Capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate
US-2015372167-A1 · Dec 24, 2015 · US
US9401442B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9401442-B2 |
| Application number | US-201113223351-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 1, 2011 |
| Priority date | Sep 1, 2010 |
| Publication date | Jul 26, 2016 |
| Grant date | Jul 26, 2016 |
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A three-dimensional, microscale-textured, grating-shaped organic solar cell geometry. The solar cells are fabricated on gratings to give them a three-dimensional texture that provides enhanced light absorption. Introduction of microscale texturing has a positive effect on the overall power conversion efficiency of the devices. This grating-based solar cell having a grating of pre-determined pitch and height has shown improved power-conversion efficiency over a conventional flat solar cell. The improvement in efficiency is accomplished by homogeneous coverage of the grating with uniform thickness of the active layer, which is attributed to a sufficiently high pitch and low height of the underlying gratings. Also the microscale texturing leads to suppressed reflection of incident light due to the efficient coupling of the incident light into modes that are guided in the active layer.
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What is claimed is: 1. A solar cell, comprising: a first electrode deposited onto a transparent substrate; a grating material deposited directly onto the first electrode; an active layer deposited onto the grating, the active layer configured to convert photonic energy into electrical energy; and a second electrode deposited onto the active layer; wherein the grating is configured to enhance light absorption by the active layer. 2. The solar cell of claim 1 , further comprising a transparent, electrically-conducting layer disposed between the grating and the active layer, the transparent, electrically-conducting layer provided to improve the electrical connection between the active layer and the first electrode. 3. The solar cell of claim 2 , wherein the transparent, electrically-conducting layer comprises indium tin oxide. 4. The solar cell of claim 3 , wherein the thickness of the transparent, electrically-conducting layer ranges from 50 nanometers (nm) to 120 nm. 5. The solar cell of claim 3 , wherein the transparent, electrically-conducting layer is a sputtered transparent, electrically-conducting layer. 6. The solar cell of claim 2 , further comprising a hole-conducting film disposed between the transparent, electrically-conducting layer and the active layer. 7. The solar cell of claim 6 , wherein the hole-conducting film comprises poly(3,4-ethylenedioxythiophene) (PEDOT) doped with poly(styrenesulfonate) (PSS). 8. The solar cell of claim 1 , wherein the grating is a periodic structure having a generally crenellated configuration. 9. The solar cell of claim 8 , wherein a distance between a first edge of one high portion and a corresponding first edge of an adjacent high portion is greater than one micron. 10. The solar cell of claim 8 , wherein a distance between a first edge of one high portion and a corresponding first edge of an adjacent high portion is approximately two microns. 11. The solar cell of claim 8 , wherein a difference in height between a high portion and a neighboring low portion is approximately 300 nm. 12. The solar cell of claim 8 , wherein a difference in height between a high portion and a neighboring low portion is less than 500 nm. 13. The solar cell of claim 8 , wherein the grating is formed by depositing an evenly-spaced series of rails onto a surface of the first electrode. 14. The solar cell of claim 13 , wherein each of the series of rails is made from photoresist. 15. The solar cell of claim 1 , wherein the active layer comprises a bulk heterojunction organic photovoltaic material. 16. The solar cell of claim 15 , wherein the active layer comprises a blend of poly(3-hexylthiophene) (P3HT) and [6,6]-phenyl-C61-butyric acid methyl ester (PCBM). 17. The solar cell of claim 1 , wherein the first electrode comprises a layer of indium tin oxide. 18. The solar cell of claim 1 , wherein the second electrode comprises a layer of aluminum. 19. The solar cell of claim 18 , wherein a thickness of the second electrode is approximately 100 nm. 20. An organic solar cell, comprising: a transparent substrate having a transparent electrode attached thereto; a periodic grating structure deposited directly onto the transparent electrode and disposed between the transparent electrode and a conductive layer; an organic photovoltaic layer formed onto the conductive layer; and a second electrode attached to the organic photovoltaic layer; wherein the periodic grating structure is configured to increase the power conversion efficiency of the solar cell by scattering incident light. 21. The organic solar cell of claim 20 , wherein the periodic grating structure has a pitch of approximately two microns and a height of less than 500 nanometers. 22. The organic solar cell of claim 21 , wherein the periodic grating structure comprises a series of rails attached to a surface of the transparent electrode, and wherein each of the series of rails is made from photoresist. 23. The organic solar cell of claim 20 , further comprising a hole-conducting film disposed between the organic photovoltaic layer and the conductive layer, wherein the conductive layer comprises a layer of indium-tin oxide having a thickness in the range of 50 nm to 120 nm. 24. The organic solar cell of claim 23 , wherein the hole-conducting film comprises PEDOT doped with PSS, and wherein the organic photovoltaic layer comprises a blend of poly(3-hexylthiophene) (P3HT) and [6,6]-phenyl-C61-butyric acid methyl ester (PCBM). 25. The organic solar cell of claim 20 , wherein the transparent electrode comprises a layer of indium tin oxide, and wherein the second electrode comprises a metal or metal alloy.
Photovoltaic [PV] devices · CPC title
comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains · CPC title
Surface textures, e.g. pyramid structures · CPC title
Electricity · mapped topic
Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title
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