Utilization of angled trench for effective aspect ratio trapping of defects in strain relaxed heteroepitaxy of semiconductor films

Patent metadata

Field	Value
Publication number	US-9406507-B2
Application number	US-201514661495-A
Country	US
Kind code	B2
Filing date	Mar 18, 2015
Priority date	Apr 28, 2014
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

Embodiments of the present disclosure relate to reducing dislocation density in a heteroepitaxial growth film and devices including heteroepitaxial films with reduced dislocation density. According to embodiments of the present disclosure, sidewalls of high aspect ratio trenches may be tilted or angled to allow defects in crystalline material formed in the high aspect ratio trenches to be terminated in the tilted sidewalls, including defects propagating along the length of the high aspect ratio trenches. Embodiments of the present disclosure may be used to reduce defects in heteroepitaxial growth on silicon (Si) for microelectronic applications, such as high mobility channels using Group III-V elements in field effect transistors.

First claim

The invention claimed is:

1. A device, comprising:
a first crystalline material;
a non-crystalline layer formed over the first crystalline material, wherein an angled trench is formed through the non-crystalline layer so that the first crystalline material is at a bottom of the angled trench;
a second crystalline material formed in the angled trench by epitaxial growth, wherein the first crystalline material and the second crystalline material have mismatched lattice dimensions, and a projection of a sidewall of the angled trench on a top surface of the first crystalline material is longer than the bottom of the angled trench; and
a vertical portion of the second crystalline material extending above the angled trench, wherein the vertical portion of the second crystalline material has a width narrower than the angled trench.

2. The device of claim 1 , wherein an angle between the sidewall of the angled trench and the top surface of the first crystalline material is less than

tan

-
1

⁢

h
w

,

h represents a thickness of the non-crystalline layer, and w represents a width of the angled trench along the top surface of the first crystalline material.

3. The device of claim 1 , wherein the vertical portion is formed by etching the second crystalline material after epitaxial growth.

4. The device of claim 1 , wherein an interface between the first crystalline material and the second crystalline material shapes like a v-groove.

5. The device of claim 2 , wherein the angle is between about 11 degrees to about 45 degrees.

6. The device of claim 2 , wherein an aspect ratio, h/w, of the angled trench is set so that defects that are generated from the bottom of the angled trench and propagate along planes parallel to the width of the angled trench terminate at the sidewalls of the angled trench.

7. The device of claim 2 , wherein the first crystalline layer comprises silicon or doped silicon and the second crystalline material comprises binary or ternary material comprising a Group III element and a Group V element.

8. The device of claim 5 , wherein the angle is about 30 degrees.

9. The device of claim 7 , wherein the Group III element comprises one of gallium (Ga), aluminum (Al) and indium (In), and the Group V element comprises one of nitrogen (N), phosphorus (P), and arsenic (As).

10. The device of claim 7 , wherein the non-crystalline layer is a dielectric material.

11. The device of claim 7 , wherein the thickness h of the non-crystalline layer is less than about 100 nm, and the width w of the angled trench is between about 20 nm to about 40 nm.

12. The device of claim 10 , wherein the dielectric material comprises one of silicon nitride (SiN), silicon dioxide (SiO 2 ), and silicon oxynitride (SiON).

Assignees

• Applied Materials Inc

Inventors

• Srinivasan Swaminathan T
• Khaja Fareen Adeni
• Sanchez Errol Antonio C
• Martin Patrick M

Classifications

• H10P50/283

  by chemical means · CPC title

• H10P50/28

  of insulating materials · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6927

  the material being a silicon oxynitride, e.g. SiON or SiON:H · CPC title