Integrated micro-inverter and thin film solar module and manufacturing process

Patent metadata

Field	Value
Publication number	US-9397251-B2
Application number	US-201414157962-A
Country	US
Kind code	B2
Filing date	Jan 17, 2014
Priority date	Aug 14, 2013
Publication date	Jul 19, 2016
Grant date	Jul 19, 2016

Abstract

Embodiments of the present invention include a method for manufacturing, and a structure for a thin film solar module. The method of manufacturing includes fabricating a thin film solar cell and fabricating an electronic conversion unit (ECU) on a single substrate. The thin film solar cell has at least one solar cell diode on a substrate. The ECU has at least one transistor on the substrate. The ECU may further comprise a capacitor and an inductor. The ECU is integrated on the substrate monolithically and electrically connected with the thin film solar cell. The ECU and the thin film solar cell interconnect to form a circuit on the substrate. The ECU is electrically connected to a microcontroller on the solar cell module.

First claim

What is claimed is:

1. A method for manufacturing a thin film solar module, the method comprising:
fabricating a thin film solar cell, having at least one solar cell diode, on a substrate; and
fabricating an electronic conversion unit (ECU), having at least one transistor, on the substrate, including monolithically integrating the ECU with the thin film solar cell on the substrate, and electrically connecting the ECU and the thin film solar cell to form a circuit on the substrate;
wherein the monolithically integrating the ECU with the thin film solar cell includes:
depositing a backside electrode material onto the substrate;
segmenting the backside electrode material into a multitude of segments;
using a first of the segments to form the at least one solar cell diode; and
using a plurality of others of the segments to form the ECU.

2. The method of claim 1 , wherein a process for fabricating the thin film solar cell and a process for fabricating the ECU comprises one or more common actions such that the resultant thin film solar cell and ECU are composed on a single substrate monolithically.

3. A method for manufacturing a thin film solar module, the method comprising:
fabricating a thin film solar cell, having at least one solar cell diode, on a substrate; and
fabricating an electronic conversion unit (ECU), having at least one transistor, on the substrate, wherein the ECU and the thin film solar cell interconnect to form a circuit on the substrate; and
wherein fabricating the thin film solar cell and fabricating the ECU on the substrate collectively comprise:
depositing a backside electrode material onto the substrate;
creating a first segment of the backside electrode material, wherein the first segment forms a backside electrode for the thin film solar cell;
depositing a first insulator material over the backside electrode material;
etching an opening into the first insulator material to expose a portion of the backside electrode;
depositing a semiconductor absorber material on the exposed portion of the backside electrode to create a solar cell diode of the thin film solar cell;
depositing a transparent conducting material over the semiconductor absorber material and the first insulator material;
etching an opening through the transparent conducting material to expose a portion of the first insulator material;
depositing a semiconducting transistor material onto the exposed portion of the first insulator material, such that the semiconducting transistor material is electrically connected to the solar cell diode by the transparent conducting material; and
depositing a second insulator material onto the semiconducting transistor material, and depositing a conducting top electrode onto the second insulator material to create the top gate of a transistor of the ECU in electrical connection with the solar cell diode.

4. The method of claim 3 , further comprising:
creating a second segment of the backside electrode material, wherein the second segment forms a backside electrode for a capacitor of the ECU; and
subsequent to depositing the transparent conducting material, segmenting the transparent conducting material to form a topside electrode for the capacitor.

5. The method of claim 3 , further comprising:
creating multiple consecutive segments of the backside electrode material, wherein the multiple consecutive segments can be utilized as an inductor of the ECU; and
subsequent to depositing the first insulator material and prior to depositing the transparent conducting material, etching a second opening into the first insulator material to expose at least one of the multiple consecutive segments of the backside electrode material, such that the deposition of the transparent conducting material provides an electrical connection between the inductor, the solar cell diode, and at least the transistor of the ECU.

6. The method of claim 3 , further comprising:
creating a second segment of the backside electrode material, wherein the second segment forms a bottom gate for the transistor, and wherein the transistor of the ECU may be fabricated as one of a bottom gate transistor, and a dual gate transistor.

7. The method of claim 3 , wherein the substrate comprises one of: glass, polyimide film, and flexible steel foil.

8. The method of claim 3 , wherein the first insulator material and the second insulator material comprises one of: aluminum oxide (Al 2 O3), and silicon dioxide (SiO 2 ).

9. The method of claim 3 , wherein the semiconductor absorber material comprises at least one of: a-Si, amorphous silicon alloy, CIGS, CdS, CuInSe 2 , (CIS), cadmium telluride (CdTe), copper zinc tin sulfide/selenide (CZTS), and spcialized organic photovoltaics (OPV).

10. The method of claim 3 , wherein the transparent conducting material comprises at least one of: as tin doped indium oxide (ITO), intrinsic zinc oxide (i-ZnO), aluminum doped zinc oxide (ZnO:Al), and indium-doped cadmium oxide.

11. The method of claim 3 , wherein the semiconducting transistor material comprises amorphous InGaZnO (a-IGZO).

12. The method claim 1 , wherein the monolithically integrating the ECU with the thin film solar cell further includes:
depositing a transparent conducting material above, the segments of the backside electrode material to connect electrically the ECU and the thin film solar cell.

Assignees

• Globalfoundries Inc

Inventors

• Eickelmann Hans-Juergen
• Kellman Ruediger
• Kuehl Hartmut
• Schmidt Markus

Classifications

• H10P14/3434

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title

• H10D99/00

  Subject matter not provided for in other groups of this subclass · CPC title

• H10D30/6755

  Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate · CPC title

• H10F77/219

  Arrangements for electrodes of back-contact photovoltaic cells · CPC title

• H10F71/138

  Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes · CPC title