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Thin-film piezoelectric material element, method of manufacturing the same, head gimbal assembly, hard disk drive, ink jet head, variable focus lens and sensor
US9401469B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9401469-B2 |
| Application number | US-201514591114-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 7, 2015 |
| Priority date | Sep 29, 2014 |
| Publication date | Jul 26, 2016 |
| Grant date | Jul 26, 2016 |
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- Title
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Abstract
Official abstract text for this publication.
A thin-film piezoelectric material element includes a lower electrode film, a piezoelectric material film, and an upper electrode film, the lower electrode film, the piezoelectric material film and the upper electrode film are laminated sequentially. An upper surface of the piezoelectric material film is a concavity and convexity surface having a convex part and a concave part, the convex part is a curved surface convexly projected, and the concave part is a curved surface concavely hollowed, the upper electrode film is formed on the concavity and convexity surface. The thin-film piezoelectric material element has a stress balancing film formed with a material having an internal stress capable of cancelling an element stress, the stress balancing film is formed on the upper electrode film.
First claim
Opening claim text (preview).
What is claimed is: 1. A thin-film piezoelectric material element comprising: a lower electrode film; a piezoelectric material film; and an upper electrode film; wherein the lower electrode film, the piezoelectric material film and the upper electrode film are laminated sequentially; wherein the piezoelectric material film has an upper surface of the upper electrode film side, and the upper surface is a concavity and convexity surface having a convex part and a concave par…
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Physics · mapped topic
Operations & Transport · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9401469B2 cover?
- A thin-film piezoelectric material element includes a lower electrode film, a piezoelectric material film, and an upper electrode film, the lower electrode film, the piezoelectric material film and the upper electrode film are laminated sequentially. An upper surface of the piezoelectric material film is a concavity and convexity surface having a convex part and a concave part, the convex part …
- Who is the assignee on this patent?
- Sae Magnetics Hk Ltd
- What technology area does this patent fall under?
- Primary CPC classification B41J2/14233. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Jul 26 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).