Junctionless nano-electro-mechanical resonant transistor

US9397285B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9397285-B2
Application numberUS-201314395626-A
CountryUS
Kind codeB2
Filing dateApr 19, 2013
Priority dateApr 19, 2012
Publication dateJul 19, 2016
Grant dateJul 19, 2016

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Abstract

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A junctionless Nano-Electro-Mechanical (NEM) resonator, comprising a highly doped conductive channel connecting a drain region and a source region; the conduction channel region is movable and the overall structure is fixed at least at these two ends placed on acting the source and drain regions, respectively; at least one fixed gate electrode arranged to control a depletion charge in the highly doped conductive channel thereby modulating dimensions of a cross-section of the highly doped conductive channel. A dimension of the cross-section in the direction of an electrical field that is oriented from the fixed gate electrode to the highly doped conductive channel, is designed in such a way that it can be reduced under the effect of the depletion charge such that a full depletion in the highly doped conductive channel is achievable with the control of the fixed gate electrode.

First claim

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The invention claimed is: 1. A junctionless Nano-Electro-Mechanical (NEM) resonant transistor, comprising: a highly doped conductive channel with a doping concentration equal or higher than 2×10 18 donors or acceptors atoms/cm 3 , forming a device channel that is placed between two other highly doped regions of same type of either donors or acceptors, the two other highly doped regions being called respectively a drain region and a source region, thereby forming a junctionless n+…

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What does patent US9397285B2 cover?
A junctionless Nano-Electro-Mechanical (NEM) resonator, comprising a highly doped conductive channel connecting a drain region and a source region; the conduction channel region is movable and the overall structure is fixed at least at these two ends placed on acting the source and drain regions, respectively; at least one fixed gate electrode arranged to control a depletion charge in the highl…
Who is the assignee on this patent?
Ecole Polytech
What technology area does this patent fall under?
Primary CPC classification H01L41/0966. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jul 19 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).