Radiation beam welding method, body and lithographic apparatus

Patent metadata

Field	Value
Publication number	US-9409251-B2
Application number	US-201213610689-A
Country	US
Kind code	B2
Filing date	Sep 11, 2012
Priority date	Oct 12, 2011
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

A method for radiation beam welding of a first member to a second member of a cooling body for an electromagnetic actuator. The first member on a side thereof comprises a surface portion provided with a recess, which is delimited by a periphery, and wherein the second member comprises a substantially continuous first surface portion complementary to the surface portion of the first member in order to close off the recess, the second member being provided with a second surface portion opposite to the first surface portion. The method comprising arranging the first and second member such that the first surface portion engages with the surface portion of the first member; providing a radiation beam, directing the radiation beam towards the second surface portion such that the first and second member are welded together at the periphery of the recess.

First claim

What is claimed is:

1. A method for forming cooling channels for cooling an electromagnetic actuator, the method comprising:
radiation beam welding first and second members together, wherein:
the first member comprises recessed regions formed on a first surface of the first member and edges formed between the first surface and sidewalls of the recessed regions, and
the second member comprises a second surface facing the first surface and a third surface opposite to the second surface; and

using substantially flat surfaces extending in horizontal plane as the first and second surfaces,
wherein:
the radiation beam welding comprises:
closing off the recessed regions with the second surface to form continuous cooling channels, and
forming a plurality of welds along the edges of the first member;

at least one pair of welds among the plurality of welds are displaced from each other by a portion of the first surface, the at least one pair of welds being adjacent to each other; and
at least another pair of welds among the plurality of welds are displaced from each other by one of the recessed regions, the at least another pair of welds being adjacent to each other.

2. The method according to claim 1 , further comprising using each weld of the plurality of welds to form a rounded transition between the first and second members.

3. The method according to claim 2 , further comprising using at least about 10 micrometer, at least about 25 micrometer, at least about 50 micrometer, or at least about 100 micrometer as a radius of curvature of the rounded transition.

4. The method according to claim 1 , further comprising using a laser beam as a radiation beam.

5. The method according to claim 1 , wherein the radiation beam welding further comprises directing a radiation beam onto the third surface.

6. The method according to claim 1 , further comprising using titanium, a titanium alloy, stainless steel, or aluminum for the first and second members.

7. The method according to claim 1 , further comprising using metal plates as the first and second members.

8. The method according to claim 1 , further comprising using a continuous recess-free surface as the second surface of the second member.

9. The method according to claim 1 , further comprising using each weld of the plurality of welds to form a continuous transition between the first, second, and third surfaces.

10. A method comprising:
radiation beam welding first and second metal plates together, wherein:
the first metal plate comprises recessed regions formed on a first surface of the first metal plate and edges formed between the first surface and sidewalk of the recessed regions, and
the second metal plate comprises a second surface facing the first surface and a third surface opposite to the second surface;

forming continuous cooling channels in the first metal plate using the recessed regions; and
using substantially flat surfaces extending in horizontal plane as the first and second surfaces,
wherein:
the radiation beam welding comprises forming a plurality of welds along the edges; and
at least one pair of welds among the plurality of welds are displaced from each other by a portion of the first surface, the at least one pair of welds being adjacent to each other.

11. The method according to claim 10 , further comprising using each weld of the plurality of welds to form a rounded transition between the first and second metal plates.

12. The method according to claim 10 , further comprising using titanium, a titanium alloy, stainless steel, or aluminum for the first and second metal plates.

13. The method according to claim 10 , further comprising using each weld of the plurality of welds to form a continuous transition between the first, second, and third surfaces.

14. The method according to claim 13 , wherein the radiation beam welding further comprises directing a radiation beam on the third surface.

15. The method according to claim 10 , wherein the radiation beam welding further comprises closing off the recessed regions with the second surface to form the continuous cooling channels.

16. The method according to claim 10 , further comprising using a continuous recess-free surface as the second surface of the second metal plate.

Assignees

• Vosters Petrus Mathijs Henricus
• Scholten Mark
• Malakhovskiy Ilya
• Cortenbach Martinus Josephus Theodorus Maria
• Asml Netherlands Bv

Inventors

• Vosters Petrus Mathijs Henricus
• Scholten Mark
• Malakhovskiy Ilya
• Cortenbach Martinus Josephus Theodorus Maria

Classifications

• B23K2101/36

  Electric or electronic devices · CPC title

• B23K15/0046

  Welding · CPC title

• B23K15/0006 Primary

  specially adapted for particular articles or work · CPC title

• Y10T403/477

  Fusion bond, e.g., weld, etc. · CPC title

• B23K26/244

  Overlap seam welding · CPC title