Measuring apparatus, on-chip instrumentation device and measuring method
US-12181278-B2 · Dec 31, 2024 · US
US9404854B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9404854-B2 |
| Application number | US-201414520850-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 22, 2014 |
| Priority date | Oct 22, 2014 |
| Publication date | Aug 2, 2016 |
| Grant date | Aug 2, 2016 |
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Methods, systems and apparatuses are disclosed for interrogating characteristics of a substrate material surface and sub-surface by evaluating Terahertz output signals generated by non-Terahertz, optical source inputs.
Opening claim text (preview).
We claim: 1. A method for non-invasively evaluating a substrate material comprising the steps of: substantially simultaneously directing a first input beam of radiation having a first frequency from a first optical source and a second input beam of radiation having a second frequency from a second optical source to a predetermined area on a substrate material surface, with the first frequency differing from the second frequency by a predetermined amount; mixing the first input beam and the second input beam at the substrate material surface; producing second order and third order output signals in the THz regime from the substrate material; directing the second order output signal to a second order output signal detector to receive the second order output signal from the substrate material; directing the third order output signal to a third order output signal detector to receive the third order output signal from the substrate material; and measuring at least one characteristic of the substrate material based on the second output signal and third output signal received by the second order output signal detector and the third order output signal detector. 2. The method of claim 1 further comprising the steps of: directing a first/second-harmonic output signal to a first/second output signal detector positioned to receive a first/second-harmonic output signal from the first optical source; directing a second/second-harmonic output signal to a second/second-harmonic output detector positioned to receive a second/second-harmonic output signal from the second optical source; and measuring at least one characteristic of the substrate material based on the first/second-harmonic output signal received by the first/second-harmonic output signal detector and the second/second-harmonic output signal received by the second/second-harmonic output signal detector. 3. The method of claim 2 , wherein the first and second optical sources each comprise: a frequency controller; an intensity controller; and a bandwidth controller. 4. The method of claim 1 , wherein the first and second optical sources each comprise: a frequency controller; an intensity controller; and a bandwidth controller. 5. The method of claim 1 , wherein the first and second optical input beams are combined to create a surface difference frequency generation effect. 6. The method of claim 1 , wherein the first and second input beams differ from one another by a frequency difference that is substantially equal to a resonance in the substrate surface material. 7. The method of claim 1 , wherein the first and second optical input beams are combined to generate a CARS signal in the third order output signal. 8. The method of claim 1 , wherein at least one of the first and second optical sources is a laser. 9. The method of claim 1 , wherein the optical sources do not emit radiation in the THz range. 10. The method of claim 1 , wherein at least one optical source emits radiation to produce a second order signal and a third order signal, with the third order signal having a different surface phase-matching geometry relative to the second order signal. 11. The method of claim 10 , wherein the second order signal and the third order signal propagate from the predetermined area of the substrate material surface at differing angles. 12. A system for non-invasively evaluating a substrate material comprising: a substrate having a substrate material surface and a substrate material sub-surface; a plurality of optical sources, each optical source comprising a frequency controller, and intensity controller and a bandwidth controller, with each optical source positioned to direct a beam of radiation substantially simultaneously to a predetermined area on the substrate material surface, and wherein the beam of radiation from a first optical source and a second optical source are combined at the predetermined area on the substrate material surface; a second order signal detector positioned to receive second order signals from the predetermined area of the substrate material; and a third order detector, said third order detector positioned to receive third order signals from the predetermined area of the substrate material; wherein characteristics of the predetermined area of the substrate material are measured based on the characteristics of the output signals received by the second order detector and the third order detector. 13. The system of claim 12 , further comprising: a first/second-harmonic detector positioned to receive a first/second-harmonic output signal from the predetermined area of the substrate material surface, and a second/second-harmonic detector positioned to receive a second/second-harmonic output signal from the predetermined area of the substrate material. 14. The system of claim 13 , further comprising computer software and/or hardware configured to measure one or more properties of the substrate material based on an output beam received by a detector. 15. The system of claim 12 , wherein the second order signals and third order signals are propagated from the predetermined area of the substrate material at differing angles. 16. The system of claim 13 , wherein the first/second-harmonic output signals and the second/second-harmonic output signals propagate from the predetermined area of the substrate material at differing angles. 17. The system of claim 12 , wherein the optical sources do not emit radiation in the Terahertz wavelength range. 18. The system of claim 12 , wherein the first optical input beams and second optical input beams are combined at the predetermined area of the substrate material to create a surface difference frequency generation effect. 19. The system of claim 12 , wherein the first optical input beams and the second optical input beams differ from one another by a frequency difference that is substantially equal to a resonance in the substrate material. 20. The system of claim 12 , wherein the first and second optical input beams are combined to generate a CARS signal in the third order output signal. 21. The system of claim 12 , wherein at least one optical source emits radiation to produce a second order effect signal and a third order effect signal, with the third order effect signal having a different surface phase-matching geometry relative to the second order effect signal. 22. The system of claim 12 , further comprising computer software and/or hardware configured to measure one or more characteristics of the substrate material based on an output beam received by a detector. 23. A vehicle comprising a substrate material surface and a substrate material sub-surface, wherein at least a portion of the substrate material surface or substrate material sub-surface is interrogated by: substantially simultaneously directing a first input beam of radiation having a first frequency from the first optical source and a second input beam of radiation having a second frequency from the second optical source to a predetermined area on a substrate material surface, with the first frequency differing from the second frequency by a predetermined amount; mixing the first input beam and the second input beam at the substrate material surface; producing second order and third order output signals in the THz regime from the substrate material; directing the second order output signal to a second order output signal detector to receive the second order output s
Raman scattering · CPC title
Coherent sources; lasers · CPC title
Coherent methods [CARS] · CPC title
using far infrared light; using Terahertz radiation · CPC title
using an arrangement of pump beam and probe beam; using the measurement of optical non-linear properties; (non-linear optics per se G02F1/35) · CPC title
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