Workpiece transfer system

Patent metadata

Field	Value
Publication number	US-9412633-B2
Application number	US-201213982972-A
Country	US
Kind code	B2
Filing date	Nov 20, 2012
Priority date	Nov 23, 2011
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

The present application provides a workpiece transfer system in which a production efficiency of a production line to be used can be improved. For example, a workpiece transfer system 1 includes: robots 11 & 12 placed in front of process modules 4 & 6 for conducting a predetermined processing operation on a workpiece W, the robots 11 & 12 bringing the workpiece W into the process modules 4 & 6 and taking the workpiece W out of the process modules 4 & 6 ; a workpiece storage unit 13 for storing the workpiece W to be brought into the process modules 4 & 6 and the workpiece W taken out of the process modules 4 & 6 ; and a transfer mechanism 14 for transferring the workpiece storage unit 13 in a direction almost perpendicular to a direction of bringing in and taking out the workpiece W for the process modules 4 & 6.

First claim

What is claimed is:

1. A workpiece transfer system for use with a plurality of workpieces and at least one process module structured to conduct a predetermined processing operation on the workpiece, the workpiece transfer system comprising:
a workpiece storage unit structured to store the plurality of workpieces; and
a transfer mechanism structured to move the workpiece storage unit in a moving direction;
a plurality of robots arranged in the moving direction of the workpiece storage unit, each of the plurality of robots being structured to transfer a workpiece of the plurality of workpieces between the workpiece storage unit and one of the at least one process module, wherein a transfer direction of the workpiece between the workpiece storage unit and the one of the workpiece process module is approximately perpendicular to the moving direction;
wherein the workpiece storage unit is one of a plurality of workpiece storage units placed so as to be stacked in a vertical direction,
wherein the transfer mechanism is one of a plurality of transfer mechanisms structured to move each of the plurality of said workpiece storage units, and
a number of robots in the plurality of robots is equal to or greater than a number of workpiece storage units in the plurality of workplace storage units;
wherein each of the plurality of robots comprises:
an end effector structured to mount the workpiece, and
a lifting mechanism structured to lift up and down the end effector;

the plurality of said robots are placed in the moving direction of the workpiece storage units;
the plurality of said workpiece storage units are placed below the plurality of said robots; and
a lower limit position of each moving range of the end effector provided to each of the plurality of said robots is lowered in a stepwise manner in the transfer direction of the workpiece storage units, and the lower limit position is set according to an elevation of each of the plurality of said workpiece storage units.

2. The workpiece transfer system according to claim 1 ,
wherein the plurality of workpiece storage units is placed between the at least one process module and the plurality of robots, in the direction of bringing in and taking out the workpiece for the at least one process module.

3. The workpiece transfer system according to claim 1 ,
wherein the plurality of workpiece storage units moves through an area away from a working space of the plurality of robots.

Assignees

• Kaino Shigeyuki
• Nidec Sankyo Corp

Inventors

• Kaino Shigeyuki

Classifications

• H10P72/3411

  involving loading and unloading of wafers · CPC title

• H10P72/3306

  Horizontal transfer of a single workpiece · CPC title

• H10P72/3304

  characterised by movements or sequence of movements of transfer devices · CPC title

• H10P72/3222 Primary

  Loading to or unloading from a conveyor · CPC title

• H10P72/0456

  in-line arrangement · CPC title