Coating method, and method of forming organic layer using the same

Patent metadata

Field	Value
Publication number	US-9406885-B2
Application number	US-201313961111-A
Country	US
Kind code	B2
Filing date	Aug 7, 2013
Priority date	Oct 28, 2009
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

A coating apparatus includes a stage supporting a coating target, a coating part on the stage, the coating part being configured to apply a coating material onto the coating target, and a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.

First claim

What is claimed is:

1. A coating method, comprising:
positioning a coating target on a stage in a coating apparatus;
applying a coating material onto the coating target using a coating part; and
supplying heat to the coating target, after applying the coating material onto the coating target, using a heating source, the heating source being opposite to and spaced apart from the stage in the coating apparatus,
wherein, immediately after completing application of the coating material onto the coating target, the coating material is maintained stationary until completion of the heat supplying, and
wherein the supplying of heat to the coating target includes moving the heating source along a vertical axis, the vertical axis being parallel to a normal to the stage.

2. The coating method as claimed in claim 1 , wherein the supplying of heat to the coating target includes supplying uniform heat simultaneously to the entire coating target.

3. The coating method as claimed in claim 2 , wherein the supplying of uniform hear simultaneously to the entire coating target includes irradiating uniform hear simultaneously from a heat generating source toward the entire coating target, the heat generating source being the heating source spaced apart from the stage.

4. The coating method as claimed in claim 3 , wherein the supplying of uniform heat simultaneously to the entire coating target includes irradiating the uniform heat from the heat generating source that completely overlaps the coating target.

5. The coating method as claimed in claim 2 , wherein the supplying of heat to the coating target includes supplying uniform heat simultaneously to the entire coating target directly from the heating source, the heating source being above and spaced apart from the coating target.

6. The coating method as claimed in claim 1 , wherein the applying of the coating material includes applying an organic emission material, an organic thin layer transistor material, and/or a solar cell material.

7. The coating method as claimed in claim 1 , wherein the supplying of heat to the coating target includes drying the coating material at a temperature of about 100° C. to about 200° C., while maintaining the coating material at a stationary state on the stage after application thereof.

8. The coating method as claimed in claim 1 , wherein the supplying of heat to the coating target includes using an infrared heater or a halogen lamp.

9. The coating method as claimed in claim 1 , wherein the supplying of heat to the coating target includes supplying the heat while both the target coating and the heating source are stationary.

10. The coating method as claimed in claim 1 , wherein the supplying of heat to the coating target includes moving the heating source only along the vertical axis.

11. The coating method as claimed in claim 1 , wherein the coating material is continuously maintained stationary on the coating target until both the application thereof onto the coating target and the heat supply are complete.

12. A method of forming an organic layer, comprising:
applying an organic material on a substrate using a coating part, the substrate being on a stage in a coating apparatus; and
supplying heat to the organic material and drying the organic material to form an organic layer using a heating source, after the organic material is applied, the heating source being opposite to and spaced apart from the stage in the coating apparatus,
wherein, immediately after completing application of the organic material on the substrate, the organic material is maintained stationary until formation of the organic layer is complete, and
wherein the supplying of heat to the coating target includes moving the heating source along a vertical axis, the vertical axis being parallel to a normal to the stage.

13. The method as claimed in claim 12 , wherein applying the organic material includes applying a material for forming an emission layer, a hole injection layer, a hole transport layer, an electron injection layer, and/or an electron transport layer of an organic light emitting diode.

14. The method as claimed in claim 12 , wherein supplying heat to the organic material includes drying the organic material at a temperature of about 100° C. to about 200° C.

15. The method as claimed in claim 12 , wherein supplying heat to the organic material includes supplying uniform heat simultaneously to the entire substrate to dry the organic material.

Assignees

• Park Jin-Han
• Nam Myeng-Woo
• Shin Eui-Shin
• Kim Sung-Gon
• Samsung Display Co Ltd

Inventors

• Park Jin-Han
• Nam Myeng-Woo
• Shin Eui-Shin
• Kim Sung-Gon

Classifications

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title

• H01L21/6715

  Electricity · mapped topic

• H01L51/0026 Primary

  Electricity · mapped topic