Rare earth oxide-containing sprayed plate and making method

Patent metadata

Field	Value
Publication number	US-9404171-B2
Application number	US-12294708-A
Country	US
Kind code	B2
Filing date	May 19, 2008
Priority date	May 21, 2007
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

A rare earth oxide-containing sprayed plate is prepared by thermally spraying a rare earth oxide on a support to a thickness of up to 5 mm and peeling the sprayed coating from the support. Thin plates of rare earth oxide ceramics can be prepared without molding, firing and sintering steps.

First claim

The invention claimed is:

1. A plate consisting of one or more thermally sprayed layers comprising 30 weight % or more rare earth oxide, wherein the plate has a thickness from 2.0 mm to 5 mm and a warpage of less than 0.5 mm, wherein the plate has a shape selected from the group consisting of tetragonal, pentagonal and polygonal shapes, disc shapes, elliptic shapes, triangular shapes, and rings of these shapes having a center opening, and having a volume of 50 to 2,000 cm 3 .

2. The plate of claim 1 , wherein one or more of the thermally sprayed layers further comprise oxide of Group 3B metal element.

3. The plate of claim 1 , wherein one or more of the thermally sprayed layers comprise 30-90 weight % rare earth oxide.

4. The plate of claim 1 , wherein one or more of the thermally sprayed layers comprise 30-80 weight % rare earth oxide.

5. The plate of claim 1 , wherein the plate has a thickness in the range from 1.2 mm to 4 mm.

6. The plate of claim 1 , wherein the rare earth oxide is yttrium oxide.

7. The plate of claim 1 , wherein the rare earth oxide is erbium oxide.

8. The plate of claim 1 , wherein the plate has a volume of 100 to 1,000 cm 3 .

9. A method for preparing a plate according to claim 1 , comprising thermally spraying a rare earth-based oxide on a support to form a coating having a thickness from 1.2 mm to 5 mm, and peeling the sprayed coating from the support.

10. The method of claim 9 wherein the support comprises carbon.

11. The method of claim 9 wherein the peeling step is spontaneous peeling.

12. The method of claim 9 , wherein the sprayed coating peeled from the support has an inner surface as peeled from the support and an outer surface remote therefrom, and the method further comprises the step of thermally spraying a rare earth-based oxide on the inner and/or outer surface of the sprayed coating.

13. A method for preparing a laminate, comprising thermally spraying a metal or metal compound on a surface of the sprayed plate obtained by the method of claim 9 .

14. A laminated plate consisting of:
one or more thermally sprayed layers comprising 30 weight % or more rare earth oxide having a thickness at least 1.2 mm; and
one or more thermally sprayed layers of metal or metal compound having a thickness at least 0.7 mm,
wherein the laminated plate has a thickness from 1.9 mm to 5 mm and a warpage of less than 0.5 mm, having a shape selected from the group consisting of tetragonal, pentagonal and polygonal shapes, disc shapes, elliptic shapes, triangular shapes, and rings of these shapes having a center opening, and having a volume of 50 to 2,000 cm 3 .

15. The laminated plate of claim 14 , wherein one or more of the thermally sprayed layers further comprise oxide of Group 3B metal element.

16. The laminated plate of claim 14 , wherein one or more of the thermally sprayed layers comprise 30-90 weight % rare earth oxide.

17. The laminated plate of claim 14 , wherein one or more of the thermally sprayed layers comprise 30-80 weight % rare earth oxide.

18. The laminated plate of claim 14 , wherein the laminated plate has a thickness in the range from 1.9 mm to 4 mm.

19. The plate of claim 14 , wherein the laminated plate has a volume of 100 to 1,000 cm 3 .

20. A plate consisting of one or more thermally sprayed layers comprising 30 weight % or more rare earth oxide, wherein the plate has a thickness from 2.0 mm to 5 mm and a warpage of less than 0.5 mm, wherein the plate has a shape selected from the group consisting of tetragonal, pentagonal and polygonal shapes, disc shapes, elliptic shapes, triangular shapes, and rings of these shapes having a center opening, and having a volume of 50 to 2,000 cm 3 , wherein the plate was obtained by thermally spraying a rare earth-based oxide on a support and peeling the sprayed coating from the support.

21. The plate of claim 20 , wherein the plate was obtained by thermally spraying a rare earth-based oxide on a carbon support and peeling the sprayed coating from the support.

Assignees

• Hamaya Noriaki
• Nakamura Koji
• Iida Ryoji
• Shinetsu Chemical Co

Inventors

• Hamaya Noriaki
• Nakamura Koji
• Iida Ryoji

Classifications

• C23C4/06 Primary

  Metallic material · CPC title

• C23C4/11

  Oxides · CPC title

• C23C4/185

  Separation of the coating from the substrate · CPC title

• Y10T428/26

  Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension · CPC title

• B32B15/00

  Layered products comprising {a layer of} metal · CPC title