of the grown Ni layer ranges between 10 nm and 100 nm.

5. The method according to claim 1 , wherein the step of pattering a pattern region of the ordered nanowires array by applying electron beam etching on the photoresist comprises pattern the photoresist applied on the Ni layer by applying electron beam etching to form the pattern region of the ordered nanowires array, and the condition for the electron beam etching are as follows: a power of 100 KeV, 5 lens, thickness of the Zep photoresist of 400-800 nm and a dose of 200-300.

6. The method according to claim 1 , wherein in the step of growing Ni on the pattern region of the ordered nanowires array, an electron beam evaporation or a magnetron sputtering is utilized, in which the conditions for the electron beam evaporation are as follows: a vacuum of 10 −4 ˜10 −6 Torr, a temperature of 1100-1600° C., an evaporation rate of 0.1-3 nm/s; and the conditions for the magnetron sputtering are as follows: a voltage of 400˜800V, a magnetic field strength of 70˜300 G, an air pressure of 1-10 mTorr, a current density of 5˜60 mA/cm, a power density of 1˜40 W/cm, and a maximum sputtering rate of 100 nm˜1000 nm/min.

7. The method according to claim 1 , wherein in the step of growing Ni on the pattern region of the ordered nanowires array, the thickness of the grown Ni layer ranges between 50 nm and 5000 nm.

8. The method according to claim 1 , wherein in the step of etching the surface of the Ni layer by ion beam etching process, the conditions for the ion beam etching process are as follows: a voltage of the beam flow is 250V-500V, and a current of the beam flow is 400 mA-700 mA.

9. The method according to claim 1 , wherein in the step of dipping the ordered Ni nanowires array into a solution of H 2 PtCl 6 so as to displace Pt on the Ni nanowires array by a displacement reaction, a mol concentration of the solution of H 2 PtCl 6 is 10 −5 M-10 −3 M, and the time during which the ordered Ni nanowires array is dipped into the solution of H 2 PtCl 6 to make the displace reaction is 30 seconds-30 minutes.

10. The method according to claim 1 , wherein in the step of oxidizing the Ni nanowires array attached with Pt in an oxidation oven, the oxidization temperature is 450° C.-950° C., and the oxidization period is 3 hours-12 hours.

Assignees

• Inst Of Microelectronics Cas

Inventors

• Li Dongmei
• Chen Xin
• Liang Shengfa
• Niu Jiebin
• Zhang Peiwen
• Liu Yu
• Li Xiaojing
• Zhan shuang
• Zhang Hao
• Luo Qing
• Xie Changqing
• Liu Ming

Classifications

• H10P95/70

  Chemical treatments · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• H10P50/20

  Dry etching; Plasma etching; Reactive-ion etching · CPC title

• H10P14/3462

  Nanowires · CPC title

• H10P14/3446

  Transition metal elements; Rare earth elements · CPC title