Atomic layer deposition of silicon carbon nitride based materials

Patent metadata

Field	Value
Publication number	US-9401273-B2
Application number	US-201414566491-A
Country	US
Kind code	B2
Filing date	Dec 10, 2014
Priority date	Dec 11, 2013
Publication date	Jul 26, 2016
Grant date	Jul 26, 2016

Abstract

A process for depositing a silicon carbon nitride film on a substrate can include a plurality of complete deposition cycles, each complete deposition cycle having a SiN sub-cycle and a SiCN sub-cycle. The SiN sub-cycle can include alternately and sequentially contacting the substrate with a silicon precursor and a SiN sub-cycle nitrogen precursor. The SiCN sub-cycle can include alternately and sequentially contacting the substrate with carbon-containing precursor and a SiCN sub-cycle nitrogen precursor. The SiN sub-cycle and the SiCN sub-cycle can include atomic layer deposition (ALD). The process for depositing the silicon carbon nitride film can include a plasma treatment. The plasma treatment can follow a completed plurality of complete deposition cycles.

First claim

What is claimed is:

1. A process for depositing a silicon carbon nitride film on a substrate in a reaction space, the process comprising a plurality of complete deposition cycles, each complete deposition cycle comprising:
performing a SiN sub-cycle, wherein the SiN sub-cycle forms silicon nitride on the substrate, and wherein the SiN sub-cycle comprises alternately and sequentially contacting the substrate with a silicon precursor and a SiN sub-cycle nitrogen precursor to form the silicon nitride on the substrate;
performing a SiCN sub-cycle, wherein the SiCN sub-cycle forms silicon carbon nitride on the substrate, and wherein the SiCN sub-cycle comprises alternately and sequentially contacting the substrate with a precursor comprising silicon and carbon and a SiCN sub-cycle nitrogen precursor to form the silicon carbon nitride on the substrate; and
purging the reaction space, or removing at least one of excess precursors and reaction byproducts from the reaction space, after at least one of contacting the substrate with the silicon precursor, contacting the substrate with the SiN sub-cycle nitrogen precursor, contacting the substrate with the precursor comprising silicon and carbon and contacting the substrate with the SiCN sub-cycle nitrogen precursor.

2. The process of claim 1 , further comprising exposing the silicon carbon nitride film to a plasma treatment.

3. The process of claim 2 , wherein the plasma treatment follows completion of one or more of the plurality of complete deposition cycles.

4. The process of claim 2 , wherein a reactant gas of the plasma treatment comprises at least one of hydrogen gas (H 2 ), nitrogen gas (N 2 ) and argon (Ar).

5. The process of claim 2 , wherein the plasma treatment is performed for a duration of at least 10 minutes.

6. The process of claim 2 , wherein the plasma treatment can be repeated a number of times.

7. The process of claim 1 , wherein the SiCN sub-cycle and the SiN sub-cycle are carried out at a ratio of at least 2 in at least one of the plurality of complete-cycles.

8. The process of claim 1 , wherein the SiN sub-cycle and the SiCN sub-cycle comprise an atomic layer deposition (ALD) process.

9. The process of claim 1 , wherein at least one of the SiN sub-cycle nitrogen precursor and the SiCN sub-cycle nitrogen precursor comprises ammonia (NH 3 ).

10. The process of claim 1 , wherein the precursor comprising silicon and carbon comprises a —Si—R—Si— group, wherein R comprises a C 1 -C 8 hydrocarbon.

11. The process of claim 1 , wherein the precursor comprising silicon and carbon comprises at least one of bis(trichlorosilyl)methane (BTCSMe) and 1,2-bis(trichlorosilyl)ethane (BTCSEt).

12. A process for forming a silicon carbon nitride film, comprising:
depositing the silicon carbon nitride film on a substrate, wherein depositing the silicon carbon nitride film comprises:
performing at least one SiCN deposition cycle, the at least one SiCN deposition cycle including alternately and sequentially contacting the substrate with a precursor comprising silicon and carbon and a SiCN deposition cycle nitrogen precursor; and
performing a SiN deposition cycle, the SiN deposition cycle including alternately and sequentially contacting the substrate with a silicon precursor and a SiN deposition cycle nitrogen precursor;

exposing the silicon carbon nitride film to a hydrogen-containing plasma,
wherein the silicon carbon nitride film is formed over a three-dimensional structure having a sidewall region and a top region, and
wherein subsequent to exposing the silicon carbon nitride film to the hydrogen-containing plasma, a ratio of a wet etch rate of the sidewall region to a wet etch rate of the top region of the silicon carbon nitride film is less than 3 in a dilute aqueous solution of hydrofluoric acid having a concentration of 0.5 weight %.

13. The process of claim 12 , wherein the precursor comprising silicon and carbon comprises a —Si—R—Si— group, wherein R comprises a C 1 -C 8 hydrocarbon.

14. The process of claim 12 , further comprising exposing the silicon carbon nitride film to the hydrogen-containing plasma between the at least one SiCN deposition cycle and the SiN deposition cycle.

15. The process of claim 12 , wherein exposing the silicon carbon nitride film to the hydrogen-containing plasma comprises a plurality of cycles, wherein each of the plurality of cycles comprises a sequence of plasma on and plasma off.

16. The process of claim 12 , wherein a reactant gas for the hydrogen-containing plasma consists of hydrogen gas (H 2 ) and a noble gas.

17. The process of claim 12 , wherein exposing the silicon carbon nitride film to the hydrogen-containing plasma is performed for a duration of at least 10 minutes.

Assignees

• Asm Ip Holding Bv

Inventors

• Pore Viljami

Classifications

• H10P50/283

  by chemical means · CPC title

• H10P14/6682

  the compound being a silane, e.g. disilane, methylsilane or chlorosilane · CPC title

• H10P14/6681

  the precursor containing a compound comprising Si · CPC title

• H10P14/6532

  by exposure to a plasma · CPC title

• H10P14/6339

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title