Inspection apparatus and method
US-9222834-B2 · Dec 29, 2015 · US
US9395247B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9395247-B2 |
| Application number | US-201414767828-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 13, 2014 |
| Priority date | Feb 15, 2013 |
| Publication date | Jul 19, 2016 |
| Grant date | Jul 19, 2016 |
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An apparatus comprises a semiconductor single-photon avalanche detector, and a counter. The detector performs detections of photons of optical radiation caused by an optical excitation pulse to the object. The counter measures timing of each detection made in the detector with respect to the excitation pulse causing the detected photons, and performs at least one of the following: forming a number of Raman detections, forming a number of fluorescence detections. Forming the number of the Raman detections is performed by eliminating an estimate of a number of fluorescence photons in the measurement. Forming the number of the fluorescence detections is performed by eliminating an estimate of a number of Raman photons in the measurement. The estimates are formed in a predetermined manner from the number and timing of the detections.
Opening claim text (preview).
The invention claimed is: 1. An apparatus for measuring inelastic scattering from an object comprises: a semiconductor single-photon avalanche detector, and a counter; the detector being configured to perform detections of single photons of optical radiation formed in an interaction between an optical excitation pulse and the object; the counter being configured to measure timing of each detection made in the detector with respect to the excitation pulse causing the detected photons, perform at least one of the following: forming a number of Raman detections in a Raman time window, forming a number of fluorescence detections in at least one fluorescence time window, the beginning moment of the at least one fluorescence window being after the beginning of the Raman window, where the counter is, related to the Raman detections, configured to form the number of the Raman detections by eliminating an estimate of a number of fluorescence photons in the Raman window, the estimate being formed on the basis of a number of the detections in the at least one fluorescence window, or the counter is, related to the fluorescence detections, configured to form the number of the fluorescence detections by eliminating an estimate of a number of Raman photons in the at least one fluorescence window, the estimate being formed on the basis of a number of the detections in the Raman window. 2. The apparatus of claim 1 , wherein the counter being configured to measure timing of each detection made in the detector with respect to the excitation pulse causing the detected photons, count a number of detections in at least two different predetermined time windows on the basis of the timing of each detection, one of the predetermined time windows being a Raman window starting at an arrival of the optical radiation from the interaction between the optical excitation pulse and the object and at least one separate time window each of which being a fluorescence window starting after a beginning of the Raman window, and perform at least one of the following: form a number of Raman detections by eliminating an estimate of a number of fluorescence photons in the Raman time window on the basis of a number of detections in the at least one fluorescence window, form a number of fluorescence detections by eliminating an estimate of a number of Raman photons in the at least one separate time window on the basis of a number of detections in the Raman window. 3. The apparatus of claim 1 , wherein the detector comprises a detector array with a plurality of detector elements, the detector being configured to perform detections of photons in a plurality of optical bands simultaneously such that each detector element is configured to detect one optical band, the photons which are formed in response to an optical excitation pulse directed to the object belonging to the optical bands; the counter being configured to count a number of detections in at least one optical band on the basis of the timing of each detection, and perform at least one of the following: form a number of Raman detections by eliminating an estimate of a number of detections of fluorescence photons in the Raman time window of each of the desired optical band on the basis of a number of detections in the at least one fluorescence window of each of the desired optical band, form a number of fluorescence detections by eliminating an estimate of a number of detections of fluorescence photons in the at least one separate time window of each of the desired optical band on the basis of a number of detections in the Raman window of each of the desired optical band. 4. The apparatus of claim 3 , wherein the signal processing unit is configured to form a distribution of a number of detections as a function of optical bands. 5. The apparatus of claim 1 , wherein the counter has a clock signal available, and the counter is configured to receive an electric timing mark based on a moment of generation of the excitation pulse from the source of excitation pulses for measuring the timing of each detection with respect to the excitation pulse. 6. The apparatus of claim 5 , wherein the apparatus comprises a delay circuit configured to delay the electric timing mark by a predetermined delay, and the apparatus is configured to provide the counter with the electric timing mark through the delay circuit after at least a first expected detection. 7. The apparatus of claim 5 , wherein the counter is configured to receive a clock signal from a separate clock circuit. 8. The apparatus of claim 5 , wherein the counter comprises a clock circuit configured to provide the clock signal. 9. The apparatus of claim 1 , wherein the counter is configured to switch on the time measurement of detections at the first detection. 10. The apparatus of claim 5 , wherein the apparatus is configured to provide the counter with the electric timing mark before detections. 11. The apparatus of claim 5 , wherein the apparatus comprising a controller couplable with the source of the excitation pulse, the controller being configured to form a timing signal at a moment of the electric control signal switching the source of the excitation pulse to output the optical excitation pulse, the timing signal acting as the electric timing mark. 12. The apparatus of claim 5 , wherein the apparatus comprises an optical component configured to receive a part of the optical excitation pulse and to transform it into the electric timing mark for the counter. 13. The apparatus of claim 1 , wherein the apparatus comprises a signal processing unit configured to form a distribution of a number of the detections as a function of time. 14. The apparatus of claim 1 , wherein the counter is configured to measure a number of detections caused by dark current of the detector in a dark current window which is a time window without photons from the interaction of the excitation pulse and the object to the detector; and the counter is configured to eliminate a number of the detections caused the dark current from at least one of the following: the number of the Raman detections, the number of the fluorescent detections. 15. The apparatus of claim 14 , wherein the counter is configured to count a number of detections in at least four predetermined time windows on the basis of the timing of each detection, the counter is configured to count a number of detections caused by dark current of each detector element in the dark current window, Raman and fluorescence photons in the Raman window, fluorescence photons in a first fluorescence window, and fluorescence photons in a second fluorescence window separate from the dark current window and starting after the Raman and the first fluorescence time window; and the counter is configured to form a number of Raman and fluorescence detections by eliminating a number of the detections caused by the dark current on the basis of the count in dark current window for forming at least one of the following: the number of Raman detections, the number of fluorescence detections, the estimate of the number of the fluorescence photons in the Raman time window being based on the number of detections in the first and second fluorescence windows. 16. The apparatus of claim 1 , wherein the detector has rows shifted with respect to each other. 17. The apparatus of claim 1 , wherein rows of the detector and an exit aperture of a spectrometer are skewed with respect to each other. 18. A method for measuring inelastic scattering from an object, the method comprising: perfor
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