Substrate processing apparatus and substrate processing method
US-2015270146-A1 · Sep 24, 2015 · US
US9409291B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9409291-B2 |
| Application number | US-201414526530-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 29, 2014 |
| Priority date | Nov 1, 2013 |
| Publication date | Aug 9, 2016 |
| Grant date | Aug 9, 2016 |
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Official abstract text for this publication.
A robot system according to an embodiment includes a sensor, an arm, and an instructor. The sensor is configured to detect an interface of a liquid. The arm includes a holding mechanism that holds a container containing the liquid. The instructor instructs the arm to cause the container to enter a sensing region of the sensor while holding the container, so as to cause the sensor to detect the interface.
Opening claim text (preview).
What is claimed is: 1. A robot system comprising: a sensor configured to detect an interface of a liquid; a first arm including a holding mechanism that holds a container containing the liquid; and an instructor that instructs the first arm to cause the container to enter a sensing region of the sensor while holding the container, so as to cause the sensor to detect the interface, the instructor instructs the first arm to cause the container to move so that the interface continuously exists in the sensing region in a case where the sensor detects a change in a height position of the interface. 2. The robot system according to claim 1 , further comprising: a second arm including a holding mechanism that holds a suction implement that sucks the liquid, wherein the instructor causes, while adjusting an operation of at least one of the first arm and the second arm so that a level of the interface is made approximately constant based on a detection result of the sensor, the suction implement to suck the liquid from the container. 3. The robot system according to claim 2 , wherein the suction implement is a pipette that includes a suction opening, a body that holds the liquid sucked, and a tail part that generates a negative pressure for sucking the liquid into the body by being depressed, and the container is a micro tube. 4. The robot system according to claim 3 , further comprising: a jig arranged against which the tail part is capable of being thrust, wherein the instructor operates the second arm so that the pipette is inserted into the micro tube in a state that the tail part is thrust against the jig to generate the negative pressure and the tail part thrust is gradually released so that the liquid is sucked and adjusts the operation of the first arm so that the level of the interface is made approximately constant according to the operation of the second arm. 5. The robot system according to claim 1 , wherein the interface to be detected by the sensor includes a separation interface formed in the liquid separated into two or more layers. 6. The robot system according to claim 2 , wherein the interface to be detected by the sensor includes a separation interface formed in the liquid separated into two or more layers. 7. The robot system according to claim 3 , wherein the interface to be detected by the sensor includes a separation interface formed in the liquid separated into two or more layers. 8. The robot system according to claim 4 , wherein the interface to be detected by the sensor includes a separation interface formed in the liquid separated into two or more layers. 9. A method for inspection, comprising: instructing a first arm including a holding mechanism that holds a container containing a liquid to cause the container to enter a sensing region of a sensor while holding the container; detecting an interface of the liquid in the container that has entered the sensing region; and instructing the first arm to cause the container to move so that the interface continuously exists in the sensing region in a case where the sensor detects a change in a height position of the interface. 10. A method for producing an inspection object, the method comprising: instructing a first arm including a holding mechanism that holds a container containing a liquid to cause the container to enter a sensing region of a sensor while holding the container; detecting an interface of the liquid in the container that has entered the sensing region; and instructing the first arm to cause the container to move so that the interface continuously exists in the sensing region in a case where the sensor detects a change in a height position of the interface. 11. A robot system comprising: a sensor configured to detect an interface of a liquid; a first arm including a holding mechanism that holds a container containing the liquid; an instructor that instructs the arm to cause the container to enter a sensing region of the sensor while holding the container, so as to cause the sensor to detect the interface; and a second arm including a bolding mechanism that holds a suction implement that sucks the liquid, wherein the instructor causes, while adjusting an operation of at least one of the first arm and the second arm so that a level of the interface is made approximately constant based on a detection result of the sensor, the suction implement to suck the liquid from the container.
Sensing device · CPC title
Closed loop, sensor feedback controls arm movement · CPC title
inspection · CPC title
Dual arm manipulator; Coordination of several manipulators · CPC title
characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion · CPC title
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