Apparatus and method for generating pulse laser
US-2015372447-A1 · Dec 24, 2015 · US
US9397474B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9397474-B2 |
| Application number | US-201414497393-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 26, 2014 |
| Priority date | Jan 10, 2014 |
| Publication date | Jul 19, 2016 |
| Grant date | Jul 19, 2016 |
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A method for manufacturing a semiconductor device includes forming a lower light confinement layer on a substrate, a light absorption layer on the lower light confinement layer, and an upper light confinement layer on the light absorption layer; and removing parts of these layers to form an optical modulator, forming a laser section having a diffraction grating in a portion of the substrate where the optical modulator is not present, forming a diffusion constraining layer, which constrains diffusion of a dopant, on the upper light confinement layer, and forming a contact layer on the laser section and the diffusion constraining layer. The same dopant is present in the contact layer and the upper light confinement layer.
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What is claimed is: 1. A method for manufacturing a semiconductor device, comprising: forming a lower light confinement layer on a substrate, an undoped light absorption layer on the lower light confinement layer, and an upper light confinement layer on the undoped light absorption layer, wherein the upper light confinement layer includes one of Be and Zn as a dopant; removing parts of the lower light confinement layer, the undoped light absorption layer, and the upper light con…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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