Diagnostic and control systems and methods for substrate processing systems using DC self-bias voltage

Patent metadata

Field	Value
Publication number	US-9404183-B2
Application number	US-201313912256-A
Country	US
Kind code	B2
Filing date	Jun 7, 2013
Priority date	Jun 8, 2012
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

A substrate processing system includes a processing chamber including a showerhead, a plasma power source and a pedestal spaced from the showerhead to support a substrate. A filter is connected between the showerhead and the pedestal. A variable bleed current circuit is connected between the filter and the pedestal to vary a bleed current. A controller is configured to adjust a value of the bleed current and configured to perform curve fitting based on the bleed current and DC self-bias voltage to estimate at least one of electrode area ratio, Bohm current, and radio frequency (RF) voltage at a powered electrode.

First claim

What is claimed is:

1. A substrate processing system, comprising:
a processing chamber including a showerhead, a plasma power source and a pedestal spaced from the showerhead to support a substrate;
a filter connected between the showerhead and the pedestal;
a variable bleed current circuit connected between the filter and the pedestal to vary a bleed current; and
a controller configured to adjust a value of the bleed current and configured to perform curve fitting based on the bleed current and DC self-bias voltage to estimate at least one of electrode area ratio, Bohm current, and radio frequency (RF) voltage at a powered electrode.

2. The substrate processing system of claim 1 , wherein the variable bleed current circuit comprises a variable resistor circuit.

3. The substrate processing system of claim 2 , further comprising a current sensor to sense bleed current flowing through the variable resistor circuit.

4. The substrate processing system of claim 2 , wherein the controller is configured to vary a resistance of the variable resistor circuit to N values and to record N pairs of the bleed current and the DC self-bias voltage, wherein N is an integer greater than one.

5. The substrate processing system of claim 4 , wherein the controller is configured to perform the curve fitting based on the N values of the bleed current and the DC self-bias voltage.

6. The substrate processing system of claim 1 , wherein the variable bleed current circuit comprises a variable current source.

7. The substrate processing system of claim 6 , wherein the controller is configured to vary current supplied by the variable current source to N values and to record N pairs of the bleed current and the DC self-bias voltage, wherein N is an integer greater than one.

8. The substrate processing system of claim 7 , wherein the controller is configured to perform the curve fitting based on the N values of the bleed current and the DC self-bias voltage.

9. The substrate processing system of claim 1 , wherein the substrate processing system performs deposition and wherein the controller is configured to adjust a deposition operating parameter of the substrate processing system based on the at least one of the electrode area ratio, the Bohm current, and the radio frequency (RF) voltage at the powered electrode.

10. The substrate processing system of claim 1 , wherein the controller is configured to perform diagnostics on the substrate processing system based on the at least one of the electrode area ratio, the Bohm current, and the radio frequency (RF) voltage at the powered electrode.

11. The substrate processing system of claim 1 , wherein the filter is configured to block radio frequency signals and to pass DC signals.

12. The substrate processing system of claim 1 , wherein the substrate processing system generates plasma using capacitive coupling.

13. The substrate processing system of claim 1 , wherein the plasma power source is coupled to the showerhead and wherein the pedestal is connected to ground.

14. The substrate processing system of claim 1 , wherein the controller is configured to estimate the Bohm current and to estimate plasma density from the Bohm current.

15. The substrate processing system of claim 14 , wherein the controller is configured to adjust a deposition operating parameter of the substrate processing system based on the plasma density.

16. The substrate processing system of claim 1 , further comprising a voltage sensor circuit connected between the filter and the pedestal to measure the DC self-bias voltage.

17. A substrate processing system, comprising:
a processing chamber including a showerhead, a plasma power source and a pedestal spaced from the showerhead to support a substrate;
a filter connected between the showerhead and the pedestal;
a resistance circuit connected between the filter and the pedestal to vary a bleed current; and
a controller configured to trigger a step change in a value of the bleed current, to monitor changes in a DC self-bias voltage to determine a time constant and to perform at least one of diagnostics and control of the substrate processing system based on the time constant.

18. The substrate processing system of claim 17 , further comprising a voltage sensor circuit connected between the filter and the pedestal to measure the DC self-bias voltage.

Assignees

• Novellus Systems Inc

Inventors

• Augustyniak Edward
• Keil Douglas

Classifications

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• H01J37/32128

  using particular waveforms, e.g. polarised waves · CPC title

• H01J37/32183

  Matching circuits · CPC title

• H01J37/32917

  Plasma diagnostics · CPC title

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title