Lithographic cluster system, method for calibrating a positioning device of a lithographic apparatus

Patent metadata

Field	Value
Publication number	US-9395633-B2
Application number	US-201314413394-A
Country	US
Kind code	B2
Filing date	Jun 14, 2013
Priority date	Jul 10, 2012
Publication date	Jul 19, 2016
Grant date	Jul 19, 2016

Abstract

A method of calibrating a substrate positioning system of a lithographic apparatus, the method including: exposing a pattern with the lithographic apparatus on an exposed layer on the surface of a substrate having a reference layer, wherein the pattern corresponds to a movement of the substrate by the substrate positioning system; measuring overlay data between the exposed layer and the reference layer on a plurality of positions on the substrate; transforming the overlay data from a spatial domain to a frequency domain by a discrete cosine transformation; modifying the overlay data in the frequency domain by selecting a subset of the overlay data; transforming the modified overlay data from the frequency domain back to the spatial domain by an inverse discrete cosine transformation; calibrating the substrate positioning system by using the modified overlay data in the spatial domain.

First claim

What is claimed is:

1. A method for calibrating a positioning device of a lithographic apparatus, wherein the positioning device is arranged to position a substrate, the method comprising:
creating an exposed layer by exposing with the lithographic apparatus a pattern on a layer on the substrate, so as to create an exposed pattern on the layer, wherein the substrate has a reference layer, wherein the exposed pattern corresponds to a movement of the substrate by the positioning device;
measuring overlay data between the exposed layer and the reference layer on a plurality of positions on the substrate;
creating frequency domain data by transforming the overlay data from a spatial domain to a frequency domain by a discrete cosine transformation;
creating a data subset by selecting a subset of the frequency domain data;
creating calibration data by transforming the data subset to the spatial domain by an inverse discrete cosine transformation;
calibrating the positioning device by using the calibration data.

2. The method according to claim 1 , wherein creating a data subset comprises setting data outside the subset to zero.

3. The method according to claim 1 , wherein the frequency domain data is in the form of an overlay matrix, wherein a coefficient located on a top left corner of the overlay matrix corresponds to frequency domain data with a base frequency.

4. The method according to claim 1 , wherein the frequency domain data comprises high frequency data and low frequency data, wherein the high frequency data represent high spatial frequencies, wherein the low frequency data represent low spatial frequencies, and wherein the subset comprises the low frequency data.

5. The method according to claim 1 , wherein the frequency domain data comprises high frequency data, middle frequency data and low frequency data, wherein the high frequency data represent high spatial frequencies, wherein the low frequency data represent low spatial frequencies, wherein the middle frequency data represent a spatial frequency range between the low spatial frequencies and the high spatial frequencies, wherein the subset comprises the middle frequency data.

6. The method according to claim 1 , wherein the frequency domain data is in the form of an overlay matrix, and the subset data is in the form of an overlay submatrix, and wherein the overlay submatrix is a square matrix.

7. The method according to claim 1 , wherein the discrete cosine transformation is of an DCT-II type and the inverse cosine transformation is of an DCT-III type.

8. A lithographic cluster system, comprising:
a lithographic apparatus for exposing a pattern on a substrate, the lithographic apparatus comprising a positioning device for moving the substrate; and
a measurement apparatus configured to measure overlay data on a substrate;
wherein the lithographic apparatus is arranged to:
create an exposed layer by exposing the pattern on a layer on a substrate, so as to create an exposed pattern on the layer, wherein the substrate has a reference layer, wherein the exposed pattern corresponds to a movement of the substrate by the substrate positioning system device;

wherein the measurement apparatus is arranged to:
measure overlay data between the exposed layer and the reference layer on a plurality of positions on the substrate;
create frequency domain data by transforming the overlay data from a spatial domain to a frequency domain by a discrete cosine transformation;
create subset data by selecting a subset of the frequency domain data;
create calibration data by transforming the subset data to the spatial domain by an inverse discrete cosine transformation;

wherein the lithographic cluster system is arranged to calibrate the positioning device using the calibration data.

9. The lithographic cluster system according to claim 8 , wherein the measurement apparatus is arranged to create the subset data by setting data outside the subset to zero in the frequency domain.

10. The lithographic cluster system according to claim 8 , wherein the frequency domain data is in the form of an overlay matrix, wherein a coefficient located on a top left corner of the overlay matrix corresponds to frequency domain data with a base frequency.

11. The lithographic cluster system according to claim 8 , wherein the frequency domain data comprises high frequency data and low frequency data, wherein the high frequency data represent high frequencies, wherein the low frequency data represent low frequencies, and wherein the subset comprises the low frequency data.

12. The lithographic cluster system according to claim 8 , wherein the frequency domain data comprises high frequency data, middle frequency data and low frequency data, wherein the high frequency data represent high spatial frequencies, wherein the low frequency data represent low spatial frequencies, wherein the middle frequency data represent a spatial frequency range between the low spatial frequencies and the high spatial frequencies, wherein the subset comprises the middle frequency data.

13. The lithographic cluster system according to claim 8 , wherein the frequency domain data is in the form of an overlay matrix, and the subset data is in the form of an overlay submatrix, and wherein the overlay submatrix is a square matrix.

14. The lithographic cluster system according to claim 8 , wherein the discrete cosine transformation is of an DCT-II type and the inverse cosine transformation is of an DCT-III type.

15. A measurement apparatus arranged to:
measure, at a plurality of positions on a substrate, overlay data between an exposed layer on the substrate and a reference layer on the substrate, wherein the exposed layer is created by exposing with a lithographic apparatus a pattern on a layer on the substrate, wherein the exposed pattern corresponds to a movement of the substrate by a positioning device of the lithographic apparatus;
create frequency domain data by transforming the overlay data from a spatial domain to a frequency domain by a discrete cosine transformation;
create a data subset by selecting a subset of the frequency domain data; and
create calibration data by transforming the data subset to the spatial domain by an inverse discrete cosine transformation, wherein the calibration data is suitable for calibrating the positioning device.

Assignees

• Asml Netherlands Bv

Inventors

• Danilin Alexander Alexandrovich
• Arrizabalaga Uriarte Alejandro Xabier
• Menchtchikov Boris
• Padiy Alexander Viktorovych

Classifications

• G03F7/70633 Primary

  Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching · CPC title

• G03F7/70725

  control · CPC title

• G03F7/70516 Primary

  Calibration of components of the microlithographic apparatus, e.g. light sources, addressable masks or detectors · CPC title