Transmission electron microscope cells for use with liquid samples

Patent metadata

Field	Value
Publication number	US-9412556-B2
Application number	US-201414524866-A
Country	US
Kind code	B2
Filing date	Oct 27, 2014
Priority date	Oct 31, 2013
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

This disclosure provides systems, methods, and devices related to transmission electron microscopy cells for use with liquids. In one aspect a device includes a substrate, a first graphene layer, and a second graphene layer. The substrate has a first surface and a second surface. The first surface defines a first channel, a second channel, and an outlet channel. The first channel and the second channel are joined to the outlet channel. The outlet channel defines a viewport region forming a though hole in the substrate. The first graphene layer overlays the first surface of the substrate, including an interior area of the first channel, the second channel, and the outlet channel. The second graphene layer overlays the first surface of the substrate, including open regions defined by the first channel, the second channel, and the outlet channel.

First claim

What is claimed is:

1. A device comprising:
a substrate having a first surface and a second surface, a first channel, a second channel, and an outlet channel defined in the first surface of the substrate, the first channel and the second channel being joined to the outlet channel, the outlet channel proximate the first channel and the second channel defining a viewport region forming a through hole in the substrate;
a first graphene layer overlaying the first surface of the substrate, including surfaces of the first channel, the second channel, and the outlet channel; and
a second graphene layer overlaying the viewport region of the first surface of the substrate and open regions defined by the first channel, the second channel, and the outlet channel, the first graphene layer and the second graphene layer defining an open volume in the first channel, the second channel, and the outlet channel between the first and the second graphene layers.

2. The device of claim 1 , wherein the first channel includes a first inlet for a flow of a first liquid to the device, wherein the second channel includes a second inlet for a flow of a second liquid to the device, and wherein the outlet channel includes an outlet for a flow of a mixture of the first liquid and the second liquid from the device.

3. The device of claim 1 , wherein dimensions of the viewport region allow the first graphene layer and the second graphene layer to be mechanically stable.

4. The device of claim 1 , wherein a dielectric layer is disposed on the first surface of the substrate, including the surfaces of the first channel, the second channel, and the outlet channel.

5. The device of claim 4 , wherein the dielectric layer is selected from a group consisting of silicon dioxide, silicon nitride, and aluminum oxide.

6. The device of claim 4 , wherein the dielectric layer is about 5 nanometers to 500 nanometers thick.

7. The device of claim 4 , wherein a catalyst layer overlays the dielectric layer.

8. The device of claim 7 , wherein the catalyst layer comprises copper and is about 250 nanometers to 500 nanometers thick.

9. The device of claim 7 , wherein the catalyst layer comprises nickel and is at least about 300 nanometers thick.

10. The device of claim 4 , wherein a buffer layer is disposed on the dielectric layer, and wherein a catalyst layer is disposed on the buffer layer.

11. The device of claim 10 , wherein the buffer layer comprises alumina.

12. The device of claim 1 , wherein the substrate comprises a semiconductor substrate.

13. The device of claim 1 , wherein the first channel, the second channel, and the outlet channel have cross-sectional dimensions of about 10 nanometers to 100 microns.

14. The device of claim 1 , wherein the through hole in the substrate has dimensions of about 250 nanometers to 750 nanometers.

15. A device comprising:
a substrate having a first surface and a second surface, a first channel and an outlet channel defined in the first surface of the substrate, the first channel being joined to the outlet channel, the outlet channel proximate the first channel defining a viewport region forming through hole in the substrate;
a first graphene layer overlaying the first surface of the substrate, including surfaces of the first channel and the outlet channel; and
a second graphene layer overlaying the viewport region of the first surface of the substrate and open regions defined by the first channel and the outlet channel, the first graphene layer and the second graphene layer defining an open volume in the first channel and the outlet channel between the first and the second graphene layers.

16. The device of claim 15 , wherein the first channel includes a first inlet for a flow of a liquid to the device, and wherein the outlet channel includes an outlet for a flow of the liquid from the device.

17. The device of claim 1 , wherein the first channel is operable to direct a first liquid to the viewport region, wherein the second channel is operable to direct a second liquid to the viewport region, wherein the outlet channel is operable to accept a mixture of the first liquid and the second liquid from the viewport region, and wherein the first graphene layer and the second graphene layer are operable to prevent liquids from flowing to or from the viewport region except through the first channel, the second channel, and the outlet channel.

18. The device of claim 15 , wherein the first channel is operable to direct a flow of a liquid to the viewport region, wherein the outlet channel is operable to accept the flow of the liquid from the viewport region, and wherein the first graphene layer and the second graphene layer are operable to prevent liquid from flowing to or from the viewport region except through the first channel and the outlet channel.

19. The device of claim 15 , wherein a dielectric layer is disposed on the first surface of the substrate, including the surfaces of the first channel and the outlet channel.

20. A device comprising:
a substrate having a first surface and a second surface, a first channel, a second channel, and an outlet channel defined in the first surface of the substrate, the first channel and the second channel being joined to the outlet channel, the outlet channel proximate the first channel and the second channel defining a viewport region forming a through hole in the substrate;
a first graphene layer overlaying the first surface of the substrate, including surfaces of the first channel, the second channel, and the outlet channel; and
a second graphene layer overlaying the viewport region of the first surface of the substrate and open regions defined by the first channel, the second channel, and the outlet channel, the first graphene layer and the second graphene layer defining an open volume in the first channel, the second channel, and the outlet channel between the first and the second graphene layers, the first channel operable to direct a first liquid to the viewport region, the second channel operable to direct a second liquid to the viewport region, the outlet channel operable to accept a mixture of the first liquid and the second liquid from the viewport region, and the first graphene layer and the second graphene layer operable to prevent liquids from flowing to or from the viewport region except through the first channel, the second channel, and the outlet channel.

Assignees

• Khalid Waqas
• Alivisatos A Paul
• Zettl Alexander K
• Univ California

Inventors

• Khalid Waqas
• Alivisatos A Paul
• Zettl Alexander K

Classifications

• H10D62/8303

  Diamond · CPC title

• H10D62/882

  Graphene · CPC title

• H10D30/01

  Manufacture or treatment · CPC title

• H01J2237/2003

  Environmental cells · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title