Electric fuse

Patent metadata

Field	Value
Publication number	US-9418812-B2
Application number	US-201313741188-A
Country	US
Kind code	B2
Filing date	Jan 14, 2013
Priority date	Jan 20, 2012
Publication date	Aug 16, 2016
Grant date	Aug 16, 2016

Abstract

An electric fuse includes a conductive material formed on a top surface of an insulating material. The conductive material includes a wiring portion, and first and second terminal portions arranged in two ends of the wiring portion so that the wiring portion is located between the first and second terminal portions. The first terminal portion, the wiring portion, and the second terminal portion are lined up in a first direction. The first and second terminal portions each have a width larger than a width of the wiring portion in a second direction perpendicular to the first direction. The electric fuse includes a film including an opening which exposes a region between the first terminal portion and the second terminal portion. The film is formed above at least a part of the wiring portion and has a tensile stress.

First claim

The invention claimed is:

1. An electric fuse comprising:
a conductive material formed on a top surface of an insulating material, the conductive material including:
a wiring portion, and
first and second terminal portions arranged in two ends of the wiring portion so that the first terminal portion is connected to one end of the wiring portion and the second terminal portion is connected to the other end of the wiring portion, wherein the first terminal portion, the wiring portion, and the second terminal portion are lined up in a first direction, and the first and second terminal portions each have a width larger than a width of the wiring portion in a second direction perpendicular to the first direction;
an insulating film covering the conductive material; a protection film having a tensile stress, the protection film being formed on the insulating film to cover the first terminal portion and the second terminal portion and to cover at least a part of the wiring portion; and

an interlayer insulating film formed directly on a top surface of the protection film,
wherein the protection film includes:
an opening region which exposes a part of the insulating film above a region between the first terminal portion and the second terminal portion; and
a cover film that differs from the interlayer insulating film, all portions of the cover film having a size that is equal to or smaller than a size of the opening region in the first direction as viewed from above such that the all portions of the cover film are formed within the opening region.

2. The electric fuse according to claim 1 , wherein the opening region has a width larger than the width of the wiring portion in the second direction.

3. The electric fuse according to claim 1 , wherein the opening region exposes a region which exists between the first terminal portion and the second terminal portion and which is free from the wiring portion.

4. The electric fuse according to claim 1 , wherein the protection film comprises a silicon nitride film.

5. An electric fuse comprising:
a conductive material formed on a top surface of an insulating material, the conductive material including:
a wiring portion, and
first and second terminal portions formed in two ends of the wiring portion so that the wiring portion is located between the first and second terminal portions in a first direction, wherein the first and second terminal portions each have a width larger than a width of the wiring portion in a second direction perpendicular to the first direction;

an insulating film covering the conductive material;
a cover film having a tensile stress, the cover film being formed on the insulating film to cover at least a part of the wiring portion;
a protection film formed on the insulating film to cover the first terminal portion and the second terminal portion; and
an interlayer insulating film formed directly on a top surface of the protection film,
wherein the protection film includes an opening region to expose a part of the insulating film, the opening region having a size that corresponds to a rectangular region including the wiring portion, and
wherein the cover film differs from the interlayer insulating film, all portions of the cover film having a size that is equal to or smaller than a size of the opening region in the first direction as viewed from above such that the all portions of the cover film are formed within the opening region.

6. The electric fuse according to claim 5 , wherein the cover film comprises an end portion that is coupled to a part of the protection film.

7. The electric fuse according to claim 5 , wherein the cover film is formed to have a same shape as the wiring portion to cover an entirety of a top surface of the wiring portion, and the cover film includes two end portions coupled to the protection film in the first direction.

8. The electric fuse according to claim 5 , wherein the cover film is formed to cover the part of the wiring portion, and the cover film includes two end portions coupled to the protection film in the second direction.

9. The electric fuse according to claim 5 , wherein the cover film comprises a silicon nitride film.

10. The electric fuse according to claim 5 , wherein the protection film comprises a silicon nitride film.

11. The electric fuse according to claim 5 , wherein the cover film and the protection film are one pattern integrally formed.

12. An electric fuse comprising:
a conductive material formed on a top surface of an insulating material, the conductive material including:
a wiring portion, and
first and second terminal portions arranged in two ends of the wiring portion so that the first terminal portion is connected to one end of the wiring portion and the second terminal portion is connected to the other end of the wiring portion, wherein the first terminal portion, the wiring portion, and the second terminal portion are lined up in a first direction, and the first and second terminal portions each have a width larger than a width of the wiring portion in a second direction perpendicular to the first direction;

an insulating film covering the conductive material;
a protection film having a tensile stress, the protection film being formed on the insulating film to cover the first terminal portion and the second terminal portion and to cover at least a part of the wiring portion; and
an interlayer insulating film formed directly on a top surface of the protection film, wherein the protection film includes:
a first opening region and a second opening region, each of the first opening region and the second opening region exposing a part of the insulating film above a region which exists between the first terminal portion and the second terminal portion and which is free from the wiring portion; and
a cover film that differs from the interlayer insulating film, all portions of the cover film being formed in a region sandwiched between the first opening region and the second opening region.

13. An electric fuse comprising:
a conductive material formed on a top surface of an insulating material, the conductive material including:
a wiring portion, and
first and second terminal portions arranged in two ends of the wiring portion so that the first terminal portion is connected to one end of the wiring portion and the second terminal portion is connected to the other end of the wiring portion, wherein the first terminal portion, the wiring portion, and the second terminal portion are lined up in a first direction, and the first and second terminal portions each have a width larger than a width of the wiring portion in a second direction perpendicular to the first direction;

an insulating film covering the conductive material;
a protection film having a tensile stress, the protection film being formed on the insulating film to cover the first terminal portion and the second terminal portion and to cover at least a part of the wiring portion; and
an interlayer insulating film formed directly on a top surface of the protection film, wherein the protection film includes:
a third opening region and a fourth opening region that are separate from each other and extend in the second direction, each of the third opening region and the fourth opening region exposing a part of the insulating film above a region which exists between the first terminal portion and the second terminal portion, the region including a first area which is free from the wiring portion and a second area in which the wiring portion exists; and
a cover film that differs from the interlayer insulating film, all portions of the cover film being formed in a

Assignees

• Socionext Inc

Inventors

• Arimura Kazuyoshi
• Ono Akihiko
• Ishida Masashi

Classifications

• H10W20/494

  changeable by the use of an external beam, e.g. laser beam or ion beam · CPC title

• H10W20/493

  Fuses, i.e. interconnections changeable from conductive to non-conductive · CPC title

• H10D84/00 Primary

  Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers · CPC title

• H01L2924/0002

  Electricity · mapped topic

• H01H85/0039 Primary

  Means for influencing the rupture process of the fusible element · CPC title