Low-temperature fabrication of nanomaterial-derived metal composite thin films

Patent metadata

Field	Value
Publication number	US-9412852-B2
Application number	US-201514606014-A
Country	US
Kind code	B2
Filing date	Jan 26, 2015
Priority date	Jan 28, 2011
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

Disclosed are new methods of fabricating nanomaterial-derived metal composite thin films via solution processes at low temperatures (<400° C.). The present thin films are useful as thin film semiconductors, thin film dielectrics, or thin film conductors, and can be implemented into semiconductor devices such as thin film transistors and thin film photovoltaic devices.

First claim

What is claimed is:

1. A method of fabricating a transistor device comprising a thin film semiconductor component comprising indium gallium zinc oxide (IGZO), the method comprising:
depositing a thin film from a nanomaterial dispersion comprising a semiconducting metal oxide nanomaterial in a solvent or solvent mixture and a binder composition comprising an indium salt, a gallium salt, and a zinc salt in a solvent or solvent mixture, wherein the indium salt, the gallium salt, and the zinc salt independently comprise either an oxidizing anion or a fuel anion, provided that (a) if none of the indium salt, the gallium salt and the zinc salt comprises a fuel anion, then the binder composition further comprises either a fuel or an ammonium salt comprising a fuel anion, and (b) if none of the indium salt, the gallium salt and the zinc salt comprises an oxidizing anion, then the binder composition further comprises either an acid comprising an oxidizing anion or an inorganic salt comprising an oxidizing anion, wherein:
the fuel is selected from acetylacetone, CF 3 COCH 2 COCF 3 , CH 3 COCHFCOCH 3 , CH 3 COCH 2 C(═NH)CF 3 , CH 3 C(═NH)CHFC(═NH)CH 3 , CH 3 COCH 2 C(═NCH 3 )CF 3 , CH 3 C(═NCH 3 )CHFC(═NCH 3 )CH 3 , CH 3 C(═NH)CHFC(═NCH 3 )CH 3 , Ph 2 POCH 2 COCH 3 , urea, N-methylurea, citric acid, ascorbic acid, stearic acid, nitromethane, hydrazine, carbohydrazide, oxalyl dihydrazide, malonic acid dihydrazide, tetra formal tris azine, hexamethylenetetramine, and malonic anhydride,
the fuel anion is selected from acetylacetonate, a citrate, an oxalate, an ascorbate, and a stearate, and
the oxidizing anion is selected from a nitrate, a perchlorate, a chlorate, a hypochlorite, an azide, a peroxide, a superoxide, a high-valent oxide, an N-oxide, a persulfate, a dinitramide, a nitrocyanamide, a nitroarylcarboxylate, a tetrazolate, and hydrates thereof, and
the oxidizing anions and the fuel and fuel anions in the binder composition are present in amounts to allow metal oxide formation and complete combustion of the fuel

and fuel anions; and
annealing the thin film at a temperature of less than or about 350° C. to initiate a combustion reaction between the oxidizing anions and the fuel and fuel anions, thereby forming a thin film semiconductor component comprising IGZO and converting the fuel and fuel anions into CO 2 , H 2 O, and optionally, N 2 ; wherein the transistor device exhibits a charge mobility of about 3 cm 2 /Vs or higher.

2. The method of claim 1 , wherein the nanomaterial dispersion and the binder composition are deposited separately.

3. The method of claim 1 , wherein the nanomaterial dispersion and the binder composition are combined before the depositing step.

4. The method of claim 1 , wherein the semiconducting metal oxide nanomaterial is selected from a semiconducting metal oxide nanoparticle, a semiconducting metal oxide nanosphere, a semiconducting metal oxide nanowire, a semiconducting metal oxide nanoribbon, a semiconducting metal oxide nanorod, a semiconducting metal oxide nanotube, a semiconducting metal oxide nanosheet, and mixtures thereof.

5. The method of claim 1 , wherein the semiconducting metal oxide nanomaterial comprises an IGZO nanomaterial.

6. The method of claim 1 , wherein the nanomaterial dispersion comprises a solid loading between about 5 mg/mL and about 500 mg/mL.

7. The method of claim 1 , further comprising providing a metal oxide thin film dielectric, wherein providing the metal oxide thin film dielectric comprises:
depositing a thin film from a nanomaterial dispersion comprising an electrically insulating metal oxide nanomaterial in a solvent or solvent mixture and a dielectric binder composition comprising a fuel and one or more oxidizing agents in a solvent or solvent mixture, wherein the fuel and/or at least one of the oxidizing agent(s) comprise a metal salt comprising aluminum or cerium, and wherein the fuel and the one or more oxidizing agents are present in amounts to allow metal oxide formation and complete combustion of the fuel and fuel anions; and
annealing the thin film at a temperature less than or about 350° C. with or without exposure to a radiation source, thereby providing a metal oxide thin film dielectric and converting the fuel and fuel anions into CO 2 , H 2 O, and optionally, N 2 .

8. The method of claim 7 , wherein the electrically insulating metal oxide nanomaterial comprises Al 2 O 3 nanoparticles, ZrO 2 nanoparticles, or HfO 2 nanoparticles.

9. The method of claim 1 , further comprising providing a metal oxide thin film conductor, wherein providing the metal oxide thin film conductor comprises:
depositing a thin film from a nanomaterial dispersion comprising an electrically conducting metal oxide nanomaterial in a solvent or solvent mixture and a conductor binder composition comprising a fuel and one or more oxidizing agents in a solvent or solvent mixture, wherein the fuel and/or at least one of the oxidizing agent(s) comprise a metal salt, and wherein the fuel and the one or more oxidizing agents are present in amounts to allow metal oxide formation and complete combustion of the fuel and fuel anions; and
annealing the thin film at a temperature less than or about 350° C. with or without exposure to a radiation source, thereby providing a metal oxide thin film conductor and converting the fuel and fuel anions into CO 2 , H 2 O, and optionally, N 2 .

10. The method of claim 9 , wherein the electrically conducting metal oxide nanomaterial comprises ITO nanoparticles or ITO nanorods.

11. The method of claim 1 , wherein the solvent or solvent mixture in the binder composition comprises an alkoxyalcohol.

12. The method of claim 1 , wherein the annealing step is performed at a temperature of less than or about 250° C.

13. The method of claim 1 , wherein the annealing step is performed at a temperature of less than or about 150° C.

14. The method of claim 1 , further comprising providing a metal oxide thin film dielectric, wherein providing the metal oxide thin film dielectric comprises:
depositing a thin film from a dielectric precursor composition comprising a fuel and one or more oxidizing agents in a solvent or solvent mixture, wherein the fuel and/or at least one of the oxidizing agent(s) comprise a metal salt comprising zirconium or hafnium, and wherein the fuel and the one or more oxidizing agents are present in substantially stoichiometric amounts; and
annealing the thin film at a temperature less than or about 350° C. with or without exposure to a radiation source, to provide a metal oxide thin film dielectric.

15. The method of claim 1 , further comprising providing a metal oxide thin film conductor, wherein providing the metal oxide thin film conductor comprises:
depositing a thin film from a conductor precursor composition comprising a fuel and one or more oxidizing agents in a solvent or solvent mixture, wherein the fuel and/or at least one of the oxidizing agent(s) comprise a metal salt, and wherein the fuel and the one or more oxidizing agents are present in substantially stoichiometric amounts; and
annealing the thin film at a temperature less than or about 350° C. with or without exposure to a radiation source, to provide a metal oxide thin film conductor.

16. The method of claim 1 further comprising coupling the thin film semiconductor component comprising IGZO directly to an organic layer.

17. The method of claim 1 , wherein the depositing step is carried out by spin-coating, slot-coating, drop-casting, zone casting, dip coating, blade coating, spray-coating, rod coating, or stamping.

Assignees

• Univ Northwestern
• Polyera Corp
• Polyera Corp

Inventors

• Facchetti Antonio
• Marks Tobin J
• Kanatzidis Mercouri G
• Kim Myung-Gil
• Sheets William Christopher
• Yan He
• Xia Yu

Classifications

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P14/69396

  the material containing at least one rare earth metal element, e.g. oxides of lanthanides, scandium or yttrium · CPC title

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10P14/6938

  the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides · CPC title

• H10P14/6314

  of a metallic layer · CPC title