Precision vibration-isolation system with floor feedforward assistance
US-2024133443-A1 · Apr 25, 2024 · US
US9404549B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9404549-B2 |
| Application number | US-77418410-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 5, 2010 |
| Priority date | Nov 4, 2008 |
| Publication date | Aug 2, 2016 |
| Grant date | Aug 2, 2016 |
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An electromagnetic inertial actuator includes a support base and a parallel arrangement of a first flexure part, a voice coil motor part, and a second flexure part. The parallel arrangement is cantilevered from the support base.
Opening claim text (preview).
What is claimed is: 1. An electromagnetic inertial actuator ( 1 ) in electronic communication with a controller ( 65 ), comprising: a support base ( 3 ); a parallel arrangement of a first flexure part ( 7 ), a voice coil motor part ( 9 ), and a second flexure part ( 11 ), the parallel arrangement being cantilevered from the support base ( 3 ), the first flexure part ( 7 ) and the second flexure part ( 11 ) each comprise an upper and lower flexure part ( 7 , 11 ), wherein the first upper and lower flexure parts ( 7 ) are each comprised of a first flexure stack ( 50 ) and the second upper and lower flexure parts ( 11 ) are each comprised of a second flexure stack ( 50 ); a first clamp ( 58 ) engaged with the first end ( 8 ) of the first flexure stack ( 50 ) and a second clamp ( 58 ) engaged with the first end ( 12 ) of the second flexure stack ( 50 ), each of the first clamp ( 58 ) and the second clamp ( 58 ) being attached to the support base ( 3 ) at a plurality of points, thereby coupling first ends ( 8 , 12 ) of the first and second flexure parts ( 7 , 11 ) to the support base ( 3 ); a third clamp ( 58 ) engaged with a second end ( 10 ) of the first flexure stack ( 50 ) and a fourth clamp ( 58 ) engaged with the second end ( 14 ) of the second flexure stack ( 50 ), each of the third clamp ( 58 ) and the fourth clamp ( 58 ) being attached to a yoke ( 39 ) at a plurality of points, thereby coupling the second ends ( 10 , 14 ) of the first and second flexure stacks ( 50 ) to the yoke ( 13 ); a yoke ( 49 ) coupled to a magnet part ( 13 ) and to the second end ( 10 ) of the first flexure stack ( 50 ) and a second end ( 14 ) of the second flexure stack ( 50 ), thereby coupling second ends ( 10 , 14 ) of the of the flexure parts ( 50 ) to the magnet part ( 13 ); wherein the voice coil motor part ( 9 ) comprises the magnet part ( 13 ) and a coil part ( 15 ), the magnet part ( 13 ) comprising a plurality of permanent magnets ( 17 , 19 , 21 , 23 ), the coil part comprising a coil ( 41 ); wherein each of the upper and lower flexure parts ( 7 , 11 ) has opposing first ( 8 , 12 ) and second ends ( 10 , 14 ), the first ends ( 8 , 12 ) being coupled to the support base ( 3 ), the second ends ( 10 , 14 ) being coupled to the magnet part ( 13 ); wherein the magnet part ( 13 ) further comprises ferromagnetic material ( 31 , 33 , 35 , 37 , 39 ) disposed adjacent to each of the permanent magnets ( 17 , 19 , 21 , 23 ); wherein the permanent magnets ( 17 , 19 , 21 , 23 ) define at least one gap ( 25 , 27 ) for receiving the coil ( 41 ); wherein distal ends of the magnet part ( 13 ) and coil ( 41 ) define an adjustable gap ( 47 ) to accommodate arc motion of the parallel arrangement relative to the support base ( 3 ) when the electromagnetic inertial actuator ( 1 ) is driven; and wherein the controller ( 65 ) is configured to communicate an electronic signal to the electromagnetic inertial actuator ( 1 ) and thereby drive the voice coil ( 9 ) magnet part ( 13 ) to move relative to base ( 3 ) and create a vibration. 2. The electromagnetic inertial actuators of claim 1 , wherein each of the permanent magnets is flat. 3. The electromagnetic inertial actuator of claim 1 , wherein each of the permanent magnets has a rectangular or triangular cross-section. 4. The electromagnetic inertial actuator of claim 1 , wherein the permanent magnets define two parallel gaps for receiving the coil. 5. The electromagnetic inertial actuator of claim 1 , wherein the first flexure part comprises a plurality of first flexure stacks and the second flexure part comprises a plurality of second flexure stacks with said yoke in between said first flexure stacks and in between said second flexure stacks. 6. The electromagnetic inertial actuator of claim 1 , wherein each of the first flexure stack and second flexure stack comprises a plurality of flexures interleaved with a plurality of shims. 7. The electromagnetic inertial actuator of claim 6 , wherein the flexures are composite flexures and the bonded elastomeric end shims are configured to inhibit fretting. 8. The electromagnetic inertial actuator of claim 1 , wherein the coil is physically grounded to the support base.
characterised by shape or design of individual leaves (F16F1/22 takes precedence) · CPC title
Spring making · CPC title
the steel spring being in contact with the rubber spring {(F16F1/12 takes precedence)} · CPC title
the inertia member being resiliently mounted {(F16F7/1022 takes precedence)} · CPC title
with layers, e.g. anti-friction layers, or with rollers between the leaves · CPC title
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