Eddy current sensor, eddy current sensor assembly, and polishing apparatus
US-2024399536-A1 · Dec 5, 2024 · US
US9417099B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9417099-B2 |
| Application number | US-201514963620-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 9, 2015 |
| Priority date | Dec 8, 2009 |
| Publication date | Aug 16, 2016 |
| Grant date | Aug 16, 2016 |
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In an aspect, a pinch sensor is provided, comprising: an elongate non-conductive casing enclosing first, second, and third elongate conductive electrodes; the first and second electrodes being separated by a portion of the casing, a capacitance between the first and second electrodes changing when an obstacle approaches the first electrode to provide a proximity indication of the obstacle to the pinch sensor; and, the second and third electrodes being separated by an air gap formed in the casing, a resistance between the second and third electrodes changing when the second and third electrodes come into contact upon compression of the casing by the obstacle to provide a contact indication of the obstacle with the pinch sensor.
Opening claim text (preview).
The invention claimed is: 1. A pinch sensor, comprising: an elongate non-conductive casing enclosing first, second, and third elongate conductive electrodes; the first and second electrodes being separated by a portion of the casing, a capacitance between the first and second electrodes changing when an obstacle approaches the first electrode to provide a proximity indication of the obstacle to the pinch sensor; and, the second and third electrodes being separated by an air gap formed in the casing, a resistance between the second and third electrodes changing when the second and third electrodes come into contact upon compression of the casing by the obstacle to provide a contact indication of the obstacle with the pinch sensor. 2. A pinch sensor as claimed in claim 1 , wherein the first electrode is encased in a wall of the casing, and the second and third electrodes are positioned in an interior space provided in the casing. 3. A pinch sensor as claimed in claim 2 , wherein the casing has side walls between the second and third electrodes, and wherein the second electrode has a central region that is a plateau, and left and right regions that slope downward towards the base in a direction away from the central region at a selected angle. 4. A pinch sensor as claimed in claim 2 , wherein the third electrode has an engagement region which has a central region, and left and right regions that extend downward towards the first electrode relative to the central region towards the side walls. 5. A pinch sensor as claimed in claim 2 , wherein the casing is tubular, wherein the second electrode includes an electrically-conductive tubular conduit disposed within the tubular casing, and wherein the third electrode includes an electrically-conductive core disposed within the electrically-conductive tubular conduit and normally spaced apart from the tubular conduit.
Measuring circuits therefor · CPC title
Appurtenances · CPC title
using distributed sensing elements · CPC title
responsive to changes in electrical capacitance · CPC title
by varying resistance · CPC title
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