Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
US9394600B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9394600-B2 |
| Application number | US-201414227435-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 27, 2014 |
| Priority date | Jun 19, 2013 |
| Publication date | Jul 19, 2016 |
| Grant date | Jul 19, 2016 |
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A deposition mask assembly includes: a mask in which a deposition pattern is formed and a mask frame fixed to an edge of the mask, an opening being formed at a center of the mask frame. A first surface of the edge of the mask and a first surface of the mask frame adjacent to the opening which face each other are welded to each other.
Opening claim text (preview).
What is claimed is: 1. A deposition mask assembly, comprising: a mask in which a deposition pattern is formed; a mask frame fixing an edge of the mask, wherein the mask frame includes a first surface, a second surface downwardly extending from the first surface, and a third surface facing the second surface; an opening being formed at a center of the mask frame; a plurality of welding holes formed to extend through the first surface of the mask frame; and a welding rod insertion groove configured to accommodate a welding rod formed between the second surface and the third surface of the mask frame, wherein the welding rod insertion groove is connected to at least one of the welding holes, and the welding rod insertion groove is opened in the opposite direction of the at least one welding hole, wherein a first surface of the edge of the mask and the first surface of the mask frame adjacent to the opening which face each other are welded to each other. 2. The deposition mask assembly of claim 1 , wherein the welding holes are formed along a circumference of the opening. 3. The deposition mask assembly of claim 2 , wherein the opening has a quadrangular shape. 4. The deposition mask assembly of claim 1 , wherein the second surface forms a closed curved line along the circumference of the opening. 5. The deposition mask assembly of claim 1 , wherein the third surface is formed outside the second surface when viewed in a direction away from the opening.
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