High-resolution amplitude contrast imaging

Patent metadata

Field	Value
Publication number	US-9412558-B2
Application number	US-201414767796-A
Country	US
Kind code	B2
Filing date	Feb 14, 2014
Priority date	Feb 14, 2013
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

A method for performing high resolution electron microscopy of a soft matter object is described. The method comprises irradiating a soft matter object using an electron microscope having a spherical aberration correction with a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the soft matter object. The method comprises detecting the thermal diffuse scattered (TDS) electrons scattered at the soft matter, and using the detected thermal diffuse scattered electrons for deriving therefrom an image of the soft matter object.

First claim

The invention claimed is:

1. A method for performing high resolution electron microscopy of an object at atomic level resolution, the method comprising:
irradiating a soft matter object using an electron microscope having a spherical aberration correction;
detecting the thermal diffuse scattered electrons scattered at the object;

wherein the method comprises:
irradiating the soft matter object by a coherent electron source;
using the detected thermal diffuse scattered electrons for deriving therefrom an image of the object;
wherein the spherical aberration correction has a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the object, within a tolerance margin in the order of micrometers.

2. A method according to claim 1 , wherein the object is a soft matter object selected from the group consisting of proteins and polymers.

3. A method according to claim 1 , wherein the frequency band of thermal diffuse scattered electrons scattered at the object comprises the range between 0.5 Å−1 and 1.0 Å−1.

4. A method according to claim 1 , wherein the irradiating furthermore is performed using a small defocus.

5. A method according to claim 1 , wherein irradiating using a small defocus comprises irradiating using a small underfocus.

6. A method according to claim 1 , wherein the irradiating is performed using an annular dark field objective aperture.

7. A method according to claim 6 , wherein imaging using an annular dark field objective aperture comprises imaging using an annular dark field objective aperture having a substantially annular ring shape, wherein the annular ring shape has an inner and an outer radius, the inner and the outer radius selected such that thermal diffuse scattered electrons are selected for detection in the electron microscopy system.

8. A method according to claim 1 , wherein the object is a biological object.

9. A method according to claim 1 , wherein said performing high resolution electron microscopy comprises performing tomography.

10. A method according to claim 1 , wherein deriving an image comprises adding the incoherent contribution of each atom independently to the final image.

11. A method according to claim 10 , wherein deriving an image of the object based on the detected thermal diffuse scattered electrons comprises deriving independent sub-images based on the incoherent contribution of each atom.

12. A method according to claim 1 , wherein the method comprises tomographic imaging of particles of a three dimensional object, whereby particles having a different depth position in the object with respect to the imaging system resulting in a defocus smaller than a predetermined value, are imaged in the same imaging step using the same imaging conditions.

13. A method according to claim 12 , wherein the method comprises imaging particles having a different depth position in the object with respect to the imaging system resulting in a defocus larger than a predetermined value, in a separate imaging step using different imaging conditions taking into account the different defocus value.

14. A system for performing high resolution electron microscopy of an object at atomic level resolution, the system comprising:
an electron source;
a spherical aberration corrector;
a detector arranged for detecting the thermal diffuse scattered electrons scattered at the object;

wherein:
the electron source is a coherent electron source;
the spherical aberration corrector has a constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the object, within a tolerance margin in the order of micrometers;
an image processor for using the detected thermal diffuse scattered electrons for deriving based thereon an image of the object.

15. A system according to claim 14 , wherein the electron microscope has a substantially constant transfer function in range between 0.5 Å−1 and 1.0 Å−1.

16. A system according to claim 14 , the electron microscope furthermore comprising an annular dark field objective aperture.

17. A system according to claim 16 , wherein the annular dark field objective aperture has an annular ring shape with an inner radius and an outer radius, the inner and the outer radius selected such that thermal diffuse scattered electrons are selected for detection in the electron microscopy system.

18. Use of a system according to claim 14 for imaging a soft matter object.

19. Use according to claim 18 , for imaging a biological object.

20. An electron microscope image obtained using a method according to claim 1 .

Assignees

• Univ Antwerpen
• Fei Co

Inventors

• Van Dyck Dirk
• Lucken Uwe
• Stark Holger
• Bals Sara

Classifications

• G01N2223/0565

  diffraction of electrons, e.g. LEED · CPC title

• H01J2237/063

  Electron sources · CPC title

• G01N23/04 Primary

  and forming images of the material · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J37/06

  Electron sources; Electron guns · CPC title