Antioxidant gas blow-off unit

Patent metadata

Field	Value
Publication number	US-9415456-B2
Application number	US-201514679135-A
Country	US
Kind code	B2
Filing date	Apr 6, 2015
Priority date	Oct 5, 2012
Publication date	Aug 16, 2016
Grant date	Aug 16, 2016

Abstract

An antioxidant gas blow-off unit comprises a plate-shaped hollow base portion with an antioxidant gas flow passage formed therein, a hole provided in the base portion so as to allow a capillary to be inserted thereinto or removed therefrom and configured to communicate with the antioxidant gas flow passage, and a plurality of electrodes embedded in a wall of the base portion in the vicinity of the hole and configured to generate plasma from an antioxidant gas. With the antioxidant gas blow-off unit, the bonding quality of a wire bonding apparatus can be improved.

First claim

What is claimed is:

1. An antioxidant gas blow-off unit comprising:
a base portion configured as a hollow plate having an antioxidant gas flow passage formed therein;
a hole provided in the base portion to allow a capillary to be inserted thereinto or removed therefrom, the hole communicating with the antioxidant gas flow passage;
a plurality of electrodes embedded in a wall of the base portion proximal to the hole, the electrodes generating plasma from an antioxidant gas;
wherein the plurality of electrodes comprises at least one pair of electrodes positioned opposite to each other, and
wherein the pair of electrodes is embedded in the wall of the base portion that forms the antioxidant gas flow passage;
wherein the antioxidant gas flow passage is provided with at least one outlet through which the antioxidant gas is blown out toward a center of the hole, and
wherein the pair of electrodes is embedded in the wall of the base portion within a peripheral region of the outlet.

2. The antioxidant gas blow-off unit according to claim 1 , further comprising a heater mounted on an outer surface of the base portion, the heater being configured to heat the antioxidant gas.

3. The antioxidant gas blow-off unit according to claim 2 , wherein
the antioxidant gas flow passage comprises:
a first flow passage provided in the vicinity of the outer surface of the base portion on which the heater is mounted; and
a second flow passage provided between the first flow passage and the hole, the second flow passage being deeper than the first flow passage, and

the pair of electrodes are embedded in a wall of the base portion forming the second flow passage.

4. The antioxidant gas blow-off unit according to claim 2 , wherein
the antioxidant gas flow passage comprises:
a first flow passage provided in the vicinity of the outer surface of the base portion on which the heater is mounted; and
a second flow passage provided between the first flow passage and the hole, the second flow passage being deeper than the first flow passage, and

the pair of electrodes are embedded in a wall of the base portion that forms the second flow passage.

5. The antioxidant gas blow-off unit according to claim 1 , wherein
the antioxidant gas flow passage comprises a labyrinth that changes a flow direction of the antioxidant gas at least twice.

6. An antioxidant gas blow-off unit comprising:
a base portion configured as a hollow plate having an antioxidant gas flow passage formed therein;
a hole provided in the base portion to allow a capillary to be inserted thereinto or removed therefrom, the hole communicating with the antioxidant gas flow passage;
a plurality of electrodes embedded in a wall of the base portion proximal to the hole, the electrodes generating plasma from an antioxidant gas; and
an electric flame off probe disposed in a through-hole provided in a side surface of the hole.

7. The antioxidant gas blow-off unit according to claim 1 , further comprising an electric flame off probe disposed on the lower surface side of the base portion.

8. The antioxidant gas blow-off unit according to claim 1 , wherein the antioxidant gas flow passage comprises a labyrinth that changes a flow direction of the antioxidant gas at least twice.

9. The antioxidant gas blow-off unit according to claim 2 , wherein
the antioxidant gas flow passage comprises:
a first flow passage provided in the vicinity of the outer surface of the base portion on which the heater is mounted; and
a second flow passage provided between the first flow passage and the hole, the second flow passage being deeper than the first flow passage, and

the pair of electrodes are embedded in a wall of the base portion forming the second flow passage.

Assignees

• Shinkawa Kk

Inventors

• Maeda Toru

Classifications

• H10W72/552

  comprising metals or metalloids, e.g. silver · CPC title

• H10W72/5522

  comprising gold [Au] · CPC title

• H10W74/00

  Encapsulations, e.g. protective coatings · CPC title

• H10W72/07533

  Ultrasonic bonding, e.g. thermosonic bonding · CPC title

• H10W72/01551

  Changing the shapes of bond wires · CPC title