Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
US-9223219-B2 · Dec 29, 2015 · US
US9405188B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9405188-B2 |
| Application number | US-201414445567-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 29, 2014 |
| Priority date | Dec 19, 2013 |
| Publication date | Aug 2, 2016 |
| Grant date | Aug 2, 2016 |
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Disclosed is a positive photosensitive resin composition including (A) an alkali soluble resin; (B) a photosensitive diazoquinone compound; (C) a cross-linking agent; (D) a thermal acid generator; (E) a phenol compound; and (F) an organic solvent, wherein the cross-linking agent and thermal acid generator are included in a weight ratio of about 1:50 to about 50:1.
Opening claim text (preview).
What is claimed is: 1. A positive photosensitive resin composition, comprising: (A) an alkali soluble resin; (B) a photosensitive diazoquinone compound; (C) a cross-linking agent; (D) a thermal acid generator; (E) a phenol compound; and (F) an organic solvent, wherein the cross-linking agent and thermal acid generator are included in a weight ratio of about 5:20 to about 20:5, and wherein the thermal acid generator comprises one or more compounds represented by the following Chemical Formulae 45 to 48: 2. The positive photosensitive resin composition of claim 1 , wherein the cross-linking agent is a melamine-based cross-linking agent, a methylol-based cross-linking agent, or a combination thereof. 3. The positive photosensitive resin composition of claim 1 , wherein the alkali soluble resin is a polybenzoxazole precursor, a polyimide precursor, or a combination thereof. 4. The positive photosensitive resin composition of claim 3 , wherein the polybenzoxazole precursor comprises a structure unit represented by the following Chemical Formula 1, and the polyimide precursor comprises a structure unit represented by the following Chemical Formula 2: wherein, in the above Chemical Formulae 1 and 2, each X 1 is the same or different and each is independently a substituted or unsubstituted C6 to C30 aromatic organic group, each X 2 is the same or different and each is independently a substituted or unsubstituted C6 to C30 aromatic organic group, a substituted or unsubstituted divalent to hexavalent C1 to C30 aliphatic organic group, or a substituted or unsubstituted divalent to hexavalent C3 to C30 alicyclic organic group, each Y 1 is the same or different and each is independently a substituted or unsubstituted C6 to C30 aromatic organic group, a substituted or unsubstituted divalent to hexavalent C1 to C30 aliphatic organic group, or a substituted or unsubstituted divalent to hexavalent C3 to C30 alicyclic organic group, and each Y 2 is the same or different and each is independently a substituted or unsubstituted C6 to C30 aromatic organic group, a substituted or unsubstituted quadrivalent to hexavalent C1 to C30 aliphatic organic group, or a substituted or unsubstituted quadrivalent to hexavalent C3 to C30 alicyclic organic group. 5. The positive photosensitive resin composition of claim 1 , wherein the thermal acid generator has a decomposition temperature of about 120° C. to about 200° C. 6. The positive photosensitive resin composition of claim 1 , wherein the positive photosensitive resin composition comprises: about 5 to about 100 parts by weight of the photosensitive diazoquinone compound (B); about 1 to about 50 parts by weight of the cross-linking agent (C); about 1 to about 50 parts by weight of the thermal acid generator (D); and about 1 to about 50 parts by weight of the phenol compound (E), each based on about 100 parts by weight of the alkali soluble resin (A), and about 3 to about 30 wt % of the organic solvent (F) based on the total solid amount of the positive photosensitive resin composition. 7. The positive photosensitive resin composition of claim 1 , further comprising a surfactant, a leveling agent, a silane coupling agent, or a combination thereof. 8. A photosensitive resin film manufactured using the positive photosensitive resin composition of claim 1 . 9. A display device comprising the photosensitive resin film of claim 8 .
Macromolecular quinonediazides; Macromolecular additives, e.g. binders {(G03F7/0226 takes precedence)} · CPC title
with silicon- containing groups in the side chains · CPC title
Polybenzoxazoles · CPC title
characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides · CPC title
characterised by the non-macromolecular additives · CPC title
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