Turning vane

Patent metadata

Field	Value
Publication number	US-9399199-B2
Application number	US-201414772461-A
Country	US
Kind code	B2
Filing date	Feb 9, 2014
Priority date	Mar 12, 2013
Publication date	Jul 26, 2016
Grant date	Jul 26, 2016

Abstract

The disclosed embodiments include a mass flow controller for controlling a flow of a fluid. In one embodiment, the mass flow controller comprises an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow meter for providing a signal corresponding to mass flow of the fluid through the flow path, the mass flow meter having a bypass through which a majority of fluid flows; a turning vane positioned upstream of the bypass for generating a more uniform fluid flow; an adjustable valve for regulating the flow of the fluid out of an outlet of the mass flow controller; and a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller.

First claim

The invention claimed is:

1. A mass flow controller for controlling a flow of a fluid, the mass flow controller comprising:
an inlet for receiving the fluid;
a flow path in which the fluid passes through the mass flow controller;
a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path;
a bypass coupled to the mass flow sensor through which a majority of fluid flows;
a turning vane positioned upstream of the bypass for generating a more uniform fluid flow;
an adjustable valve for regulating the flow of the fluid out of an outlet of the mass flow controller; and
a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller.

2. The mass flow controller of claim 1 , wherein the turning vane includes a flow mixer.

3. The mass flow controller of claim 2 , wherein the flow mixer abuts an inlet screen of the bypass.

4. The mass flow controller of claim 2 , wherein turning vane includes a flat portion abutting the flow mixer.

5. The mass flow controller of claim 1 , wherein the turning vane comprises a plurality of vanes.

6. The mass flow controller of claim 5 , wherein an angle of a curved surface for each vane within the plurality of vanes of the turning vane gradually increases from a bottom vane to a top vane.

7. The mass flow controller of claim 1 , wherein the turning vane comprises a single vane.

8. The mass flow controller of claim 7 , wherein a portion of a curved section of the single vane is straightened to permit partial fluid flow through the turning vane.

9. The mass flow controller of claim 1 , wherein the turning vane includes a support structure.

10. The mass flow controller of claim 1 , wherein the turning vane abuts an inlet screen of the bypass.

11. A turning vane configured to be positioned upstream of a bypass of at least one of a flow controller and flow meter for generating a more uniform fluid flow.

12. The turning vane of claim 11 , further comprising a flow mixer.

13. The turning vane of claim 12 , wherein the flow mixer is configured to abut an inlet screen of the bypass.

14. The turning vane of claim 12 , wherein turning vane includes a flat portion abutting the flow mixer.

15. The turning vane of claim 11 , wherein the turning vane comprises a plurality of vanes.

16. The turning vane of claim 15 , wherein an angle of a curved surface for each vane within the plurality of vanes of the turning vane gradually increases from a bottom vane to a top vane.

17. The turning vane of claim 11 , wherein the turning vane comprises a single vane.

18. The turning vane of claim 17 , wherein a portion of a curved section of the single vane is straightened to permit partial fluid flow through the turning vane.

19. The turning vane of claim 1 , wherein the turning vane includes a support structure.

20. A mass flow meter for measuring a flow of a fluid, the mass flow meter comprising:
an inlet for receiving the fluid;
a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the mass flow meter;
a bypass coupled to the mass flow sensor through which a majority of fluid flows; and
a turning vane positioned upstream of the bypass for generating a more uniform fluid flow.

Assignees

• Illinois Tool Works

Inventors

• Dille Joseph C
• Altonji Robert W
• Wang Guoging

Classifications

• G01F1/82

  using a driven wheel as impeller and one or more other wheels or moving elements which are angularly restrained by a resilient member, e.g. spring member as the measuring device · CPC title

• F15D1/001

  Flow of fluid from conduits such as pipes, sleeves, tubes, with equal distribution of fluid flow over the evacuation surface · CPC title

• G01F5/00

  Measuring a proportion of the volume flow · CPC title

• G05D7/0635

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• G01F1/684 Primary

  Structural arrangements; Mounting of elements, e.g. in relation to fluid flow · CPC title