Method of manufacturing fine structure body and fine structure mold

Patent metadata

Field	Value
Publication number	US-9400427-B2
Application number	US-201213821379-A
Country	US
Kind code	B2
Filing date	Apr 26, 2012
Priority date	Jun 3, 2011
Publication date	Jul 26, 2016
Grant date	Jul 26, 2016

Abstract

The present invention is a method of manufacturing a fine structure body which manufactures the fine structure body by repeating a basic fine structure body forming step that forms a basic fine structure body by pressing a fine structure mold against a curable resin (photocurable resin film) on a surface of a base material and a release and moving step that releases the fine structure mold from the base material and moves the fine structure mold, wherein the fine structure mold includes at least a first mold depression pattern which is disposed at center area of it, and a second mold depression pattern which is disposed in at least one side part in circumference area of it, and a size of the second mold depression pattern is smaller than a size of the first mold depression pattern.

First claim

What is claimed is:

1. A method of manufacturing a fine structure body which manufactures the fine structure body by repeating (i) a basic fine structure body forming step that forms a basic fine structure body by pressing a fine structure mold against a curable resin on a surface of a base material and (ii) a release and moving step that releases the fine structure mold from the base material and moves the fine structure mold, wherein
the fine structure mold includes a planar mold surface and at least a first mold depression pattern which is disposed at a center area of the planar mold surface, and a second mold depression pattern which is disposed in at least one side part of the planar mold surface,
a size of the second mold depression pattern is smaller than a size of the first mold depression pattern,
when the planar mold surface of the fine structure mold is pressed against the curable resin on the base material, the planar mold surface of the fine structure mold is provided to lean by 0.1 degrees or more and 5.0 degrees or less against the surface of the base material,
a first projection pattern and a second projection pattern are formed by pressing the first mold depression pattern and the second mold depression pattern against the curable resin on the surface of the base material, and the curable resin is made to flow into surroundings of the second projection pattern,
the planar mold surface of the fine structure mold is moved to a position where the first mold depression pattern overlaps with the second projection pattern, and
a first overlapping projection pattern is formed by pressing the first mold depression pattern against the second projection pattern and the curable resin of the surroundings of the second projection pattern.

2. A method of manufacturing a fine structure body which manufactures the fine structure body by repeating (i) a basic fine structure body forming step that forms a basic fine structure body by pressing a fine structure mold against a curable resin on a surface of a base material and (ii) a release and moving step that releases the fine structure mold from the base material and moves the fine structure mold, wherein
the fine structure mold includes a planar mold surface and at least a first mold depression pattern which is disposed at a center area of the planar mold surface, and a second mold depression pattern which is disposed in at least one side part of the planar mold surface,
a size of the second mold depression pattern is 50% or more and is 75% or less of a size of the first mold depression pattern,
a first projection pattern and a second projection pattern are formed by pressing the first mold depression pattern and the second mold depression pattern against the curable resin on the surface of the base material, and the curable resin is made to flow into surroundings of the second projection pattern,
the planar mold surface of the fine structure mold is moved to a position where the first mold depression pattern overlaps with the second projection pattern, and
a first overlapping projection pattern is formed by pressing the first mold depression pattern against the second projection pattern and the curable resin of the surroundings of the second projection pattern.

3. The method of manufacturing the fine structure body according to claim 2 , wherein
the fine structure mold includes the first mold depression pattern, the second mold depression pattern and a third mold depression pattern which is disposed in at least one corner of the one side part at which the second mold depression pattern exists, and
a size of the third mold depression pattern is smaller than the size of the second mold depression pattern.

4. The method of manufacturing the fine structure body according to claim 3 , wherein
the size of the second mold depression pattern is 50% or more and is 75% or less of the size of the first mold depression pattern, and
the size of the third mold depression pattern is 50% or more and is 75% or less of the size of the second mold depression pattern.

5. The method of manufacturing the fine structure body according to claim 2 , wherein
an external contour of the fine structure mold is a hexagon, and
the second mold depression patterns are disposed at three side parts of the circumference of the fine structure mold, the three sides being adjacent to each other.

6. The method of manufacturing the fine structure body according to claim 5 , wherein
a third mold depression pattern is provided and a size of which is smaller than the size of the second mold depression pattern, and
the third mold depression patterns are disposed at corners where the two side parts of the adjoining three side parts of the fine structure mold, cross.

7. The method of manufacturing the fine structure body according to claim 2 , wherein
the base material is a seamless base material belt, and
the fine structure body is a circular continuous fine structure body.

8. The method of manufacturing the fine structure body according to claim 1 , wherein
the fine structure mold includes the first mold depression pattern, the second mold depression pattern and a third mold depression pattern which is disposed in at least one corner of the one side part at which the second mold depression pattern exists, and
a size of the third mold depression pattern is smaller than the size of the second mold depression pattern.

9. The method of manufacturing the fine structure body according to claim 1 , wherein
the base material is a seamless base material belt, and
the fine structure body is a circular continuous fine structure body.

Assignees

• Yamamoto Yuji
• Wada Toshihiko
• Takasu Yoshifumi
• Yamada Akihisa
• Panasonic Ip Man Co Ltd

Inventors

• Yamamoto Yuji
• Wada Toshihiko
• Takasu Yoshifumi
• Yamada Akihisa

Classifications

• B29C59/02

  by mechanical means, e.g. pressing {(B29C59/007 takes precedence; embossing expanded porous articles B29C44/5627)} · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• B29C33/42

  characterised by the shape of the moulding surface, e.g. ribs or grooves · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title