Substrate processing device equipped with semicircle shaped antenna

Patent metadata

Field	Value
Publication number	US-9416451-B2
Application number	US-201113822434-A
Country	US
Kind code	B2
Filing date	Oct 6, 2011
Priority date	Oct 6, 2010
Publication date	Aug 16, 2016
Grant date	Aug 16, 2016

Abstract

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber where processes with respect to a substrate are carried out, a substrate support on which the substrate is placed, the substrate support being disposed within the chamber, and an antenna disposed in an upper portion of the chamber to form an electric field within the chamber. The antenna includes a first antenna and a second antenna, which are disposed in rotational symmetry with respect to a preset center. The first antenna includes a first inner antenna and a first intermediate antenna which respectively have semi-circular shapes and first and second radii and are respectively disposed on one side and the other side with respect to the preset center line and a first connection antenna connecting the first inner antenna to the first intermediate antenna. The second antenna includes a second intermediate antenna and a second inner antenna which respectively have semi-circular shapes and have first and second radii and are respectively disposed on one side and the other side with respect to the center line and a second connection antenna connecting the second intermediate antenna to the second inner antenna.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a chamber where processes with respect to a substrate are carried out;
a substrate support on which the substrate is placed, the substrate support being disposed within the chamber;
an antenna disposed in an upper portion of the chamber to form an electric field within the chamber; and
a showerhead in which an inlet for supplying reaction gas into the chamber and an outlet for discharging the reaction gas supplied into the chamber are disposed in symmetry to each other,
wherein the antenna comprises a first antenna and a second antenna, which are disposed in rotational symmetry with respect to a preset center,
the first antenna comprises a first inner antenna and a first intermediate antenna which respectively have semi-circular shapes and first and second radii and are respectively disposed on one side and the other side with respect to the preset center line and a first connection antenna connecting the first inner antenna to the first intermediate antenna, and
the second antenna comprises a second intermediate antenna and a second inner antenna which respectively have semi-circular shapes and have first and second radii and are respectively disposed on one side and the other side with respect to the center line and a second connection antenna connecting the second intermediate antenna to the second inner antenna, and
the showerhead includes
a plurality of diffusion passages vertically stacked apart from each other and connected to the inlet in order that the reaction gas flows along an inner space of the diffusion passages, each of the diffusion passages having a sectional area gradually increasing along a flow direction of the reaction gas thereby diffusing the reaction gas, and
inflow connection passages connecting the diffusion passages such that all the diffusion passages are connected in series as a whole, whereby the supplied reaction gas flows into the chamber through all of the diffusion passages and the inflow connection passages.

2. The substrate processing apparatus of claim 1 , wherein the first antenna further comprises a semicircular-type first outer antenna having a third radius and disposed on one side of the center line,
the second antenna further comprises a semicircular-type second outer antenna having the third radius and disposed on the other side of the center line,
the first intermediate antenna is disposed between the second inner antenna and the second outer antenna, and
the second intermediate antenna is disposed between the first inner antenna and the first outer antenna.

3. The substrate processing apparatus of claim 1 , wherein the antenna has a flat shape on which the first and second antennae are flush with each other.

4. The substrate processing apparatus of claim 1 , wherein the chamber comprises a lower chamber having an opened upper side, a chamber cover disposed under the antenna to open and close the upper side of the lower chamber, and an adjustment plate disposed between the antenna and the chamber cover to adjust the electric field formed within the chamber.

5. The substrate processing apparatus of claim 4 , wherein a thickness of the adjustment plate is determined by a process rate within the chamber.

6. The substrate processing apparatus of claim 1 , wherein the diffusion passages are vertically disposed.

7. The substrate processing apparatus of claim 1 , wherein the showerhead comprises a plurality of convergent passages connected to the outlet and having a sectional area gradually decreasing along a flow direction of the reaction gas and outflow connection passages connecting the convergent passages in series to each other.

Assignees

• Je Sung Tae
• Yang Il Kwang
• Song Byung Gyu
• Park Song Hwan
• Eugene Technology Co Ltd

Inventors

• Je Sung Tae
• Yang Il Kwang
• Song Byung Gyu
• Park Song Hwan

Classifications

• H10P14/6316

  Formation by nitridation, e.g. nitridation of the substrate · CPC title

• H10P14/6308

  of Group IV semiconductors · CPC title

• H10P14/20

  of semiconductor materials · CPC title

• H01J37/3211 Primary

  Antennas, e.g. particular shapes of coils · CPC title

• H05H2001/4667

  Electricity · mapped topic